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Theses

TEXTURATION DE SURFACES ET APPLICATIONS :
CROISSANCE AUTO-ORGANISÉE DE NANOSTRUCTURES

Abstract : The scope of this study is the self-organization of metal nanostructures as small as 10 nm and with good edge quality. We developed a process that allow the elaboration of such nanostructures arrays, self-organized on Si(111) along a unidimensional step bunch network. The density (between 109 et 1011 islands/cm2) and size (between 10 and 50 nm) of thus obtained objects are controllable. Several crystalline structures were observed, some are gold silicides, metastable compounds stabilized by the small size of the objects. We used these small metal islands for two distinct applications, the elaboration of a network of magnetic nanodots and the growth of semiconductor nanowires made of Si and Ge. In parallel, an original process that allow to electrically contact nanostructures was developed. To be able to control the islands position according to a two-dimensional (2D) pattern, we developed a surface texturation process using electronic beam lithography, reactive ion etching followed by annealing under ultra-high vacuum. This process involves the formation of a 2D network of step bunches which would allow to control the exact position of the objects on these nucleation centers. Such textured silicon surfaces at the tenth nm scale were used for the AFM study of membrane proteins via a collaboration with the Institut Curie in Paris. In addition, as an alternative to silicon, we studied the structuration of silicon carbide (SiC) by reactive ion etching. An alumina membrane with a periodic network of pores is used as masks for the etch step. The etched SiC surface is then treated by an annealing at very high temperature under hydrogen.
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https://tel.archives-ouvertes.fr/tel-00270692
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Submitted on : Monday, April 7, 2008 - 11:39:05 AM
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Guillaume Agnus. TEXTURATION DE SURFACES ET APPLICATIONS :
CROISSANCE AUTO-ORGANISÉE DE NANOSTRUCTURES. Matière Condensée [cond-mat]. Université Paris Sud - Paris XI, 2007. Français. ⟨tel-00270692⟩

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