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Theses

ELABORATION ET CARACTERISATION DE QUELQUES DIELECTRIQUES A
FORTE PERMITTIVITE AVEC APPLICATION EN MICROELECTRONIQUE :
INFLUENCE DE LA STRUCTURE DU RESEAU SUR LEs PROPRIETES
ELECTRIQUES

Abstract : The study exposed here deals with the new materials that can be integrated within memories and other applications based on MOS transistors. This document is separated into three main chapters. The first chapter deals with fabrication requirements of devices. A state of the art is established, together with the industrial objectives at short term. This first section is important to provide the basic knowledge, in order to understand why considerable investment is done about materials and associated research in the microelectronics industry. The second chapter deals with fabrication methods of insulating materials studied here. We also describe characterization methods used to study physical and electrical properties of these materials. Several examples help the reader to understand the method adopted in this study. The last chapter is dedicated to a summary of my contributions to international scientific journals and conferences. It is divided into three main parts. The first and second deal with properties of aluminium- lanthanum silicates, and rare earth oxides obtained by various methods and processing. These results, together with previous published knowledge, provide a significant view of our work dedicated to determine valuable materials with high permittivity. The last section is dedicated to titane oxides and titane silicates.
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https://tel.archives-ouvertes.fr/tel-00173693
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Submitted on : Thursday, September 20, 2007 - 2:09:31 PM
Last modification on : Thursday, November 19, 2020 - 1:00:26 PM
Long-term archiving on: : Monday, September 24, 2012 - 12:35:29 PM

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  • HAL Id : tel-00173693, version 1

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CNRS | G2ELAB | UJF | UGA

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Tito Busani. ELABORATION ET CARACTERISATION DE QUELQUES DIELECTRIQUES A
FORTE PERMITTIVITE AVEC APPLICATION EN MICROELECTRONIQUE :
INFLUENCE DE LA STRUCTURE DU RESEAU SUR LEs PROPRIETES
ELECTRIQUES. Energie électrique. Université Joseph-Fourier - Grenoble I, 2006. Français. ⟨tel-00173693⟩

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