A. Y. Basrour-s, Non linear techniques for increasing harvesting energy from piezoelectric and electromagnetic micro-power-generators, Symposium on Design, Test, Integration and Packaging of MEMS, pp.26-28, 2006.

A. K. Honda-t, . D. Arnold, C. F. Das-s, Z. I. , A. M. et al., Micromagnetic actuators Magnetic Induction Machines Embedded in Fusion-Bonded Silicon, Digest Tech, pp.477-481, 1996.

A. D. Das-s, C. F. , Z. I. , A. M. , L. J. Beeby-s et al., Magnetic induction machines integrated into bulk-micromachined silicon Macro and micro scale electromagnetic kinetic energy harvesting generators, Symposium on Design, Test, Integration and Packaging of MEMS, pp.406-414, 2006.

C. D. Reddy-r, A chemo-pneumatic drive source for flexible operation of pneumaticmuscle actuators, Intelligent Robots and Systems' 94, pp.1360-1367, 1994.

D. J. Delamare, R. G. , C. O. , and R. H. , Micro-actionneurs électromagnetiques ? MAGMAS " , chapitre II., collection Hermes ? Science / Lavoisier ISBN 2-7462-0449-5, sous direction de Orphée CUGATMagnetic down-scaling laws, micro-magnets and applications of magnetic micro-actuators (MAGMAS), p.767, 2002.

L. G. Fréchette, . F. Nagle-s, U. S. Ghodssi-r, and L. A. Schmidt-m, An electrostatic induction micromotor supported on gas-lubricated bearings, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2001.
DOI : 10.1109/MEMSYS.2001.906535

F. K. Knobloch-a, W. C. Martinez-f, . C. Fernandez-pello, . P. Pisano-a, and . Liepmann-d, Design and Fabrication of a Silicon-Based MEMS Rotary Engine, ASME International Mechanical Engineering Congress and Exposition, pp.303-308

G. Gilles-p-a, C. O. , D. J. Divoux-c, and . Fernandez-v, 3-phase coil for planar brushless micromotor, Conf. ACTUATOR, pp.181-184, 2000.

H. A. Heaton-m, H. G. Pullen-k, and R. P. , Laser profiling of 3D microturbine blades, Proc. LPM 2003, pp.152-156, 2003.

J. H. Yan-h and H. M. , High Efficient Rectifier Circuit Eliminating Threshold Voltage Drop for RFID Transponders, th International Conference On ASIC Proceedings, pp.607-610, 2005.

J. J. Jufer, . Péclat-c, and . Birkicht-a, Microelectromechanical systems (MEMS): fabrication, design and applicationsElectromagnetic High Speed Micromotor, Institute of Physics Publishing, Smart Materials and Structures Proceedings 26th Annual Symposium on Incremental Motion Control Systems and Devices (IMCSD), pp.1115-1134, 2001.

E. S. Kleen, M. F. Nienhaus-m, . Stôling, and . Hd, Penny-motor : a family of novel ultraflat electromagnetic micromotors, Conf. ACTUATOR, pp.193-196, 2000.

E. Koukharenko, T. P. Beeby-s, . M. White-n, . T. O-'donnell, . Saha-c et al., Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications, Microsystem Technologies, pp.10-11, 2006.
DOI : 10.1007/s00542-006-0137-8

M. E. Pohl-k and P. S. Murphy-j, Summary of measured radiofrequency electric and magnetic fields (10 kHz to 30 GHz) in the general and work environment, Bioelectromagnetics, vol.18, issue.8, pp.563-577, 1997.

P. D. Mitcheson, Y. C. Green-t, and . S. Holmes-a, Architectures for Vibration-Driven Micropower Generators, Journal of Microelectromechanical Systems, vol.13, issue.3, pp.429-440, 2004.
DOI : 10.1109/JMEMS.2004.830151

O. T. Burguburu-s and R. Y. Dessornes-o, Numerical design and study of a MEMS based micro-turbine, Proceedings of GT2005 ASME Turbo Expo 2005: Power for Land, Sea and Air, 2005.

C. T. Pan, . M. Hwang-y, . L. Hu-h, and . C. Liu-h, Fabrication and analysis of a magnetic self-power microgenerator, Journal of Magnetism and Magnetic Materials, vol.304, issue.1, pp.394-396, 2006.
DOI : 10.1016/j.jmmm.2006.01.202

Z. I. Herrault-f, A. D. , and A. M. , Magnetic Patterning of Permanent-Magnet Rotors for Microscale Motor/Generators, Proc PowerMEMS, 2005.

Z. Z. , J. B. , C. P. Zwyssig, and K. J. , Brief Comparison of Different Rectifier Structures for RFID Transponders Design considerations and experimental results of a 100 W, 500 000 rpm electrical generator, J. Micromech. Microeng, vol.16, pp.297-302, 2006.

D. J. Yonnet-j-p and R. E. , A compact magnetic suspension with only one axis control, IEEE Trans. On Magnetics, vol.30, issue.6, pp.4746-4748, 1994.

R. J. Delamare, C. O. , and R. H. , Magnetic down-scaling laws, micro-magnets and applications of magnetic micro-actuators (MAGMAS), p.767, 2004.

A. B. Delinchant, . B. Du, D. J. Wurtz-f, and C. O. , Design optimization of integrated planar miniature magnetic motors, Proc: DTIP'04, pp.12-14, 2004.

O. T. Burguburu-s and R. Y. Dessornes-o, Numerical design and study of a MEMS based micro-turbine, Proceedings of GT2005 ASME Turbo Expo 2005: Power for Land, Sea and Air, 2005.

W. C. Zhang-x and E. A. Jacobson-s, A Self-Acting Thrust Bearing for High Speed Micro-Rotors, 15th IEEE International Conference on Micro Electro Mechanical Systems, pp.276-279, 2002.

A. R. and H. Wagner-r, The influence of surface conditions on magnetic properties of sintered SmCo 5 magnets, J. Magn. Magn. Mater, vol.9, pp.188-190, 1978.

B. R. Adler-e, . T. Budde, and . H. Gatzen-h, The effect of surface oxidation on the demagnetization curve of sintered Nd-Fe-B permanent magnets". presented at the 9 th International Workshop on Rare Earth Magnets and Their Applications, paper W 8Patterned sputter deposited SmCo films for MEMS applications, J. Magn. Magn. Mater, vol.10, pp.242-245, 1987.

D. J. Oliver-rulliere-e, . Yonnet-j-p, and . J. Bigeon, 3D calculation of permanent magnet interactions, IMACS TC'1, pp.289-292, 1993.

D. N. Kornilov-n, C. O. Gabriel-a, M. A. Boisseau-j-p, . Brassard-s, and . Perrier-de-la-bathie-r, Thick hard magnetic films for MEMS: some key issues, Proceedings of the HPMA'04 Extrusion of Fe-Nd-B Magnets. A Direct Approach to Obtaining Integrated Inductor Devices " The 3rd European Conference on Advanced Materials and Processes, pp.779-2197, 2004.

R. M. Grechishkin, . S. Soshin-s, and C. E. Ilyashenko-s, High resolution magneto-optic field mapping for magnetic microsystems, Proc. of the HPMA'04, p.945, 2004.

M. K. Bonfim-m, G. D. Fontaine-a, . T. Matthias, F. J. Zehetner-g, . Scholz-w et al., 50 T pulsed magnetic fields in microcoils) magnets for high-temperature applications, Journal of Applied Physics TEM-analysis of Sm J, vol.87, issue.4, 1996.

G. P. Hurst-p, L. S. , and M. R. , Analysis and design of analog integrated circuits, 2001.

L. G. Piovaccari-a, A CMOS low-power, high-speed, asynchronous comparator for synchronous rectification applications, IEEE ISCAS, 2000.

P. V. Vancorenland-p, M. A. Steyaert-m, and . Sansen-w, A 900-mV Low-Power ?? A/D Converter with 77-dB Dynamic Range, IEEE Journal of Solid-State Circuits, vol.33, issue.12, 1998.

. Sko and . T. Skotnicki, Transistor MOS et sa technologie de fabrication, p.430

N. Achotte, H. Raisigel, J. Delamare, and O. Cugat, Characterization of planar brushless micromotors/micro-generators, Proceedings of the Mecatronics'03, pp.179-183, 2003.

H. Raisigel, O. Wiss, N. Achotte, O. Cugat, and J. Delamare, Magnetic planar micro generator, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., p.942, 2004.
DOI : 10.1109/SENSOR.2005.1496527
URL : https://hal.archives-ouvertes.fr/hal-00182641

H. Raisigel, O. Cugat, J. Delamare, O. Wiss, and H. Rostaing, Magnetic planar micro generator, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp.757-761, 2005.
DOI : 10.1109/SENSOR.2005.1496527
URL : https://hal.archives-ouvertes.fr/hal-00182641

H. Raisigel, O. Cugat, and J. Delamare, Permanent magnet planar micro-generators, Sensors and Actuators A: Physical, vol.130, issue.131, pp.438-444, 2006.
DOI : 10.1016/j.sna.2005.10.007
URL : https://hal.archives-ouvertes.fr/hal-00192174

H. Raisigel, J. Crebier, Y. Lembeye, O. Cugat, and J. Delamare, Micro-redresseur intégré pour micro-sources triphasées, Proc. 11ème édition, 2006.

H. Raisigel, J. Crebier, Y. Lembeye, O. Cugat, and J. Delamare, Integrated µ-rectifier for µsources, Proc. 8th International Seminar on Power Semiconductors, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00196780

R. M. Grechishkin, S. A. Chigirinsky, H. Raisigel, H. Rostaing, and A. B. Zalyotov, Permanent magnet microuniformity and magnetic flux distribution in magnetic microactuators and systems, Proc of the Third Moscow International Symposium on Magnetism, pp.212-215, 2005.
URL : https://hal.archives-ouvertes.fr/hal-00185830