, Spectroscopie infrarouge en incidence rasante de l'hétérostructure ?-Al 2 O 3
, sur le graphique, est un spectre de référence réalisé sur un film natif de SiO 2 sur Si(111) afin de positionner le pic de vibration de la liaison Si-O-Si : ? Si-O-Si = 1020 cm -1 . Cette valeur est en accord avec la littérature
, sur le graphique, correspond à l'absorbance de la couche de ?-Al 2 O 3 épitaxiée sur Si(111) Les analyses infrarouges révèlent le même pic large Chapitre VI
, Le système LaAlO 3 /?-Al 2 O 3 /Si __________________________________________________ 164 VI.3.1.a) Introduction _____________________________________________________________ 164 VI.3.1.b) Essais de croissance directe de LaAlO 3 sur ?-Al 2 O 3 (001) en codéposition _____________ 165 VI.3.1.c) Ingénierie de l'interface LaAlO 3
, Al 2 O 3 /Si ___________________________________________________ 172 VI.3.2.a) Evolution du diagramme RHEED pendant la croissance __________________________ 172 VI.3.2.b) Analyses physico-chimiques par spectroscopie XPS _____________________________ 173 VI.3.2.c) Analyse de la qualité structurale par
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