P. Réalisation-des, 6.1 Conception et génération des masques de gravure

.. Modèle-dynamique-d-'un-unimorphe-piézoélectrique, 98 10.1 Equation différentielle régissant les vibrations latérales d'une poutre de section constante, p.98

.. Influence-de-la-physique-du-micromonde-sur-les-stratégies-de-manipulation and .. Van-der-waals, 20 6.3.1 Réduction des forces d'adhésion, 1 Utilisation de matériaux à faible constante de Lifschitz-Van Der Waals21 6.3.2.2 Augmentation de la rugosité des surfaces en contact

P. Réalisation-des, 6.1 Conception et génération des masques de gravure

.. Modèle-dynamique-d-'un-unimorphe-piézoélectrique, 98 10.1 Equation différentielle régissant les vibrations latérales d'une poutre de section constante, p.102

.. Réponse-d-'un-unimorphe-piézoélectrique-À-un-Échelon-de-force, 108 11.8 Comparaison avec le calcul théorique, p.109

.. Mise-en-place-de-la-régulation-d-'état-avec-intégrateur, 120 2.2.3 Observateur d'ordre réduit pour l'estimation de la vitesse de déplacement de l'extrémité de l'unimorphe, p.124

.. Implémentation-de-l-'observateur-de-force, 133 3.5.1 Variation de force à tension électrique nulle Variation de tension électrique à force constante, p.136

J. Abadie, N. Chaillet, C. Lexcellent, and A. Bourjault, Thermoelectric control of shape memory alloy microactuators: a thermal model, Smart Structures and Materials 1999: Mathematics and Control in Smart Structures, pp.326-336, 1999.
DOI : 10.1117/12.350124

J. Agnus, A. Bonvilain, N. Chaillet, Y. Haddab, and P. Rougeot, Study and Development of a Station for Micromanipulation Tasks in the Microworld, Proc. of SPIE Microrobotics and Microassembly Symposium, pp.21-22, 1999.

R. and A. Bowling, A Theoritical Review of Particle Adhesion. Particles on Surfaces, pp.129-142, 1988.

T. Arai, Basic Motion of a Micro Hand Module, Proc. Of the International Conference on Advanced Mechatronics (ICAM), pp.92-97, 1993.

T. Arai, Micro Hand Module Using Parallel Link Mechanism, Proc. Of the Japan U.S.A. Symposium on Flexible Automation, pp.163-168, 1992.

F. Arai, M. Ogawa, and T. Fukuda, Indirect manipulation and bilateral control of the microbe by the laser manipulated microtools, Proceedings. 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2000) (Cat. No.00CH37113), 2000.
DOI : 10.1109/IROS.2000.894680

F. Arai, T. Fukuda, H. Iwata, and K. Itoigawa, Integrated micro endeffector for dexterous micromanipulation, MHS'96 Proceedings of the Seventh International Symposium on Micro Machine and Human Science, 1996.
DOI : 10.1109/MHS.1996.563416

F. Arai and T. Fukuda, Microrobotics Based on Micro Physics -Design and Control Strategy Based on Attractive Force Reduction, Proc. SPIE Microrobotics: Components and Applications, pp.184-195

J. P. Aubry, Matériaux et composants piézoélectriques, Collection des techniques de l'Ingénieur, p.890

A. Ballato and J. G. Smits, Network representation for piezoelectric bimorphs, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.38, issue.6, pp.595-602, 1991.
DOI : 10.1109/58.108858

Y. Bellouard, R. Clavel, R. Gotthardt, J. E. Bidaux, and T. Sidler, A New Concept of Monolithic Shape Memory Allow Micro-Devices Used in Micro-Robotics, Actuator 98. 6 th Internatonal Conference on New Actuators, pp.17-19, 1998.

H. Benzaoui, Modélisation thermomécanique et commande d'actionneurs en alliages à mémoire de forme pour la microrobotique, Thèse de doctorat N°710, 1998.

K. Böhringer, Parallel Microassembly with Electrostatic Force Fields Proc of the, IEEE International Conference on Robotics and Automation, 1998.

B. Bona, M. Indri, and A. Tornambè, Piezoelectric materials: continuous-time and discrete-time dynamic models and control, Proceedings of 32nd IEEE Conference on Decision and Control, p.pp
DOI : 10.1109/CDC.1993.325415

M. C. Carrozza, Manipulating biological and mechanical micro-objects using LIGA-microfabricated end-effectors, Proceedings. 1998 IEEE International Conference on Robotics and Automation (Cat. No.98CH36146), pp.1811-1816, 1998.
DOI : 10.1109/ROBOT.1998.677430

M. Calin, N. Chaillet, J. Agnus, A. Bourjault, and A. Janex, Compliant Microrobots with Two and Three Degrees of Mobility, Journal of Condensed Matter News, vol.7, pp.2-3, 1999.

N. Chaillet, La microrobotique : un nouveau champ d'investigations pour la robotique, pp.31-36, 1999.

N. Chaillet and . Microrobotique, Rencontre de la Robotique et des Microsystèmes, Deuxièmes Journées Nationales de la Recherche en Robotique, JNRR'99, pp.27-29, 1999.

N. Chaillet, J. Agnus, Y. Haddab, P. Rougeot, and A. Bourjault, Components for the development of a station for manipulation tasks in the microworld, Proc of the 3 rd International Workshop on Microrobotics and Systems

S. H. Chang and C. C. Chou, Electromechanical analysis of an asymmetric piezoelectric/elastic laminate structure: theory and experiment, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.46, issue.2, pp.441-451, 1999.
DOI : 10.1109/58.753033

P. B. Chu and K. S. Pister, Analysis of closed-loop control of parallel-plate electrostatic microgrippers, Proceedings of the 1994 IEEE International Conference on Robotics and Automation, pp.820-825, 1994.
DOI : 10.1109/ROBOT.1994.351387

A. Codourey, W. Zesch, R. Büchi, and R. Siegwart, A robot system for automated handling in micro-world, Proceedings 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human Robot Interaction and Cooperative Robots, 1995.
DOI : 10.1109/IROS.1995.525882

E. F. Crawley and J. Luis, Use of piezoelectric actuators as elements of intelligent structures, AIAA Journal, vol.25, issue.10
DOI : 10.2514/3.9792

S. Fatikow, A Piezoelectric Mobile Robot for Handling of Microobjects, Proc. of the International Symposium on Microsystems, Intelligent Materials and Robots, 1995.

S. Fatikow and U. Rembold, Microsystem Technology and Microrobotics, 1997.
DOI : 10.1007/978-3-662-03450-7

S. Fatikow, A. Buerkle, S. Fahlbusch, and H. Woern, Sensor-Based Microrobot Control in a Micromanipulation Desktop-Station, Proc. Of the International Workshop on Micro Robots, Micro Machines and Systems novembre, pp.43-48, 1999.

R. S. Fearing, Survey of sticking effects for micro parts handling, Proceedings 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human Robot Interaction and Cooperative Robots
DOI : 10.1109/IROS.1995.526162

A. Ferreira, P. Minotti, and P. L. Moal, New Multi-degree of Freedom Piezoelectric Mobile Robot for Handling of Microobjects, Proceedings of the International Symposium on Microsystems, Intelligent Materials and Robots, pp.189-192, 1995.

M. Gérardin and D. Rixen, Mechanical Vibration. Theory and Application to Structural Dynamics

C. Girard, D. Van-labeke, and J. M. Vigoureux, van der Waals force between a spherical tip and a solid surface, Physical Review B, vol.40, issue.18, 1989.
DOI : 10.1103/PhysRevB.40.12133

G. Greitmann and R. A. Buser, A micromachined Gripper with Force Feedback, Proceedings of the International Symposium on Microsystems, Intelligent Materials and Robots, pp.27-29, 1995.

G. Greitmann and R. A. Buser, A tactile Microgripper for Application in Microrobotics, Proc

H. Grutzeck and L. Kiesewetter, Downscaling of Adhesiv and Capillary Grippers for Micro Assembly, th International Conference on Micro Electro, Opto, Mechanical Systems and Components, pp.1-3, 1998.

Y. Haddab, N. Chaillet, G. Cabodevila, and A. Bourjault, Devices for a Micromanipulation System, International Mechanical Engineering Congress and Exposition IMECE Symposium on Microrobotics, 2000.

T. Inoue, Micromanipulation using magnetic field, Proceedings of 1995 IEEE International Conference on Robotics and Automation ROBOT-95, pp.679-984, 1995.
DOI : 10.1109/ROBOT.1995.525362

I. Ieee, Workshop : Working in the micro-world : Systems to enable the manipulation and machining of micro-objects. 4-8 novembre, RSJ International Conference on Intelligent Robots and Systems, 1996.

A. Krupa, G. Morel, and M. De-mathelin, Modeling and vision based control of a micro endoscope head actuated with shape memory alloy wires, Proc. Of the International Workshop on Micro Robots, Micro Machines and Systems. 24-25 novembre, 1999.

V. Loubere, S. Monneret, and S. Corbel, Microfabrication par stéréolithographie, pp.4-5, 1999.

M. Mackenzie, N. An, M. Giere, J. Stori, and P. Wright, Experiences with shape memory alloy : robot grippers for sub-millimeter hard disc drive components, Proc. SPIE, pp.25-36, 1996.

E. Pernette, Micromanipulateur pour l'alignement optique. 6 ème Congrès Européen de Chronométrie, 1996.

N. N. Rogacheva, C. C. Chou, and S. H. Chang, Electromechanical analysis of a symmetric piezoelectric/elastic laminate structure: theory and experiment, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.45, issue.2, pp.285-294, 1998.
DOI : 10.1109/58.660139

Y. Rollot, S. Régnier, S. Haliyo, L. Buchaillot, J. C. Guinot et al., Experiments on micromanipulation using adhesion forces in unconstrained environment, Proc. Of the, pp.31-36, 2000.

D. Royer and E. Dieulesaint, Ondes élastiques dans les solides, Tome 1, Propagation libre et guidée, 1996.

R. A. Russell, A Robotic System for Performing Sub-millimetre grasping and Manipulation Tasks, 1994.

R. Salim and H. Wurmus, Flexible Microgrippers for Manipulation of Microstructures, th International Conference on Micro Electro, Opto, Mechanical Systems and Components, pp.1-3, 1998.

J. G. Smits and W. Choi, The constituent equations of piezoelectric heterogeneous bimorphs, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.38, issue.3, pp.256-270, 1991.
DOI : 10.1109/58.79611

M. R. Steel, F. Harrison, and P. G. Harper, The piezoelectric bimorph: An experimental and theoretical study of its quasistatic response, Journal of Physics D: Applied Physics, vol.11, issue.6, 1978.
DOI : 10.1088/0022-3727/11/6/017

A. Sulzmann, J. Breguet, and J. Jacot, Microvision system (MVS) : a 3D computer graphicbased microrobot telemanipulation and position feedback by vision, 1995.

M. Tanaka, S. Chonan, and Z. W. Jiang, Force Control of a Flexible Finger with Distributed Sensors and Piezoelectric Actuators, Journal of Intelligent Material Systems and Structures, vol.12, issue.3, pp.301-306, 1996.
DOI : 10.1177/1045389X9600700310

T. Tanikawa, K. Kaneko, and K. Tanie, Researches on Micro Manipulation at MEL, Proc. Of the International Workshop on Micro Robots, Micro Machines and Systems novembre, pp.127-132, 1999.

Y. Tatsue and T. Kitahara, Micro-grip system., Journal of the Robotics Society of Japan, vol.8, issue.4, pp.1-57
DOI : 10.7210/jrsj.8.4_498

H. Toshiyoshi, H. Fujita, T. Kawai, and T. Ueda, Piezoelectrically operated actuators by quartz micromachining for optical application, [1993] Proceedings IEEE Micro Electro Mechanical Systems, p.93
DOI : 10.1109/MEMSYS.1993.296967

M. Touaibia, Conception et réalisation d'un micro véhicule capable de se déplacer dans un tuyau de très faible diamètre en vue de réaliser des tâches d'inspection, Thèse de Docteur de L'Université de Franche-Comté. N° d'ordre, p.809, 2000.

Y. Yamagata and T. Higuchi, A micropositioning device for precision automatic assembly using impact force of piezoelectric elements, Proceedings of 1995 IEEE International Conference on Robotics and Automation, 1995.
DOI : 10.1109/ROBOT.1995.525360

M. Yamaguchi and A. , Distributed electrostatic micro actuator, [1993] Proceedings IEEE Micro Electro Mechanical Systems, 1993.
DOI : 10.1109/MEMSYS.1993.296944

Y. Zhou and B. J. Nelson, Adhesion Force Modeling and Measurement for Micromanipulation, SPIE Conference on Microrobotics and Micromanipulation, 1998.
DOI : 10.1117/12.325737

Y. Zhou and B. J. Nelson, Lessons Learned in Characterizing Surface Effect Forces for Micropart Manipulation, Proc. Of the IARP 2 nd Workshop on Microrobotics and Systems, pp.77-88, 1998.

H. Seki, Modeling And Impedance Control Of A Piezoelectric Bimorph Microgripper, Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, pp.958-964, 1992.
DOI : 10.1109/IROS.1992.594508