Fabrication de motifs métalliques et semi-conducteurs co

Abstract : Among nanometric size objects, nanowires (NWs) are probably the most interesting
since they can be either integrated as key element of a device or used as simple electrodes to
address another nano-element. This study present two different fabrication processes of
metallic or silicon NWs.
The first technique concerns the direct writing of gold NWs on a silicon surface by
atom transfer from a gold coated platinum STM tip, when voltage pulses of few volts
amplitude are applied to the surface. 15 nm wide and 3 nm high gold NWs were obtained
using this process.
The second part of this work deals with the Si NWs growth by the VLS (Vapor-
Liquid-Solid) technique on a surface coated by small gold clusters catalysing the dissociation
of gaseous silane (SiH4) molecules. Two different techniques of surface heating have been
tested to force the horizontal growth of the Si NWs from a contact electrode. First, the surface
has been locally heated by a tightly focused cw Ar+ laser beam, inducing a strong horizontal
thermal gradient over a spot diameter of roughly 3μm. Finally SiNWs growth has been
studied from sub-micrometric tungsten resistors, coated by a thin 2-nm thick gold layer and
heated by Joule effect at high current densities.
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Hichem Abed. Fabrication de motifs métalliques et semi-conducteurs co. Physique [physics]. Université de la Méditerranée - Aix-Marseille II, 2006. Français. ⟨tel-00157846⟩

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