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La micropyrotechnie sur silicium et l'intégration microsystèmes

Abstract : Obtaining an integratable, compatible, low cost mechanical energy source providing a sufficient quantity of easily accessible energy within a miniaturised system has been an ongoing challenge for decades. The urgency and interests of such systems will continue to increase with the development of portable microsystems, distributed microsystems as the smartdust type and monitoring systems. The conventional approach to mechanical actuation is based on electromagnetic machines. This option is very efficient but difficult to integrate at microscopic scales. Actuation making use of electrostatic forces became widespread starting from the 1990s, and this is an important step forward for microsystems since it is very easy to integrate, it is relatively powerful and easy to use. Obviously there is still a real actuator need to be satisfied for integrated and high power actuation. In this context LAAS-CNRS initiated micropyrotechnics in 1995 by integrating energetic materials (propellants or explosives) into microsystems to generate microthrusts, gases for actuation, for microinitiation or simply to act as energy sources to modify surfaces, and for heating and welding. Since then, other teams have initiated large amounts of work in micropyrotechnics. The manuscript makes the state-of-the-art of the micropyrotechnics and gives essential results obtained at LAAS.

Today the trend which is the extreme system miniaturisation and complexification leads to new technological and material challenges. After the micro pyrotechnics history and evolution, we present the perspectives of this discipline. A particular emphasis on new nanostructured energetic materials, as well as on the development of theoretical multiphysics tools to help the conception of systems that became extremely complexes where pyrotechnical functions has to cohabite with mechanical, thermal, chemical and electronics functions.
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https://tel.archives-ouvertes.fr/tel-00150262
Contributor : Carole Rossi <>
Submitted on : Tuesday, May 29, 2007 - 9:12:59 PM
Last modification on : Friday, October 23, 2020 - 4:41:14 PM
Long-term archiving on: : Thursday, April 8, 2010 - 6:19:30 PM

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  • HAL Id : tel-00150262, version 1

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Carole Rossi. La micropyrotechnie sur silicium et l'intégration microsystèmes. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2006. ⟨tel-00150262⟩

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