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Moscou (1971) dispose d'une grande profondeur de champ en comparaison avec le microscope optique (dans la gamme des grossissements où une telle comparaison peut bien entendu être faite) Le MEB est désormais un matériel assez courant malgré son coût relativement élevé. Il s'avère très ecace pour la détection de défauts tels que les trous, les ssures ,
directeur du Centre de microscopie électronique à balayage et microanalyse (CMEBA, Université de Rennes I), cours disponible sur Internet à l'adresse http ,
5 kV) : 5 nm Résolution à 20 pA (à 30 kV) : 300 nm Résolution (à 30 kV) : 1.1 nm ,
les atomes (ionisés ou non) en mouvement ont des libres parcours moyens qui sont de l'ordre de grandeur de ladite enceinte. S'ils sont ionisés, nous imaginons aisément qu'à l'aide d'un champ électrique ou magnétique il est possible de leur conférer une trajectoire contrôlée et une accélération telle qu'ils percuteront les surfaces vers lesquelles on les dirige avec une énergie susante pour ,
FIB est également un instrument permettant de faire de l'imagerie ,
De plus, en diminuant la température de l'échantillon, il est possible d ,
4 Redimensionnement d'un levier AFM par FIB an d'être utilisé en milieu liquide ,
5 Pointe AFM usinée par FIB an d'en faire une nano-aiguille beaucoup plus elée ,
Nous parlons alors de déposition induite par faisceau d'ions (IBID pour Ion Beam Induced Deposition) Il s'agit d'un dépôt chimique en phase vapeur assisté par FIB qui se produit lorsqu'un gaz comme l'hexacarbonyle de tungstène (W(CO) 6 ) ,
FIB est souvent utilisé dans l'industrie des semi-conducteurs pour réparer ou modier un dispositif semi-conducteur. Par exemple, dans un circuit intégré ,
FIB peut également être utilisé pour la découpe d'échantillons biologiques ,
FIB comme outil de manipulation d'objet Le système Omniprobe permet de faire des transferts d'échantillons à l'aide de petites soudures en tungstène entre la nano-aiguille et l'échantillon à déplacer. Les diérentes étapes de cette manipulation (représentées sur la gure B.6) sont les suivantes ,
C'est à la fois un outil de préparation d'échantillons (TEM, pointes AFM), un outil de fabrication (circuits intégrés, dépôt, usinage, gravure sélective), et un outil avec des accessoires très utiles (Omniprobe) ,
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