EPITAXIE DE SYSTEMES METALLIQUES SUR Si(001) : Croissance du cuivre et structures à anisotropie magnétique perpendiculaire (Cu/Ni et FePd)

Anthony Meunier 1, 2
2 NM - Nanostructures et Magnétisme
SP2M - UMR 9002 - Service de Physique des Matériaux et Microstructures : DSM/INAC/SP2M
Abstract : This work focuses on the epitaxial growth of thin metallic layers on Si(001). An experimental study of copper growth at room temperature is first presented. For the first time we experimentally demonstrate the important role of preliminary surface hydrogenation on interdiffusion properties. Surface hydrogenation inhibits interdiffusion and results in the controlled formation of a 2 nm thick silicide quasi-continuous layer. Chemical and structural nature of the interface have been deduced from a large field of experiments : RHEED, AES, TEM and GIXRD. This silicide is not the h-Cu3Si phase usually reported but is a centered cubic phase close to the b-Cu0.83Si0.17 phase with a lattice parameter a = 0,288 nm. Following metallic copper growth on this seed layer has been studied through STM and TEM experiments. Copper layer is highly {001} textured and show columnar pseudo grains with a homogeneous lateral size increasing with thickness.
The last part of this work deals with the growth of perpendicular magnetic anisotropy systems, Cu/Ni and FePd on Si(001). In Cu/Ni system, it is shown that interdiffusion occurs during Ni layer growth based on auger spectroscopy experiments and a copper segregation model. This mixing at the Cu/Ni interface mainly explain the decrease of magnetic properties measured for thin Ni layers. We finally report for the first time the growth of a template structure based on the use of a thin silicide (Cu-Si or FeSi2) seed layer for FePd alloy epitaxy on Si(001). Structural and magnetic measurements reveal a well-ordered FePd layer and a high perpendicular magnetic anisotropy.
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Anthony Meunier. EPITAXIE DE SYSTEMES METALLIQUES SUR Si(001) : Croissance du cuivre et structures à anisotropie magnétique perpendiculaire (Cu/Ni et FePd). Matière Condensée [cond-mat]. Université Joseph-Fourier - Grenoble I, 2005. Français. ⟨tel-00238555⟩

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