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Microbolomètres supraconducteurs YBCO suspendus
réalisés par micro-usinage du substrat de silicium

Laurence Méchin 1
1 LCP - Laboratoire de Cryophysique
SPSMS - UMR 9001 - Service de Physique Statistique, Magnétisme et Supraconductivité : DSM/DRFMC/SPSMS
Abstract : We demonstrated the feasibility of both sensitive and relatively fast YBaCuO
suspended bolometers by silicon micromachining. This work includes a technological part
where three fabrication sequences are described and a characterisation part. The YBaCuO
films on CeO2 / YSZ-buffered silicon are c axis textured and show only one epitaxial in-plane
orientation. Their critical temperature Tc (zero resistance) is 88 K and their critical current
density is above 106 A / cm2 at 77 K. The reactive ionic etching (RIE) of silicon substrates
enabled to fabricate a large number of samples and to confirm our calculations by comparison
with the measurements. The technique of fabrication based on SIMOX substrates did not
degrade the YBaCuO superconducting properties and was found to be very promising for
detection. At last, we defined a meander line, constituted by seventeen 4 µm wide tracks and
fabricated by RIE. The performances of this detector of 100 ´ 100 µm2 area, measured at 85 K
in the wavelength range 3-5 µm, are among the best reported results:
Sensitivity (3-5 µm) = 11950 V / W.
Thermal response time t = 564 µs.
Optical NEP = 4,0 10-12 W Hz-1/2
Detectivity D* = 2,5 109 cm Hz-1/2 / W
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Contributor : Laurence Méchin <>
Submitted on : Friday, March 23, 2007 - 3:13:33 PM
Last modification on : Monday, January 4, 2021 - 3:46:09 PM
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  • HAL Id : tel-00138157, version 1



Laurence Méchin. Microbolomètres supraconducteurs YBCO suspendus
réalisés par micro-usinage du substrat de silicium. Micro et nanotechnologies/Microélectronique. Université de Caen, 1996. Français. ⟨tel-00138157⟩



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