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Etude de capacités en couches minces à base d'oxydes métalliques à très forte constante diélectrique, BaTiO3, SrTiO3 et SrTiO3/BaTiO3 déposées par pulvérisation par faisceau d'ions

Abstract : In a view of miniaturization in microelectronics and more particularly in the sector of mobile phone, perovskites materials with very high permittivity are interesting candidates to replace dielectrics currently used in the development of Metal/Insulator/Metal (MIM) capacitor. This work is devoted to the development and the characterization of thin layers of strontium titanate (SrTiO3) and barium titanate (BaTiO3) deposited by Ion Beam Sputtering (IBS) in capacitive structure Pt/high-k/Pt.
An optimization of deposition parameters using designs of experiments was carried out in order to obtain the highest permittivity and this, with the lowest elaboration temperature for the integration of MIM structures on integrated circuits.
EXAFS, XRR and AFM TUNA analysis enabled us to understand the influence of materials microstructures (grain size) and of capacitor elaboration process (dielectric thickness, top electrode etching process and electrode materials) on the properties of MIM capacitors.
A study on SrTiO3/BaTiO3 multilayer was also undertaken in order to observe the influence of stacking periodicity on their electric properties (permittivity, linearity).
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https://tel.archives-ouvertes.fr/tel-00141132
Contributor : Julie Guillan <>
Submitted on : Wednesday, April 11, 2007 - 4:23:53 PM
Last modification on : Thursday, November 19, 2020 - 3:52:07 PM
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Julie Guillan. Etude de capacités en couches minces à base d'oxydes métalliques à très forte constante diélectrique, BaTiO3, SrTiO3 et SrTiO3/BaTiO3 déposées par pulvérisation par faisceau d'ions. Micro et nanotechnologies/Microélectronique. Université Joseph-Fourier - Grenoble I, 2005. Français. ⟨tel-00141132⟩

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