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Technologie et caractérisation de VCSELs à détection intégrée pour applications aux communications optiques et à l'instrumentation

Abstract : This thesis work deals with the design, fabrication and characterization of a component which integrate a Vertical Cavity Laser (VCSEL) and a detector. By detecting the lateral emission, which can be correlated to the VCSEL stimulated emission, output power monitoring can be achieved. In order to fabricate these components, several VCSEL fabrication processes steps have required specific optimizations. Thus, we present works made in the domain of the plasma etching, metallization, thermal oxidation, passivation and ionic implantation. This work allowed us to obtain a more reliable fabrication process. The basis principle was highlighted using two adjacent components, one transmitting, the other detecting. It consists in observing the evolution of the laterally detected photocurrent and to note that even if he does not evolve like the emitted power, it presents singular points corresponding respectively to the threshold and the extinction of the laser emission. Moreover, this evolution of the laterally detected current is monotonous increasing, which makes it possible to make there correspond only one value of the emitted power. Thereafter, this integrated detection was improved by the addition of a detector with Schottky contact near the emitting VCSEL. This results in obtaining a compact, sensitive, and entirely compatible device with the fabrication process and standard epitaxial layers. This generic solution has the advantage of being directly transferable to other wavelengths (1,3 and 1,55µm for example). The electrical characterization of this component in continuous mode was carried out, and made it possible to confirm the improvement of the performances in detection. The robustness of this solution at raised operating temperatures is also shown, until 100°C. In pulsed mode, the time response measured around fifteen nanoseconds show the compatibility of this system with modulations about the gigabit per second. Within this framework, we also studied the ultra high frequencies characteristics of the component. Except the fast systems of transmissions, we can plan to exploit this integrated detection for the instrumentation, this for relatively fast signals (sub-microsecond), in an optical configuration of re-injection for example.
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Contributor : Emilie Marchand <>
Submitted on : Wednesday, June 27, 2007 - 2:46:01 PM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM


  • HAL Id : tel-00157963, version 1


Cédric Amat. Technologie et caractérisation de VCSELs à détection intégrée pour applications aux communications optiques et à l'instrumentation. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2007. Français. ⟨tel-00157963⟩



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