I. Chapitre and .. De-conception-et-outils-de-modélisation-des-microsystèmes, 11 A. Conception des microsystèmes, p.12

L. Stratégie-de, 117 1. Simulation globale, p.118

G. K. Ananthasuresh, R. K. Gupta, and S. D. Senturia, An approach to macromodeling of MEMS for nonlinear dynamic simulation, Proc. Dynamics Systems and Controls, pp.401-407, 1996.

G. Asada, T. Dong, F. Lin, G. Pottie, W. Kaiser et al., Wireless integrated network sensors: Low power systems on a chip, European Solid State Circuits Conference, 1998.

U. M. Ascher and L. R. Petzold, Computer Methods for Ordinary Differential Equations and Differential-Algebraic Equations, 1998.
DOI : 10.1137/1.9781611971392

G. Asada, T. Dong, F. Lin, G. Pottie, W. Kaiser et al., Wireless integrated network sensors : Low power systems on a chip, European Solid State Circuits Conference, 1998.

U. M. Ascher and L. R. Petzold, Computer Methods for Ordinary Differential Equations and Differential-Algebraic Equations, 1998.
DOI : 10.1137/1.9781611971392

U. M. Ascher and L. R. Petzold, Computer Methods for Ordinary Differential Equations and Differential-Algebraic Equations, 1998.
DOI : 10.1137/1.9781611971392

U. Ascher and P. Lin, Sequential Regularization Methods for Nonlinear Higher-Index DAEs, SIAM Journal on Scientific Computing, vol.18, issue.1, pp.160-181, 1997.
DOI : 10.1137/S1064827595287778

URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.32.3038

G. Baciu and H. K. Kesavan, From particle-mass to multibody systems: graph-theoretic modeling, IEEE Transactions on Systems, Man, and Cybernetics - Part A: Systems and Humans, vol.27, issue.2, pp.244-25097, 1997.
DOI : 10.1109/3468.554686

E. Sangiovanni-vincentelli, K. Sentovich, B. Suzuki, S. P. Tabbara, M. J. Beeby et al., Hardware-Software Co-Design of Embedded Systems : The Polis Approach Macro and micro scale electromagnetic kinetic energy harvesting generators, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS DTIP'06, pp.286-291, 1997.

L. Benini, G. Castelli, A. Macii, E. Macii, M. Poncino et al., A Discrete-Time Battery Model for High-Level Power Estimation, p.134, 2000.

. W. Ba and . Boehm, A Spiral Model of Software Development and Enhancement, IEEE Computer, vol.21, pp.61-72, 1988.

A. Bouchhima, Modélisation du logiciel embarqué à différents niveaux d'abstraction en vue de la validation et la synthèse des systèmes monopuces, thèse en microélectronique, p.66, 2006.

F. H. Branin, The Algebraic-Topological Basis for Network Analogies and the Vector Calculus, Symposium on Generalized Networks, pp.453-491, 1966.

A. P. Breunese and J. F. Broenink, Modeling Mechatronic Systems Using the SIDOPS1 Language, ICBGM '97, pp.301-306, 1997.

M. Brissaud, Modelling of non-symmetric piezoelectric bimorphs, Journal of Micromechanics and Microengineering, vol.14, issue.11, pp.150-1518, 2004.
DOI : 10.1088/0960-1317/14/11/011

J. T. Buck, S. Ha, E. A. Lee, and D. G. Messerschmitt, Ptolemy: A Framework for Simulating and Prototyping Heterogeneous Systems, International Journal of Computer Simulation, special issue on Simulation Software Development, vol.4, pp.155-182, 1994.
DOI : 10.1016/B978-155860702-6/50048-X

E. M. Buturla, P. E. Cottrell, B. M. Grossman, and K. A. Salsburg, Finite-Element Analysis of Semiconductor Devices: The FIELDAY Program, IBM Journal of Research and Development, vol.25, issue.4, pp.218-231, 1981.
DOI : 10.1147/rd.254.0218

F. E. Cellier, Continuous System Modeling, 1991.
DOI : 10.1007/978-1-4757-3922-0

F. E. Cellier, Object-Oriented Modeling : Means for Dealing with System Complexity, 15th Benelux Meeting on Systems and Control, 1996.

P. C. Chan and C. T. Sah, Exact equivalent circuit model for steadystate characterization of semiconductor devices with multiple energy level recombination centers, IEEE Trans. Electron Devices, pp.26-924, 1979.

M. Chen and G. A. Rincon-mora, Accurate Electrical Battery Model Capable of Predicting Runtime and I???V Performance, IEEE Transactions on Energy Conversion, vol.21, issue.2, 2006.
DOI : 10.1109/TEC.2006.874229

Y. Chiu, C. Kuo, and Y. Chu, Design and fabrication of a micro electrostatic vibrationto-electricty energy converter, Proc. of DTIP, pp.298-303, 2006.

E. Christen and K. Bakalar, VHDL-AMS-a hardware description language for analog and mixed-signal applications, IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing, vol.46, issue.10, pp.1263-1272, 1999.
DOI : 10.1109/82.799677

J. Davis, I. , C. Hylands, B. Kienhuis, E. A. Lee et al., Ptolemy II : Heterogeneous concurrent modeling and design in Java, EECS, vol.12, 2001.

G. Despesse, Etude des phénomènes physiques utilisables pour alimenter en énergie électrique des microsystèmes communicants, thèse en micro et nano électronique, 2005.

A. Diaz-calderon, C. J. Paredis, and P. K. Khosla, Reconfigurable Models : A Modeling Paradigm to Support Simulation-Based Design, 2000.

K. Edström, Simulation of Newton's Pendulum Using Switched Bond Graphs, Western MultiConference, 1999.

H. Elmqvist, S. E. Mattsson, and M. Otter, Modelica : The New Object-Oriented Modeling Language The 12th European Simulation Multiconference, 1998.

R. Esser and J. Janneck, Moses-a tool suite for visual modeling of discrete-event systems, Proceedings IEEE Symposia on Human-Centric Computing Languages and Environments (Cat. No.01TH8587), 2001.
DOI : 10.1109/HCC.2001.995274

J. Ferrieux and F. Forest, Alimentations à découpage -Convertisseurs à résonance, DUNOD, 2e édition revue et augmentée, 1994.

J. B. Ferris and J. L. Stein, Development of Proper Models of Hybrid Systems, International Conference on Bond Graph Modeling and Simulation, 1995.
DOI : 10.1115/1.2805405

P. A. Fishwick, Integrating Continuous and Discrete Models with Object Oriented Physical Modeling, Western Simulation Multi Conference, 1997.

L. Gao, S. Liu, and R. A. , Dynamic Lithium-Ion Battery Model for System Simulation, IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES, vol.25, issue.3, pp.495-505, 2002.

M. Glass, Battery electrochemical non-linear dynamic S P I C E model, Energy Conversion Engineering Conference, pp.292-297, 1996.

C. Grimm, K. Einwich, and A. Vachoux, Analog and Mixed-Signal System Design with SystemC, Tutorial, 2004.

P. Glynne, S. Jones, N. Booby, and . White, Towards a piezoelectric vibration-powered microgenerator, IEE Proceedings - Science, Measurement and Technology, vol.148, issue.2, pp.68-72, 1992.
DOI : 10.1049/ip-smt:20010323

P. W. Glynn, A GSMP Formalism for Discrete Event Systems, in Discrete Event Dynamic Systems : Analyzing Complexity and Performance in the Modern World

Y. Guo, K. Kakimoto, and H. Ohsato, (Na0.5K0.5)NbO3???LiTaO3 lead-free piezoelectric ceramics, Materials Letters, vol.59, issue.2-3, pp.241-244, 2005.
DOI : 10.1016/j.matlet.2004.07.057

J. Hill and D. Culler, Mica: a wireless platform for deeply embedded networks, IEEE Micro, vol.22, issue.6, pp.12-24, 2002.
DOI : 10.1109/MM.2002.1134340

Y. Hervé, VHDL-AMS : Applications et enjeux industriels Dunod-Université collection : Sciences-sup -préface d'Alain Vachoux

G. Jacquemod, K. Vuorinen, F. Gaffiot, A. Spisser, C. Seassal et al., MOEMS modelling for opto-electro-mechanical cosimulation, J. Modeling Simulation Microsyst, vol.1, issue.1, pp.39-48, 1999.

H. Al-junaid and T. Kazmierski, Analogue and mixed-signal extension to SystemC Institution of Electrical Engineers proceedings : Circuits, devices and systems, pp.682-690, 2005.

Y. B. Jeon, R. Sood, J. Jeong, and S. Kim, MEMS power generator with transverse mode thin film PZT, Sensors and Actuators, pp.16-22, 2005.
DOI : 10.1016/j.sna.2004.12.032

J. M. Kahn, R. H. Katz, and K. S. Pister, Emerging challenges: Mobile networking for “Smart Dust”, Journal of Communications and Networks, vol.2, issue.3, pp.188-196, 2000.
DOI : 10.1109/JCN.2000.6596708

D. L. Karnoop and R. C. Rosenberg, System Dynamics: A Unified Approach, IEEE Transactions on Systems, Man, and Cybernetics, vol.6, issue.10, 1975.
DOI : 10.1109/TSMC.1976.4309434

H. E. Koenig, Y. Tokad, H. K. Kesavan, and H. G. Hedges, Analysis of Discrete Physical Systems, 1967.

K. Kundert, A Formal Top-Down Design Process for Mixed-Signal Circuits, Advances in Analog Circuit Design, 2000.

]. J. Kym-98, C. Kymissis, J. Kendall, N. Paradiso, and . Gershenfeld, Parasitic power harvesting in shoes, Proceedings of the Second IEEE International Conference on Wearable Computing ISWC, 1998.

R. Lanz, P. Carazzetti, and P. Muralt, Surface micromachined BAW resonators based on AlN, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings., pp.981-983, 2002.
DOI : 10.1109/ULTSYM.2002.1193560

J. M. Lee, Development of an AA size energy transducer with micro resonators, Proceedings of the 2003 International Symposium on Circuits and Systems, 2003. ISCAS '03., 2003.
DOI : 10.1109/ISCAS.2003.1206360

J. A. Martinez, Piecewise linear simulation of optoelectronic devices with application to MEMS, 2000.

M. Marzencki, Conception de microgénérateurs intégrés pour systèmes sur puce autonomes, thèse en micro et nano électronique, 2007.

S. Meninger, J. O. Mur-miranda, R. Amirtharajah, and A. P. Chandrakasan, Vibration-to-electric energy conversion, IEEE Transactions on Very Large Scale Integration (VLSI) Systems, vol.9, issue.1, pp.64-76, 1997.
DOI : 10.1109/92.920820

J. Morikuni and S. Kang, Computer-Aided Design of Optoelectronic Integrated Circuits and Systems, 1997.

T. Mukherjee, CAD for MEMS design, Proc. Design, Test, Integration, and Packaging of MEMS/MOEMS, pp.3-14, 2000.

J. Morikuni, P. V. Mena, A. V. Harton, and K. W. Wyatt, The mixed technology modeling and simulation of optoelectronic microsystems, Journal of Modeling and Simulation of Microsystems, vol.1, issue.1, pp.9-18, 1999.

T. Donnell, C. Saha, S. Beeby, and M. Tudor, Scaling effects for electromagnetic vibrational power generators, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS -DTIP'06, pp.26-28, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00189299

G. K. Ottman, H. F. Hofmann, A. C. Bhatt, and G. A. Lesieutre, Adaptative piezoelectric energy harvesting circuit for wireless remote power supply, IEEE Transactions, vol.17, issue.5, pp.669-676, 2002.
DOI : 10.1109/tpel.2002.802194

J. Oudinot and S. Guessab, Can MATLAB/SIMULINK Co-Exist with VHDL-AMS?" EuroDesignCon' 04, pp.11-14, 2004.

M. Otter, H. Elmqvist, and S. Mattsson, Hybrid modeling in Modelica based on the synchronous data flow principle, Proceedings of the 1999 IEEE International Symposium on Computer Aided Control System Design (Cat. No.99TH8404), 1999.
DOI : 10.1109/CACSD.1999.808640

J. A. Paradiso and T. Starner, Energy Scavenging for Mobile and Wireless Electronics, IEEE Pervasive Computing, vol.4, issue.1, pp.18-27, 2005.
DOI : 10.1109/MPRV.2005.9

H. M. Paynter, Analysis and Design of Engineering Systems, 1961.

F. Peano and T. Tambosso, Design and optimization of a MEMS electret-based capacitive energy scavenger, Journal of Microelectromechanical Systems, vol.14, issue.3, pp.429-435, 2005.
DOI : 10.1109/JMEMS.2005.844803

F. Pêcheux, . Ch, A. Lallement, and . Vachoux, VHDL-AMS and Verilog-AMS as alternative hardware description languages for efficient modeling of multidiscipline systems, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol.24, issue.2, pp.204-225, 2005.
DOI : 10.1109/TCAD.2004.841071

M. R. Pinto, C. S. Rafferty, and R. W. Dutton, PISCES II?Poisson and continuity equation solver, 1984.

G. Poulain, Contribution au développement d'un générateur piézoélectrique pour applications nomades, Thèse présentée dans l'université paris XI, 2004.

J. Rabaey, J. Ammer, T. Karalar, S. Li, B. Otis et al., PicoRadios for wireless sensor networks: the next challenge in ultra-low power design, 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315), 2002.
DOI : 10.1109/ISSCC.2002.993005

R. C. Rosenberg, D. C. Karnopp, C. J. Rajarishi, L. Paredis, K. K. Vei-chung et al., Introduction to Physical System DynamicsModeling and simulation methods for design of engineering systems, Journal of Computing and Information Science in Engineering, vol.1, issue.1, pp.84-911530, 1983.

S. Roundy, P. K. Wright, J. M. Rabaey, S. Roundy, P. K. Wright et al., A study of low level vibrations as a power source for wireless sensors nodesEnergy Scavenging for Wireless Sensor Networks, Commun. Computer, pp.1131-1144, 2003.

P. Schneider, E. Huck, S. Reitz, S. Parodat, A. Schneider et al., Modular approach for simulation-based optimization of MEMS, Design, Modeling, and Simulation in Microelectronics, pp.71-82, 2000.
DOI : 10.1117/12.405441

P. Schwarz and P. Schneider, Model Library and Tool Support for MEMS Simulation, Conference on MICROELECTRONIC AND MEMS TECHNOLOGY SPIE Proceedings Series, vol.4407, 2001.
DOI : 10.1117/12.425295

B. Selic, G. Gullekson, and P. Ward, Real-Time Object-Oriented Modeling, 1994.

S. D. Senturia, CAD challenges for microsensors, microactuators, and microsystems, Proc. IEEE, pp.1611-1626, 1998.
DOI : 10.1109/5.704266

C. Serre, Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators, Proc. Of?Ses-61] S. Seshu, and M. B. ReedLinear Graphs and Electrical Networks, pp.292-297, 1961.
DOI : 10.1007/s00542-006-0338-1

URL : https://hal.archives-ouvertes.fr/hal-00189301

C. Shearwood and R. B. Yates, Development of an electromagnetic micro-generator, Electronics Letters, vol.33, issue.22, pp.1883-1884, 1997.
DOI : 10.1049/el:19971262

S. Sherrit, S. P. Leary, B. P. Dolgin, and Y. Bar-cohen, Comparison of the Mason and KLM equivalent circuits for piezoelectric resonators in the thickness mode, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027), 1999.
DOI : 10.1109/ULTSYM.1999.849139

R. Sinha, J. J. Christiaan, V. Paredis, P. K. Liang, and . Khosla, Modeling and Simulation Methods for Design of Engineering Systems, Journal of Computing and Information Science in Engineering, vol.1, issue.1, pp.84-91, 2001.
DOI : 10.1115/1.1344877

J. G. Smits and A. Ballato, Dynamic admittance matrix of piezoelectric cantilever bimorphs, Journal of Microelectromechanical Systems, vol.3, issue.3, pp.105-112, 1994.
DOI : 10.1109/84.311560

T. Sterken, An electret-based electrostatic ?-generator, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003.
DOI : 10.1109/SENSOR.2003.1217009

J. C. Strauss, The SCI Continuous System Simulation Language (CSSL), Simulation, vol.9, pp.281-303, 1967.

. Sab and . Saber, Synopsys Inc. : http://www.synopsys.com/products/mixedsignal/saber/saber.html

P. Schneider, A. Schneider, and P. Schwarz, Modular approach for simulation-based optimization of MEMS, Design, Modeling, and Simulation in Microelectronics, pp.29-38, 2002.
DOI : 10.1117/12.405441

F. Semond, Epitaxy of AlN and GaN thin films on silicon or sapphire for the development of high frequency SAW devices, Ann. Chim. Sci. Mat, vol.26, issue.177, 2001.

A. W. Van-schijndel, Integrated building physics with FEMLAB SIMULINK/ MATLAB, Eighth International IBPSA Conference, pp.1177-1184, 2003.

D. Spreemann, Tunable transducer for low frequency vibrational energy scavenging, Proc. of Eurosensors XX, pp.132-133

E. Tonti, The reason for analogies between physical theories, Applied Mathematical Modelling, vol.1, issue.1, pp.37-50, 1976.
DOI : 10.1016/0307-904X(76)90023-8

F. and T. Drissi, Méthode et outils de synthèse pour systèmes multi-domaine", thèse en dispositifs de l'électronique intégrée, 2004.

M. J. Triengo and A. M. Bos, Modelling the dynamics and kinematics of mechanical systems with multibond graphs, Journal of the Franklin Institute, vol.319, issue.1-2, pp.37-50, 1985.
DOI : 10.1016/0016-0032(85)90063-8

J. E. Vandemeer, Nodal design of actuators and sensors (NODAS), Dept. Elect. Comput. Eng, 1997.

P. Voigt and G. Wachutka, Electro-fluidic microsystem modeling based on Kirchhoffian network theory, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), pp.1019-1022140, 1997.
DOI : 10.1109/SENSOR.1997.635358

P. Voigt, G. Schrag, and G. Wachutka, Microfluidic system modeling using VHDL-AMS and circuit simulation, Microelectronics Journal, vol.29, issue.11, pp.791-797, 1998.
DOI : 10.1016/S0026-2692(97)00093-1

B. Warneke, B. Atwood, and K. S. Pister, Smart dust mote forerunners, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2001.
DOI : 10.1109/MEMSYS.2001.906552

C. B. Williams and R. B. Yates, Analysis of a micro-electric generator for Microsystems, Transducers 95/Eurosensors IX, pp.369-372, 1995.

A. T. Yang and S. M. Kang, iSMILE: a novel circuit simulation program with emphasis on new device model development, Proceedings of the 1989 26th ACM/IEEE conference on Design automation conference , DAC '89, pp.630-633, 1989.
DOI : 10.1145/74382.74492

B. P. Zeigler, H. Praehofer, and K. , Theory of Modeling and Simulation : Integrating Discrete Event and Continuous Complex Dynamic Systems, 2000.

X. F. Zha and H. Du, Mechanical systems and assemblies modeling using knowledgeintensive Petri nets formalisms, J. Artificial Intelligence for Engineering Design Analysis and Manufacturing, pp.145-171, 2001.

T. Zhang, K. Chakrabarty, and R. B. Fair, Behavioral Modeling and Performance Evaluation of Microelectrofluidics-Based PCR Systems Using SystemC, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol.23, issue.6, pp.843-858, 2004.
DOI : 10.1109/TCAD.2004.828115

A. Zenati, Y. Ammar, K. Matou, and S. Basrour, Global simulation and cosimulation of self powered microsystems, Proceedings symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.1-3, 2005.