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Développement de techniques de fabrication collectives de dispositifs électroniques à nanostructure unique.

Abstract : The development of the micro / nano electronic field is based on the constant reduction of the critical dimensions. This constant change in scale will lead to severe physical (quantum perturbation ...) and technological issues (resolution treshold of industrial fabrication processes). One of the most promissing alternative to overcome these problems is the global integration of nanometric objects in electronic devices. In this framework, we have developed several nanofabrication processes based on the use of a global, high resolution technique : the nanoimprint lithography. Manipulation and localisation of gold colloids have been performed using dielectrophoresis and several devices at the single particle level have been obtained. Electrical tests on these fabricated structures showed Coulomb blockage and staircases at low-temperature.
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https://tel.archives-ouvertes.fr/tel-00197851
Contributor : Jamal Tallal <>
Submitted on : Saturday, December 15, 2007 - 6:36:56 PM
Last modification on : Tuesday, February 16, 2021 - 3:33:46 AM
Long-term archiving on: : Monday, April 12, 2010 - 8:04:34 AM

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  • HAL Id : tel-00197851, version 1

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Jamal Tallal. Développement de techniques de fabrication collectives de dispositifs électroniques à nanostructure unique.. Micro et nanotechnologies/Microélectronique. Université Joseph-Fourier - Grenoble I, 2007. Français. ⟨tel-00197851⟩

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