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CINETIQUE DE CROISSANCE DE NANOTUBES DE CARBONE MONO-PAROIS ET MULTI-PAROIS ORIENTES PAR PROCEDE PLASMA

Abstract : This work deals with the growth of vertically oriented single- and multi-walled carbon nanotube by electron cyclotron resonance plasma enhanced chemical vapour deposition (ECR-PECVD). The growth kinetics of carbon nanotubes by PECVD have been investigated, highlighting some of the specific aspect of the plasma species on the single or few walled carbon nanotubes (SWNT/FWNT) growth. Controlling the main plasma parameters (plasma potential, gaseous precursor) and growth stages, we have demonstrated that vertically oriented and well separated SWNT or FWNT can be grown. We have demonstrated that such structures can be synthesized on aluminium substrate at temperature as low as 450°C. The cold emission measurements on the as-grown SWNT/FWNT show a relative low turn-on voltage (~5 V.µm-1), strongly dependent to the nanotubes morphology (length, radius). Nanotubes structural investigations have been conducted as a function of the growth conditions using several analysis, working at local scale (transmission electron microscopy, electron energy loss spectroscopy) as well as macroscopic scale (scanning electron microscopy, X-ray/ultraviolet photoelectron spectroscopy, elastic recoil detection analysis, Raman spectroscopy).
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Submitted on : Wednesday, November 21, 2007 - 3:48:01 PM
Last modification on : Monday, October 19, 2020 - 11:05:53 AM
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Aurélien Gohier. CINETIQUE DE CROISSANCE DE NANOTUBES DE CARBONE MONO-PAROIS ET MULTI-PAROIS ORIENTES PAR PROCEDE PLASMA. Matériaux. Université de Nantes, 2007. Français. ⟨tel-00189645⟩

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