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CARACTÉRISATION MÉCANIQUE DES MATÉRIAUX EN FAIBLE ÉPAISSEUR PAR INTERFÉROMÉTRIE NUMÉRIQUE. APPLICATION AUX ESSAIS DE GONFLEMENT ET DE TRACTION.

Abstract : The aim of the study is the determination of the mechanical properties of thin films by optical metrology and numerical analysis. The centers of interest are the residual stresses on the one hand and the tensile test on the other hand. The optical methods used are interferometric fringes projection (contouring) and numerical speckle photography.

Contouring gives the out-of-plane displacements. Residual stresses in thin films are measured by courbure analysis and/or bulging test. We conclude by three experimental works:
1. the validity limits of the Stoney's formula even with free standing bilayers (SiO2/Si);
2. the evidence of buckling in compressed bilayer membranes (SiO2/Si);
3. a good agreement between bulging tests and nanoindentation tests for film in a state of residual tension (polimiide).

Numerical speckle photography gives the in-plane displacements field. We adapted this method to a tensile test for thin film that has been fabricated during the PhD. An original algorithm with subpixel displacement sensivity has been developped and has been fully compared, by simulations and experiments, with classical correlation methods. The rapidity of the algorithm and its high resolution allows the calculation of the displacements fields during the tensile test. The in-plane strains are then calculated ans allows us to obtain the stress/strain relations and to calculate Young's modulus E and Poisson's ratio v. To validate the tensile test, we have tested two kinds of materials: the first one is ductile (electrodeposited copper) and the second one is fragile (monocristal of silicon).
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Contributor : Christophe Poilâne <>
Submitted on : Monday, October 6, 2008 - 7:16:27 PM
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  • HAL Id : tel-00326993, version 1

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Christophe Poilâne. CARACTÉRISATION MÉCANIQUE DES MATÉRIAUX EN FAIBLE ÉPAISSEUR PAR INTERFÉROMÉTRIE NUMÉRIQUE. APPLICATION AUX ESSAIS DE GONFLEMENT ET DE TRACTION.. Mécanique [physics.med-ph]. Université de Franche-Comté, 1998. Français. ⟨tel-00326993⟩

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