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Conception de microgénérateurs intégrés pour systèmes sur puce autonomes

Abstract : This PhD thesis addresses the subject of autonomous microsystems and their energy supply. Until now the energy needed for operation of these devices was provided by a finite source, like an electrochemical battery. It implies that the lifetime of the device is directly linked with the size of this reservoir and therefore a trade-off must be made between the size and the longevity of the system. The goal of this work consists in exploring the possibility of using the energy of ambient mechanical vibrations for powering autonomous devices. Furthermore we analyse the possibility of miniaturisation of such generators by using microfabrication techniques and piezoelectric thin layers. A MEMS micro energy scavenger would enable creation of autonomous systems on chip (SoC) or on a package (SoP). During this work we have developed detailed analytical and FEM models of piezoelectric micro power generators. The results obtained were used for design and fabrication of prototype structures using two types of piezoelectric thin layer materials: Aluminium Nitride (AlN) and Lead Zirconate Titanate (PZT). We have proven that these devices can generate powers up to several microwatts on a matched resistive load. We have also shown that in conjunction with special power management ASICs they can charge energy storage elements from very low amplitude vibrations. Finally we have assembled the entire energy harvesting system as a System on a Package. The presented devices are at the moment the sole examples of MEMS piezoelectric micro power generators adapted for ambient vibration energy harvesting. This PhD work is a part of the VIBES (VIBration Energy Scavenging) project founded by the European Commission (IST-1-STREP-507911).
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Submitted on : Wednesday, July 18, 2007 - 3:26:56 PM
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  • HAL Id : tel-00163796, version 1




M. Marzencki. Conception de microgénérateurs intégrés pour systèmes sur puce autonomes. Micro et nanotechnologies/Microélectronique. Université Joseph-Fourier - Grenoble I, 2007. Français. ⟨tel-00163796⟩



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