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Conception et réalisation d'une plate-forme multi-capteur de gaz conductimétriques...Vers le nez électronique intégré

Abstract : Semiconducting oxide gas sensors often bases on structures unstable over time and presents always low gas selectivity. Thus this work describes the development of new generation gas microsensors. The different elements of the device have been studied and improved. In particular, a new micro-hotplate with platinum resistance could be achieved by using a numerical approach based on the finite element method. Good control of technological processes has enabled the development of a multi-sensors technology involving four cells on one chip. A WO3 sensitive layer was able to be integrated into this system and electrical and thermographic characterizations of devices have been enabled to validate functioning and good stability of structures. Preliminary tests in controlled gaseous atmosphere have provided good overall performances in term of sensibility and selectivity. This work is encouraging first stage for electronic nose realisation.
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https://tel.archives-ouvertes.fr/tel-00265932
Contributor : Emilie Marchand <>
Submitted on : Thursday, March 20, 2008 - 3:25:36 PM
Last modification on : Friday, January 10, 2020 - 9:08:08 PM
Long-term archiving on: : Friday, September 28, 2012 - 11:30:51 AM

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  • HAL Id : tel-00265932, version 1

Citation

Habib Chalabi. Conception et réalisation d'une plate-forme multi-capteur de gaz conductimétriques...Vers le nez électronique intégré. Micro et nanotechnologies/Microélectronique. Université Paul Cézanne - Aix-Marseille III, 2007. Français. ⟨tel-00265932⟩

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