25 permet de comparer les évolutions fréquentielles des paramètres de réflexion mesurés (a) et simulés (b) ; de même pour la Figure VI.26 qui présente les paramètres de transmission. Les mesures présentent 3 hauteurs de capot (55 µm, 210 µm et sans capot, les simulations ne présentent que deux hauteurs ,
Développement de bancs de mesures et de modèles de bruit des HEMT pour la conception de circuits faible bruit en gamme d'ondes millimétriques, 1997. ,
Terahertz-bandwidth transmission lines on low-permittivity substrates, Fifth International Symposium on Space Terahertz Technology, pp.698-699, 1994. ,
Terahertz-bandwidth characterization of coplanar waveguide on dielectric membrane via time-domain electro-optic sampling Katehi ; Terahertz-bandwidth pulse propagation on a coplanar stripline fabricated on a thin membrane, .B. IEEE Microwave and Guided wave, vol.4, issue.3, pp.477-480, 1994. ,
A simple optical system to optimize a high dept to width aspect ratio applied to a positive photoresist lithography process, Journal of Micromechanics and Microengineering, vol.7, pp.118-120, 1997. ,
Optical and structural properties of SiOx and SiNx materials, Thin Solid Films, vol.266, pp.14-19, 1995. ,
Study of a novel planar transmission line Katehi ; A theoretical and experimental study of microshield circuits. Microwave and Optical Technology Letters Cours de technologie, IEEE MTT-S DigestP.B, vol.6, issue.6, pp.623-626, 1991. ,
Micromachined circuits for mm-wave applications. European Microwave Conference, pp.587-588, 1993. ,
Development of miniature microwave circuit components using micromachining techniques, IEEE MTT-S International Microwave Symposium, pp.225-228, 1994. ,
Development and characterization of miniaturized circuits for high frequency applications using micromachining techniques, International Society for Hybrid Microelectronics Society, 1994. ,
Design of micromachined high frequency circuit components, The International Journal of Microcircuits and Electronics Packaging, vol.18, pp.119-147, 1995. ,
Etude Approfondie en micro-ondes et transmission optique de l'Ecole Doctorale d'Electronique de Toulouse, 1997. ,
Measurement and interpretation of stress in aluminium-based metallization as a function of thermal history, IEEE Trans. on Electron Devices, vol.34, issue.3, pp.689-699, 1987. ,
Analytical formulas for coplanar lines in hybrid and monolithics MICs Godshalk ; Generation and observation of surface waves on dilelectric slabs and coplanar structures. MTT-S, Electronics LettersGod. 93i] E. M, vol.20, pp.179-181, 1967. ,
Equations for microstrip circuit design. European Microwave Conference, pp.268-272, 1975. ,
Si-micromachined coplanar waveguides for use in high-frequency circuits, IEEE Transactions on Microwave Theory and Techniques, vol.46, issue.6, pp.762-768, 1998. ,
Considerations in the use of coplanar waveguide for millimeter-wave integrated circuit, MTT-34, n° 12, pp.1450-1456, 1986. ,
Coplanar waveguide vs. microstrip for millimeter wave integrated circuit, IEEE MTT-S Digest, pp.699-702, 1986. ,
Novel transmission lines for the submillimeter-wave region, Proceedings of the IEEE, vol.80, issue.11, pp.1771-1787, 1992. ,
Theoretical and experimental characterization of microshield circuits, URSI International Symposium on Signals, Systems and Electronics, 1992. ,
Coplanar waveguide element for a european CAO environment. European Microwave Conference, 1993. ,
Influence of annealing on elastic properties of LPCVD silicon nitride and LPCVD polysilicon, Sensors and Materials, vol.7, issue.2, pp.121-129, 1995. ,
Semiconductor materials and process technology handbook for very large scale integration and ultra large scale integration Zaghloul ; Micromachined Microwave Transmission Lines in CMOS Technology, E. IEEE Transactions on Microwave Theory and Techniques, vol.45, issue.5, pp.630-635, 1988. ,
Uniplanar MMIC's and their applications, IEEE Transactions on Microwave Theory and Techniques, vol.36, issue.12, pp.1896-1901, 1988. ,
Correlation between stress and structure in chemically vapour deposited silicon nitride films. Thin Film Solid Films, pp.129-143, 1988. ,
Coplanar waveguide with top and bottom shields in place of air-bridges, IEEE Transactions on Microwave Theory and Techniques, vol.41, issue.9, pp.1559-1563, 1993. ,
The composition and physical properties of LPCVD silicon nitride deposited with different NH3/SiH2Cl2 gas ratios, J. Electrochem. Soc. : Solid-State Science and Technology, vol.132, issue.12, pp.3001-3005, 1985. ,
Circuits intégrés monolithiques micro-ondes (MMIC) en technologie uniplanaire. 2 ème rapport d'avancement, contrat CNES-CNRS, contrats AES-CNRS ; rapport LAAS n° 95331, 1995. ,
Single mode opration of coplanar waveguides Electronic letters ,
Propagation modes and dispersion characteristics of coplanar waveguides, IEEE Transactions on Microwave Theory and Techniques, vol.38, issue.3, pp.245-251, 1990. ,
DOI : 10.1109/22.45333
Micromachined W-band filters, IEEE Transactions on Microwave Theory and Techniques, vol.44, issue.4, pp.598-606, 1996. ,
The LIGA technique. what are the new opportunities, J. Micromech. Microeng, vol.2, 1992. ,
Coplanar waveguides on dielectric membranes micromachined on a GaAs substrate, Electronics Letters, vol.32, issue.9, pp.821-822, 1996. ,
Technologie des composants à hétérostructures pour les têtes de réception par satellite aux longueurs d'ondes millimétriques, 1996. ,
Physics of semiconductor devices. 2 nd edition. Wiley-interscience edition, 1981. ,
Introduction à la physique des matériaux conducteurs et semi-conducteurs, 1992. ,
Elastic relationships in layered composite media with approximation for the case of thin films on a stick substrate, J. Applied Physics, vol.62, issue.11, pp.4438-4444, 1987. ,
A survey of European activity on coplanar waveguide, 1993 IEEE MTT-S International Microwave Symposium Digest, pp.693-696, 1993. ,
DOI : 10.1109/MWSYM.1993.277002
High performance microshield line components, IEEE Transactions on Microwave Theory and Techniques, vol.43, issue.3, pp.534-543, 1995. ,
DOI : 10.1109/22.372098
Coplanar waveguide : a surface strip transmission line suitable for nonreciprocal gyromagnetic device applications, MTT-17, n°. 12, pp.1087-1090, 1969. ,