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Faisabilité d'un capteur de pression capacitif miniature sur silicium

Abstract : The pressure sensor described here is an hybrid association of a capacitive sensing cell in Silicium/Pyrex technology, and a capacitance/frequency transducer based on the charge and the discharge of a capacitor with constant current. The modelling response of each part allows us to explicit the transfer function of the sensor. Accurate evaluation of different parameters is achieve by both numerical simulation and experimental characterisation of the sensing cell and the electronic circuit. Studies on a simple and a ratiometric architecture show the feasibility of pressure sensor which is able to mainly self-compensate nonlinearity and drifts. In the range of ten percent of the offset frequency, the demonstrator nonlinearity is less than one percent and its thermal coefficient is about twenty parts of million by Celsius degree. Numerical simulations show that to optimise ratiometric sensor performances, it is necessary to use identical ways of measuring both signals : the reference one and the measure one. These optimal performances can be obtained by integrating both converters on the same silicon substrate. Experimental results also point out several problems of interference between oscillators through grid-to-channel capacitances. One way to minimise these coupling effects is to add a decoupling capacitance. All the results obtained allow us to conclude that measurement principles and the associated technologies used are adequate to develop a new family of miniature pressure sensor which can be relatively accurate (about 1% of the full scale), cheap and easily connected with numeric communication networks.
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https://tel.archives-ouvertes.fr/tel-00132443
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Submitted on : Wednesday, February 21, 2007 - 2:44:36 PM
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  • HAL Id : tel-00132443, version 1

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Philippe Menini. Faisabilité d'un capteur de pression capacitif miniature sur silicium. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 1998. Français. ⟨tel-00132443⟩

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