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Microdispositifs en couches minces d'oxydes
supraconducteurs (YBa2Cu3O7-d)
et manganites (La0,7Sr0,3MnO3)

Laurence Méchin 1
1 Equipe Electronique - Laboratoire GREYC - UMR6072
GREYC - Groupe de Recherche en Informatique, Image, Automatique et Instrumentation de Caen
Abstract : This manuscript presents my research activity since my PhD thesis defended in 1993. I mainly worked on two types of oxides: YBCO et LSMO. I always kept in mind the development of devices as a whole, i.e. from the thin film to the device characterization. One part of my work has been devoted to the study of structural, electrical or magnetic properties of the thin films in order to optimize deposition conditions. Both YBCO and LSMO oxides present a perovskite structure and require similar deposition conditions (700 - 750 °c in O2 pressure) . I used three deposition methods: pulsed laser deposition, on axis high pressure sputtering and RF off axis sputtering.
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Contributor : Laurence Méchin <>
Submitted on : Friday, March 23, 2007 - 3:34:30 PM
Last modification on : Monday, January 4, 2021 - 3:46:09 PM
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  • HAL Id : tel-00138167, version 1


Laurence Méchin. Microdispositifs en couches minces d'oxydes
supraconducteurs (YBa2Cu3O7-d)
et manganites (La0,7Sr0,3MnO3). Micro et nanotechnologies/Microélectronique. Université de Caen, 2005. ⟨tel-00138167⟩



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