Micromembranes résonantes à actionnement et détection piézoélectriques intégrés pour la détection de molécules biologiques en temps réel

Abstract : The advantages provided by size reduction and microfabrication, inherent to the Micro Electro Mechanical Systems (MEMS), considerably empowered these structures for specific use as biosensors. With this in mind, we have developed resonant micromembranes with an integrated actuation and detection scheme thanks to a piezoelectric layer (PZT), allowing the transduction of a biological recognition. Following to the fabrication of matrices of micromembranes using standard micromachining techniques, initial behavior of the structures and piezoelectric material properties were determined by static characterization. Optimizations made in this configuration were used for the dynamic characterization of the membranes, corresponding to their working mode as mass sensors. Thus, validation of the integrated actuation of the structures and detection of resonant frequencies thanks to the reversible piezoelectric effect, allowed to develop a dedicated electronic set-up for the matrices of micromembranes, which mass sensitivity in air was determined equal to -15 pg/(mm².Hz). The integrated dynamic characterization of the structures gave us the opportunity of studying the potential of micromembranes as transducers for biosensing applications: a first one in a diagnostic approach by the specific detection of antibodies in real time and in liquid medium while the second application concerned the combination of the micromembranes with molecularly imprinted polymers (MIP). This environmental analysis approach was experimented using the benefits of MIPs, such as stability and engineering capabilities, with those of the micromembranes, such as sensitivity and integrated multiplexing. These biosensing applications correspond to the demonstration of the potential of resonant micromembranes for reliable, sensitive, integrated and parallel detection of biomolecules.
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Automatique / Robotique. Université Paul Sabatier - Toulouse III, 2007. Français
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Cédric Ayela. Micromembranes résonantes à actionnement et détection piézoélectriques intégrés pour la détection de molécules biologiques en temps réel. Automatique / Robotique. Université Paul Sabatier - Toulouse III, 2007. Français. 〈tel-00258395〉

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