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Optimisation technologique de commutateurs MEMS RF à tenue en puissance améliorée - Application à l'élaboration d'un synthétiseur d'impédance MEMS en bande K

Chloé Bordas 1
1 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Capacitive RF MEMS (MicroElectroMechanical System) switches present well-known interests in microwave field for a lot of applications (spatial, automotive, mobile phone). They may bring tunability to high frequency modules without all the drawbacks of active devices (losses, limited isolation, additional noise...). However numerous problems remain unsolved like dielectric reliability, power handling and fabrication yield which slow down the industrialisation of such components. Strong knowledge in multi-physic domains (microwave, mechanical, thermal, process) is required to improve capacitive RF MEMS. Efforts have already been done on the design, the dielectric reliability and the technological process. This last-one is not enough improved to obtain functional structures with enhanced performances and reproducibility. The main purpose of this thesis work deals with the optimization of the fabrication process of capacitive RF switches with enhanced power handling and their integration in an impedance tuner for K band applications. The first section shows the classical fabrication process and its principal improvements. Studies on sacrificial layer and releasing method permitted to increase the RF performances and the technological yield. Furthermore, new dielectrics (strontium fluoride and silicon nitride doped by carbon nanotubes (CNT)) have been investigated in order to get better switch life time. The relation between the applied power and the generated temperature is described in the second chapter. Thermal characterizations have been performed to understand the mechanical behaviours under stress, notably like power measurements or also harsh environments. Thanks to infra-red (IR) camera, the overheating due to power has been determined. Solutions have been found and studied to absorb or prevent deformations under thermal stress. Finally, all these improvements and studies have been applied to a power circuit: an impedance tuner, whic h is composed of six switches. Its design, fabrication and characterization constitute the third and final chapter of this manuscript.
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Submitted on : Wednesday, March 19, 2008 - 9:14:54 AM
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Chloé Bordas. Optimisation technologique de commutateurs MEMS RF à tenue en puissance améliorée - Application à l'élaboration d'un synthétiseur d'impédance MEMS en bande K. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2008. Français. ⟨tel-00265347⟩

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