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Habilitation à diriger des recherches

Contribution à la conception et la réalisation de microsystèmes électrostatiques

Abstract : Electrostatic Microsystems have been developed in the 80's and they are a milestone for the technological development. The manuscript will present works done with atomic scale modelling of bulk micromachining in silicon and with technological development of a three layer polysilicon surface micromachining. This last point will be illustrated by realisation of an electrostatic side drive micromotor. Other examples of MEMS dedicated to optical applications will be presented either for telecommunication or military applications. The future of works dealing with introduction of polymers in silicon technologies will be also presented.
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Habilitation à diriger des recherches
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Submitted on : Monday, April 2, 2007 - 1:49:51 PM
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  • HAL Id : tel-00139604, version 1


Henri Camon. Contribution à la conception et la réalisation de microsystèmes électrostatiques. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2006. ⟨tel-00139604⟩



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