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Solution générique pour l'adressage matriciel de micro-actionneurs thermiques et optimisation de micro-sources thermiques

Abstract : Nowadays, technology reached a sufficient maturity to guarantee the realization of MEMS with an output of fabrication close to 100%. As a result, high density integration of micro actuators or detectors can be considered to develop new functionalities. This work concerns the set up of matric addressing systems for thermal actuators like realization of heating sources with adjustable temperature profile. First, we will carry out a review of the applications using micro heater sources. This in order to specify the characteristics of each type of application. A generic solution with the problem of addressing heating source will be proposed, based on polysilicon elements with symmetrical thresholds. The development of this solution, implying a control of the polysilicium doping levels by implantation, will be detailed. Then we will present the two projects which allow to validate the use of this addressing system: MicroPyros project aiming to the realization of a matrix of micro pyrotechnical actuators, as well as the project aiming at the realization of a matrix of micro ejectors. For each of the two cases, studies were undertaken, leading to achievements within the technological station of LAAS CNRS. As a result, the various produced matrices were tested and validated. Finally, we will present the results of the last technological process, allowing the comparison of the achievements suspended, on membranes and on silicon and even more to explore new functionalities based on the polysilicium elements with symmetrical thresholds.
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https://tel.archives-ouvertes.fr/tel-00135620
Contributor : Emilie Marchand <>
Submitted on : Thursday, March 8, 2007 - 1:17:23 PM
Last modification on : Friday, January 10, 2020 - 9:08:08 PM
Long-term archiving on: : Friday, November 25, 2016 - 2:50:40 PM

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  • HAL Id : tel-00135620, version 1

Citation

Maxime Dumonteuil. Solution générique pour l'adressage matriciel de micro-actionneurs thermiques et optimisation de micro-sources thermiques. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2006. Français. ⟨tel-00135620⟩

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