Utilisation des résonateurs piézoélectriques fonctionnant en mode d'épaisseur pour la réalisation de capteurs

Abstract : Sensors bring quality to every-day life, many activity domains require high performance sensors. Piezoelectric resonators are well known for their applications in stabilized frequency generation, while their potential of utilization for sensor manufacturing is less exploited. The thesis present two applications of sensors intended for the measurement of force and temperature. The particularity of the force sensor is that the quartz itself serves as temperature gauge and that the signals serving for temperature and force measurement are electrically isolated, electronic circuits design being simplified. That was accomplished by exciting anharmonic modes of resonators and by choosing a certain azimuth direction of applied force, each mode being essentially sensitive to the force or to the temperature. The thesis particularly presents a method of design of a set of electrodes over the surface of a plano-convex resonator operating simultaneously on two thickness shear modes (B and C modes).The second part of the thesis is dedicated to experimental characterization (X-ray topographies, electrical spectrums, frequency to temperature characteristics) of a series of miniaturized thermosensitive resonant sensors made in quartz and GaPO4, and intended for precise measurement over extended temperature ranges up to cryogenics. The study particularly investigated couplings between modes, responsible for the activity-dip phenomenon.A complete electronic and software system for temperature and force conversion is developed, based on the delivered frequencies.
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Micro et nanotechnologies/Microélectronique. Université de Franche-Comté, 2006. Français
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Submitted on : Monday, February 26, 2007 - 11:48:42 PM
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Ioan Alexandru Ivan. Utilisation des résonateurs piézoélectriques fonctionnant en mode d'épaisseur pour la réalisation de capteurs. Micro et nanotechnologies/Microélectronique. Université de Franche-Comté, 2006. Français. <tel-00133599>

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