M. Dentan, Journal du département d'astrophysique, de physique des particules, de physique nucléaire et de l'instrumentation associée du CEA, Effet des radiations et du durcissement », extrait de Scintillations, 1999.

R. Dekker, « A 10µm thick RF-ID tag for chip-in-paper applications » Philips, 2005.

G. Migas-2004 and . Celler, What is SOI? Do we really need it?

G. K. Celler and S. Cristoloveanu, Frontiers of silicon-on-insulator, Journal of Applied Physics, vol.93, issue.9, 2003.
DOI : 10.1063/1.1558223

S. Migas-2004 and . Bengtsson, Other SOI materials

S. Cristoloveanu, Silicon films on sapphire, Reports on Progress in Physics, vol.50, issue.3, p.327, 1987.
DOI : 10.1088/0034-4885/50/3/002

. Moriyasu, . Morishita, and Y. Matsui, Preparation of high quality silicon on sapphire " ; Silicon on insulator technology and devices IX, pp.99-102, 1999.

G. K. Celler, . Mcd, L. E. Robinson, and . Trimble, Dielectrically Isolated Thick Si Films by Lateral Epitaxy from the Melt, Journal of The Electrochemical Society, vol.132, issue.1, 1985.
DOI : 10.1149/1.2113766

K. E. Bean, W. R. Runyan, T. Yonehara, N. Sato, K. Sakaguchi et al., Epitaxial layer transfer by bond and etch back of porous silicon " . [19] Solid State Technology ELTRAN by splitting porous Si layers, Dielectric Isolation: Comprehensive, Current and Future SOI wafers based on epitaxial technology " . [20] Proceedings of 195 th International SOI Symposium, pp.5-12, 1977.

J. Claverie, G. Grisolia, F. Benassayag, O. Letertre, T. Rayssac et al., Formation of SiO2 films by oxygen-ion bombardment [24] Presented at Semiconductor International Korea Advanced epitaxial processing for submicron device technology Advanced bipolar and SOI-MOS transistor structures using silicon selective and epitaxial lateral overgrowth technology « Multiple layers of silicon-on-insulator (MLSOI) islands fabrication process and fully-depletd SOI pMOSFETs « Multiple layers of silicon-on-insulator islands fabrication by selective epitaxial growth « Silicon-on-insulator wafers by zone melting recrystallization », Solid State Technology Strained Si on SOI MOSFETs Strained silicon on insulator ? A quick guide to the technology, the processes, the products32] Tezuka et al. Symposium on VLSI technology digest of technical paper Relaxed SiGe-on-insulator substrates without thick SiGe buffer layers Seeded recrystallization of thick polysilicon films on oxidized 3-in. wafers Spatial melt instabilities in radiatively melted crystalline silicon, The generic nature of the SmartCut process for thin film transfer Proceedings IEEE International SOI Conference, Octobre 1998. [27] Multi gate MOSFETs ? FinFET " . [37] Dilhac, C. Ganibal, Temperature gradient rapid thermal processor, pp.834-840, 1966.

H. Watanabe, M. Susa, H. Fukuyama, and K. Nagata, Emissivities of liquid and solid silicon at the melting point, High Temperatures-High Pressures, vol.31, issue.6, pp.587-593, 1999.
DOI : 10.1068/htwu124

. Mcd, D. J. Robinson, G. K. Lischner, and . Celler, Large area recrystallization of polysilicon with tungsten-halogen lamps ", Journal of Crystal Growth, vol.63, pp.484-492, 1983.

J. O. Borland, Advanced epitaxial processing for submicron device technology, Applied Materials, 1986.

J. P. Colinge, H. K. Hu, and S. Peng, Fabrication of thin silicon-on-insulator flims using laser recrystallisation, Electronics Letters, vol.21, issue.23, pp.1102-1103, 1985.
DOI : 10.1049/el:19850782

P. W. Mertens, J. Leclair, H. E. Maes, and W. Vandervorst, Oxygen distribution in silicon-oninsulator layers obtained by zone melting recrystallization, Journal of Applied Physics, vol.67, pp.12-7337, 1990.

S. Roux, « Isolation diélectrique des circuits intégrés de puissance par recristallisation en phase liquide », thèse de l'INSA, préparée au LAAS-CNRS en convention CIFRE avec Motorola Semiconducteurs SA France, 2001.

. Mcd, D. J. Robinson, G. K. Lischner, and . Celler, Large area recrystallization of polysilicon with tungsten-halogen lamps, Journal of Crystal Growth, vol.63, pp.484-492, 1983.

Z. A. Weinberg, V. R. Deline, T. O. Sedgwick, S. A. Cohen, C. F. Aliotta et al., Investigation of the silicon beading phenomena during zone???melting recrystallization, Applied Physics Letters, vol.43, issue.12, pp.12-1105, 1983.
DOI : 10.1063/1.94242

G. K. Celler, . Mcd, E. Robinson, and D. J. Trimble, Lischner « Spatial melt instabilities in radiatively melted crystalline silicon, Applied Physics Letters, vol.43, pp.9-868, 1983.

P. G. De-gennes, F. Brochard-wyart, D. Quéré, H. Gouttes, A. Fujii et al., Surface tension of liquid silicon Joining and Welding Research Institute Technologie silicium sur isolant (SOI) Electrical Characterization of Silicon-On-Insulator Materials and Devices, 1. IMPACT, Access to Research Infrastructures -Nanotechnologies Project N°HPRI-CT- 1999-00076, 1995.

S. Roux, Isolation diélectrique des circuits intégrés de puissance par recristallisation en phase liquide, Institut National des Sciences Appliquées, 2001.

I. Bertrand, J. M. Dilhac, P. Renaud, and C. Ganibal, Large area recrystallization of thick polysilicon films for low cost partial SOI power devices, Microelectronics Journal, vol.37, issue.3, 2004.
DOI : 10.1016/j.mejo.2005.09.029

O. Gonnard, Electrical Characterization of Thick Localized SOI Substrates Manufactured by Rapid Thermal Processing for HV Integrated Circuits, 2003.

F. Udrea, W. I. Milne, and A. Popescu, Lateral insulated gate bipolar transistor (LIGBT) structure based on partial isolation SOI technology, Electronics Letters, vol.33, issue.10, p.907, 1997.
DOI : 10.1049/el:19970587

F. Udrea, A. Popescu, and W. Milne, Breakdown analysis in JI, SOI and partial SOI power structures, 1997 IEEE International SOI Conference Proceedings, p.102, 1997.
DOI : 10.1109/SOI.1997.634953

D. M. Garner, The fabrication of a partial SOI substrate, Electrochemical society proceedings, p.73, 1999.

T. Letavic, 600V power conversion system-on-a-chip based on thin layer siliconon-insulator, Proceedings of ISPSD, p.325, 1999.

I. Bertrand, V. Pathirana, E. Imbernon, F. Udrea, M. Bafleur et al., New lateral DMOS and IGBT structures realized on a partial SOI substrate based on LEGO process, Proceedings of the Bipolar/BiCMOS Circuits and Technology Meeting, 2005., 2005.
DOI : 10.1109/BIPOL.2005.1555204

URL : https://hal.archives-ouvertes.fr/hal-00385958

F. Udrea, W. I. Milne, and P. L. Hemment, New high voltage device structures in SOI based technology, pp.97-120, 1997.

D. M. Garner, F. Udrea, H. T. Lim, and W. I. Milne, An analytical model for turn off in the silicon-on-insulator LIGBT, Solid State Electronics, V. 43, n° 10, pp.1855-1868

P. Renaud and I. Bertrand, Method of fabricating a silicon-on-insulator structure, p.13591, 2005.

Z. A. Weinber, V. R. Deline, T. O. Sedgwick, S. A. Cohen, C. F. Aliotta et al., Investigation of the silicon beading phenomena during zone-meling recrystallization, Applied Physics Letters, vol.43, issue.12, pp.15-1105, 1983.

I. Bertrand, J. M. Dilhac, and P. Renaud, « Recristallisation en phase liquide de films épais de poly-silicium pour la réalisation à faible coût de circuits de puissance sur SOI partiel, 2004.

I. Bertrand, Recristallisation en phase liquide de films épais de poly-silicium pour la réalisation à faible coût de substrats SOI partiel

. Dilhac, « New lateral DMOS and IGBT structures realized on a partial SOI substrate based on LEGO process, 2005.

I. Bertrand, J. M. Dilhac, P. Renaud, and C. Ganibal, « Recristallisation en phase liquide de films épais de poly-silicium pour la réalisation à faible coût de substrats SOI partiel dédiés à des applications de puissance, 2005.

P. Renaud and I. Bertrand, « Fabrication method of thick Partial SOI for sensors » SC13591ET

I. Bertrand and P. Renaud, « Fabrication of partial silicon-on-insulator substrate by Lateral Epitaxial Growth over Oxide, 2004.

I. Bertrand and P. Renaud, « Electrical characterization of MOS and bipolar devices realized on a partial SOI substrate based on LEGO process, 2005.