T. Interface-indentation, 21 3.10. Cross-sectional nanoindentation test

.. Mechanical, 32 3.2. Criterion for debonding, ., p.45

.. Blister, 84 2.1. Blister test apparatus, Data acquisition system, p.86

.. Sample-preparation-for-indentation-test, 98 3.2.1Interface and cross-sectional indentation test, p.98

.. Indentation, 129 2.1. Normal indentation test, 129 2.2. Interface indentation test, p.132

. Comparison-between and I. Blister, 139 3.1. Comparison between G ci from normal indentation test with the values from blister test, p.139

]. G. Anstis, P. Chantikul, B. R. Lawn, and D. B. Marshall, A Critical Evaluation of Indentation Techniques for Measuring Fracture Toughness: I, Direct Crack Measurements, Journal of the American Ceramic Society, vol.60, issue.1, pp.533-538, 1981.
DOI : 10.1016/0043-1648(77)90117-X

]. S. Bull, Nanoindentation of coatings, Journal of Physics D: Applied Physics, vol.38, issue.24, pp.393-413, 2005.
DOI : 10.1088/0022-3727/38/24/R01

P. Chantikul, G. R. Anstis, B. R. Lawn, and D. B. Marshall, A Critical Evaluation of Indentation Techniques for Measuring Fracture Toughness: II, Strength Method, Journal of the American Ceramic Society, vol.61, issue.1, pp.539-543, 1981.
DOI : 10.1007/BF00545154

]. K. Chan, H. Ji, X. Wang, S. J. Hudak-jr, and B. R. Lanning, Mechanical properties and interface toughness of FeCo thin films on Ti???6Al???4V, Materials Science and Engineering: A, vol.422, issue.1-2, pp.422298-308, 2006.
DOI : 10.1016/j.msea.2006.02.035

]. D. Chicot, P. Demarecaux, and J. Lesage, Apparent interface toughness of substrate and coating couples from indentation tests, Thin Solid Films, vol.283, issue.1-2, pp.151-157, 1996.
DOI : 10.1016/0040-6090(96)08763-9

]. P. Demarecaux, D. Chicot, and J. Lesage, Interface indentation test for the determination of adhesive properties of thermal sprayed coatings, Journal of Materials Science Letters, vol.12, issue.5, pp.1377-1380, 1996.
DOI : 10.1007/BF00275281

]. P. Engle and G. C. Pedroza, Indentation-debonding test for adhered thin polymer layers Adhesion Aspects of Polymeric, p.583, 1983.

B. Scherban, G. Sun, and . Xu, Interfacial fracture induced by cross-sectional nanoindentation in metal-ceramic thin film structures, Acta Materialia, vol.51, pp.4295-4305, 2003.

]. J. Hutchinson and Z. Suo, Mixed Mode Cracking in Layered Materials, Advances in Applied Mechanics, vol.29, pp.63-191, 1992.
DOI : 10.1016/S0065-2156(08)70164-9

]. H. Jensen, The blister test for interface toughness measurement, Engineering Fracture Mechanics, vol.40, issue.3, pp.475-486, 1991.
DOI : 10.1016/0013-7944(91)90144-P

]. B. Latella, T. W. Nicholles, D. J. Cassidy, C. J. Barbé, and G. Triani, Evaluation of interfacial toughness and bond strength of sandwiched silicon structures, Thin Solid Films, vol.411, issue.2, pp.411247-255, 2002.
DOI : 10.1016/S0040-6090(02)00331-0

]. J. Lesage, P. Demarecaux, O. Bartier, and G. Mesmacque, détermination de l'adhérence par le test d'indentation interfaciale " La Revue de métallurgie-CIT, Science et Génie des matériaux, pp.1655-1663, 1993.

]. J. Lesage, D. Chicot, D. Judas, M. Zampronio, P. Araujo et al., Mesures par indentation interfaciale de l'adhérence de revetements NiCr projetés thermiquement, Matériaux et Techniques, pp.9-1029, 1999.
DOI : 10.1051/mattech/199987090029

]. J. Lesage and D. Chicot, Hardness and adhesion of coating Revista de la Facultad de Ingenieria de la U, C.V, vol.16, issue.1, pp.33-38, 2001.

]. X. Li, Effects of an elastic substrate on the interfacial adhesion of thin films, Surface and Coatings Technology, vol.200, issue.16-17, pp.5003-5008, 2006.
DOI : 10.1016/j.surfcoat.2005.05.009

]. D. Marshall and A. G. Evans, Measurement of adhesion of residually stressed thin films by indentation. I. Mechanics of interface delamination, Journal of Applied Physics, issue.10, pp.562632-2638, 1984.

B. Xu, J. Miner, J. He, and . Maiz, Adhesion studies in integrated circuit interconnect structures, Engineering Failure Analysis, vol.14, pp.349-354, 2007.

B. Xu, J. Miner, J. He, and . Maiz, Fracture characterization in patterned thin films by cross-sectional nanoindentation, Acta Materialia, vol.54, pp.3453-3462, 2006.

]. Y. Qi, P. Bruckel, and P. Lours, Interfacial toughness of the nickel-nickel oxide system, Journal of Materials Science Letters, vol.22, issue.5, pp.371-374, 2003.
DOI : 10.1023/A:1022697110703

]. C. Richard, G. Béranger, J. Lu, and J. F. Flavenot, The influences of heat treatments and interdiffusion on the adhesion of plasma-sprayed NiCrAlY coatings, Surface and Coatings Technology, vol.82, issue.1-2, pp.82-99, 1996.
DOI : 10.1016/0257-8972(95)02640-1

S. Roy, E. Darque-ceretti, E. Felder, and H. Monchoix, Mesure de l'adhérence de couches minces de la microélectronique par nanoindentation sur coupe et nano-rayure, pp.13-17, 2006.

]. J. Sanchez, S. El-mansy, B. Sun, T. Scherban, N. Fang et al., Cross-sectional nanoindentation: a new technique for thin film interfacial adhesion characterization, Acta Materialia, vol.47, issue.17, pp.474405-4413, 1999.
DOI : 10.1016/S1359-6454(99)00254-2

]. T. Scherban, D. Pantuso, B. Sun, S. El-mansy, J. Xu et al., Characterization of interconnect interfacial adhesion by cross-sectional nanoindentatioin, International Journal of Fracture, vol.119, pp.120421-429, 2003.

]. J. Greivenkamp and J. H. Bruning, Phase Shifting Interferometry " . Optical shop testing, second edition, 1992.

]. R. Hohlfelder, H. Luo, J. J. Vlassak, C. E. Chidsey, and W. D. Nix, Measuring Interfacial Fracture Toughness With The Blister Test, Proc. 436, pp.115-120, 1997.
DOI : 10.1557/JMR.1992.1553

]. Y. Hsu, Y. H. Chang, Y. L. Chai, and G. J. Chen, Residual stress and thermal stability of the Fe ? Ni ? Cr/Invar bimetal membrane used for micro-actuation, Thin Solid Films, pp.418189-196, 2002.

]. N. Taheri, N. Mohammadi, and N. Shahidi, An automatic instrument for measurement of interfacial adhesion of polymeric coatings, Polymer Testing, vol.19, issue.8, pp.959-966, 2000.
DOI : 10.1016/S0142-9418(99)00068-9

]. S. Wang, C. J. Tay, C. G. Quan, and H. M. Shang, Investigation of membrane deformation by a fringe projection method, Applied Optics, vol.41, issue.1, pp.22-1101, 2002.
DOI : 10.1364/AO.41.000101

.. Indentation, 129 2.1. Normal indentation test, Cross-sectional indentation test, p.135

. Comparison-between and I. Blister, 139 3.1. Comparison between G ci from normal indentation test with the values from blister test 139 3.2. Comparison between G ci from interface indentation test with the values from blister test 139 3.3. Comparison between G ci from cross-sectional indentation test with the values from blister, test, p.140

]. M. Dupeux and A. Bosseboeuf, Application of the blister test to adhesion envergy measurements in metal / ceramic film-on-substrate systems, Chapter Interfacial Science in Ceramic Jointing, pp.319-327, 1998.

. Imagej, ]. Y. Imagej, S. Kinemuchi, K. Uchimura, and . Watari, Centrifugal sintering of BaTiO 3 /Ni layered ceramics, Journal of the European Ceramics Society, pp.25-2223, 2005.

]. S. Lee, U. Paik, Y. I. Shin, J. W. Kim, and Y. G. Jung, Control of residual stresses with post process in BaTiO3-based Ni-MLCCs, Materials & Design, vol.24, issue.3, pp.169-176, 2003.
DOI : 10.1016/S0261-3069(03)00022-0

]. C. Lee, M. Dupeux, and W. H. Tuan, Adhesion strength of Ag/BaTiO interface, Scripta Materialia, vol.54, issue.3, pp.453-457, 2006.
DOI : 10.1016/j.scriptamat.2005.10.020

URL : https://hal.archives-ouvertes.fr/hal-00140877

]. J. Lesage and D. Chicot, Hardness and adhesion of coating Revista de la Facultad de Ingenieria de la U, C.V, vol.16, issue.1, pp.33-38, 2001.

]. X. Li, Effects of an elastic substrate on the interfacial adhesion of thin films, Surface and Coatings Technology, vol.200, issue.16-17, pp.5003-5008, 2006.
DOI : 10.1016/j.surfcoat.2005.05.009

]. Y. Lin and J. Jean, Constrained Sintering of Silver Circuit Paste, Journal of the American Ceramic Society, vol.34, issue.2, 2004.
DOI : 10.1111/j.1551-2916.2004.00187.x

]. E. Radi and M. C. Porcu, Near-tip fields for quasi-static crack growth along the interface between a porous-ductile material and a rigid substrate, International Journal of Solids and Structures, vol.38, issue.46-47, pp.388235-8258, 2001.
DOI : 10.1016/S0020-7683(01)00142-1

]. J. Sanchez, S. El-mansy, B. Sun, T. Scherban, N. Fang et al., Cross-sectional nanoindentation: a new technique for thin film interfacial adhesion characterization, Acta Materialia, vol.47, issue.17, pp.4405-4413, 1999.
DOI : 10.1016/S1359-6454(99)00254-2

]. Y. Shin, K. M. Kang, Y. G. Jung, J. G. Yeo, S. G. Lee et al., Internal stresses in BaTiO3/Ni MLCCs, Journal of the European Ceramic Society, vol.23, issue.9, pp.1427-1434, 2003.
DOI : 10.1016/S0955-2219(02)00346-1

]. H. Skriver and N. M. Rosengaard, Surface energy and work function of elemental metals, Physical Review B, vol.46, issue.11, pp.7157-7168, 1992.
DOI : 10.1103/PhysRevB.46.7157

]. S. Sugihara and K. Okazaki, Application of Ferroelectrics, Proceedings of the 7th IEEE International Symposium, pp.432-434, 1990.

]. J. Der-toonder, J. Malzbender, G. De-with, and R. Balkenende, Fracture Toughness and Adhesion Energy of Sol-gel Coatings on Glass, Journal of Materials Research, vol.17, issue.01, pp.224-233, 2002.
DOI : 10.1557/JMR.1992.1564

C. Lee, M. Dupeux, and W. Tuan, Adhesion strength of Ag/BaTiO interface, Scripta Materialia, vol.54, issue.3, pp.453-457, 2006.
DOI : 10.1016/j.scriptamat.2005.10.020

URL : https://hal.archives-ouvertes.fr/hal-00140877

L. Chao-yu, T. Michel, and . Wei-hsing, Influence of firing temperature on interface adhesion between screen-printed Ag film and BaTiO 3 substrate, Materials Science and Engineering A, pp.467125-131, 2007.

C. Lee, M. Dupeux, W. Tuan, M. Braccini, P. Au-colloque et al., Mesure d'énergie d'adhérence d'une couche métallique plastique sur un substrat céramique par gonflement-décollement, pp.26-28, 2006.