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Contribution à la modélisation et à la commande des microsystèmes capteurs non linéaires

Abstract : Microsystems are multi-physic and dynamic systems. Their specific characteristics, related to their small size and the associated physical phenomena, require deep studies. The methodologies related to control theories can bring interesting solutions for the optimization of this kind of systems. In this framework, this thesis focuses more particularly on microsensors nonlinearities. The first part of this thesis is devoted to the design of a closed-loop micromachined accelerometer with digital output. The main goal of the feedback is here to enhance the sensor's linearity. This study focuses on the modelling of the MEMS dynamics, including the effects of the nonlinearities (capacitive readout and electrostatic force feedback), and on the analysis of the sensor's performance (dynamic aspect, noise transfer and linearity). The integrated circuit ensuring the force feedback is designed in order to allow the use of advanced control tools such as identification for control and robust controller synthesis. The proposed architecture is validated on the simulation model and on a first prototype. The second part of this thesis introduces a novel sensing principle based on Duffing's nonlinearity. This type of nonlinearity, which is observed in many mechanical microstructures, is here turned into an advantage. First simulations display interesting perspective for the use of nanometre-scale mechanical structures.
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Submitted on : Tuesday, January 22, 2008 - 3:46:16 PM
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  • HAL Id : tel-00212256, version 1

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Jonathan Soen. Contribution à la modélisation et à la commande des microsystèmes capteurs non linéaires. Automatique / Robotique. Université Joseph-Fourier - Grenoble I, 2007. Français. ⟨tel-00212256⟩

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