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Synthèse et caractérisation de précurseurs de cuivre, or et iridium et études des dépots de films métalliques correspondants par CVD pour des applications en microelectronique

Abstract : A novel series of fluorine free copper (I) precursors, (b-diketonate)Cu(L) (L = BTMSA or TMSP), has been synthesized by acid-base reaction and characterized. Of these precursors, (5-methyl-2,4-hexanedionate)Cu(BTMSA) and (5,5-dimethyl-2,4-hexanedionate)Cu(BTMSA) are the most interested ones. By using these precursors, continuous, highly pure and electrically conducting copper thin films were grown on Ta/TaN at low deposition temperatures with high deposition rates (50 nm/min). AuCl(PF3) has also been evaluated for Au thermal CVD in this work. This inorganic precursor was used both in solid form (with a conventional bubbler) and in a solution with toluene solvent (use of a liquid delivery system). Use of H2 as co-reactant gas, continuous and highly pure gold metallic thin films were deposited on Ta/TaN at depostion temperatures as low as 110°C. The impact of carrier gas nature (N2, H2) and deposition temperature on the precursor deposition reaction as well as on the properties of grown gold films has been investigated. [IrCl(PF3)2]2 has been used, for the first time in this work, as iridium source for Ir CVD. This inorganic precursor is very volatile but highly air-sensible. Hence, in this work, we have synthesized this precursor "in-situ" in the CVD reactor from IrCl(PF3)4 which is more air stable but more thermally unstable. Under N2 carrier gas, compact, conformal and highly pure iridium thin films were grown on SiO2/Si from 240°C. We have also studied the influence of carrier gas nature (N2, H2, or O2) as well as the deposition temperature on the growth of iridium films.
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Submitted on : Thursday, May 22, 2008 - 11:06:07 AM
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Phong Tran Dinh. Synthèse et caractérisation de précurseurs de cuivre, or et iridium et études des dépots de films métalliques correspondants par CVD pour des applications en microelectronique. Chimie. Université Paris Sud - Paris XI, 2007. Français. ⟨tel-00281390⟩

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