G. Anne, C. Didier, J. Christophe, E. Microtechnologies, and . Microsystèmes, Marché mondial et position de la France Rapport de synthèse pour le ministère de l'industrie, 1995.

V. Mosser, J. Suski, J. Goss, and E. Obermeier, Piezoresistive pressure sensors based on polycrystalline silicon Sensors and Actuators, pp.28-113, 1991.

G. Blasquez, P. Pons, and A. , BOUKABACHE Capabilities and limits of silicon pressure sensors Sensors and Actuators, pp.387-403, 1989.

P. Pons and G. , BLASQUEZ Low-cost high-sensitivity integrated pressure and temperature sensor Sensors and Actuators A, pp.41-42, 1994.

R. Lars, J. Söderkvist, S. Leif, and . Micromachined, Sensor Structures with Linear Capacitive Response Sensors and Actuators A, pp.31-200, 1992.

G. Blasquez, N. Benmoussa, Y. Naciri, and P. Labie, BLONDEL Capteur de pression capacitif micro-électronique 2ème Congrès International d'Electronique Automobile, 1986.

B. Diem, P. Rey, S. Renard, S. Viollet, H. Bosson et al., From Bulk to Surface Micromachining a new age for Silicon Sensors and Actuators Sensors and Actuators, pp.46-47, 1995.

V. M. Artyomov, E. A. Kudryashov, V. A. Shelenshkevich, and A. I. , SHULGA Silicon Capacitive Pressure Transducer with Increased Modulation Depth Sensors and Actuators, pp.223-230, 1991.

W. S. Czarnocki-(-motorola and . Inc, Electronic Pressure Transducer Brevet d'invention n° 4 550 611, 1985.

W. and B. Pierre, Régie Nationale des Usines Renault) Transducteur Capacité -Fréquence notamment pour capteurs captifs (capacitifs) Brevet d'invention n° 85/ 00831, pp.22-1985

T. Kudho, S. Shoji, and M. Esashi-an, Integrated Miniature Capacitive Pressure Sensor Sensors and Actuators, pp.185-193, 1991.

G. Blasquez, N. Naciri, N. Benmoussa, and P. , PONS Static response of miniature capacitive sensors with square on rectangular silicon diaphragm Revue de Physique Appliquée, pp.505-510

C. France-catalogue, DAVEZAC Le verre en électronique Techniques de l'Ingénieur, traité électronique, pp.290-291

P. R. Younger, Hermetic Glass Sealing by Electrostatic Bonding Journal of Non-cristalline Solids, pp.39-909, 1980.

T. Rogers and J. Kowal, Selection of Glass : Anodic bonding conditions and material compatibility for siliconglass capacitive pressure sensors Sensors and Actuators A, pp.46-47, 1995.

G. Blasquez, P. Pons, and A. , BOUKABACHE Capabilities and limits of silicon pressure sensors Sensors and Actuators, pp.387-403, 1989.

Y. S. Lee and K. D. , WISE A Batch-Fabricated Silicon Capacitive Pressure Transducer with Low Temperature Sensitivity, IEEE Transactions on Electron Devices, issue.11 1, p.29, 1982.

B. Puers, E. Peeters, A. Van-den, and W. Bossche, SANSEN A Capacitive Pressure Sensor with Low Impedance Output and Active Suppresion of Parasitic Effects Sensors and Actuators A, pp.21-23, 1990.

A. Ettouhami, A. Essaid, N. Ouakrim, L. Michel, and M. , LIMOURI Thermal Buckling of Silicon Capacitive Pressure Sensor Sensors and Actuators A, pp.167-171, 1996.

P. Leturcq, REY Physique des composants actifs à semiconducteurs Dunod Université, 1978.

M. L. Frank and G. C. Van-der-goes, Meijer A Novel Low-Cost Capacitive-Sensor Interface, IEEE Transactions on Instrumentation and Measurement, vol.45, issue.2, 1996.

P. Leturcq, REY Physique des composants actifs à semiconducteurs Dunod Université, 1978.

P. Pons, G. Blasquez, and R. , BEHOCARAY Feasability of Capacitive Pressure Sensor Without Compensation Circuits Sensors and ActuatorsA, pp.37-38, 1993.

A. Hanneborg, T. Hansen, P. A. Ohlckers, E. Carlson, B. Dahl et al., An Integrated Capacitive Pressure Sensor with Frequency-Modulated Output Sensors and Actuators, pp.345-351, 1986.

G. Blasquez, P. Pons, N. Fabre, V. Conedera, C. Solano et al., DONDON and C. ZARDINI Faisabilité d'un capteur de pression et de température conçu selon les principes des systèmes intelligents Rapport LAAS N° 91376, SITEF'91, Capteurs intelligents et microactionneurs intégrés, pp.24-26, 1991.

. Ph, C. Dondon, and J. L. Zardini, AUCOUTURIER BiCMOS integrated circuit for capacitive pressure sensors in automotive applications Sensors and Actuators A, pp.37-38, 1993.

G. Blasquez, P. Pons, . Ph, X. Menini, P. Chauffleur et al., ZARDINI Efficiency of a BiCMOS ratiometric circuit to self-compensate for nonlinearities and thermal drifts in capacitive pressure sensors 10th European Conference on Solid State Transducers (Eurosensors X), pp.8-11

. Ph, C. Dondon, and J. L. Zardini, AUCOUTURIER BiCMOS integrated circuit for capacitive pressure sensors in automotive applications Sensors and Actuators A, pp.37-38, 1993.

J. R. Jordan, K. W. Peter, D. Renshaw, and D. W. , KENT A Capacitance Ratio to Frequency Ratio Converter Using Switched-Capacitor Techniques Sensors and Actuators A, pp.29-133, 1991.

P. Leturcq, REY Physique des composants actifs à semiconducteurs Dunod Université, 1978.