Electronic and Photonic Circuits and Devices, p.232, 1999. ,
DOI : 10.1109/9780470544532
« Optical MEMS Components become Key Players in Optical Networks, EurophotonicsMay01, pp.33-35, 2001. ,
Electrostatically driven fiber-optic micromechanical on/off switch and its application to subscriber transmission systems, Journal of Lightwave Technology, vol.8, issue.5, pp.722-727, 1990. ,
DOI : 10.1109/50.54480
Microactuators for aligning optical fibers, Sensors and Actuators, vol.20, issue.1-2, pp.65-73, 1989. ,
DOI : 10.1016/0250-6874(89)87103-3
New type of optical switch with a plasticmolded ferrule, Trans. Insst. Electron. Inf. Commun. Eng, vol.70, issue.8, pp.696-698, 1987. ,
Micromachined 1/spl times/n fiber-optic switch, IEEE Photonics Technology Letters, vol.9, issue.5, p.616, 1997. ,
DOI : 10.1109/68.588150
Micro Joinery : Micromachined Translational Stages for Optomechanical Devices and Systems, Proceddings of the 1997 International Conference on Solid States Sensors and Actuators, 1997. ,
Microphotonics Systems Implementation, p.99, 1999. ,
Micro-magnetic alloy tubes for switching and splicing single-mode fibers, [1991] Proceedings. IEEE Micro Electro Mechanical Systems, pp.86-91, 1991. ,
DOI : 10.1109/MEMSYS.1991.114774
Optomechanical Switches for Fiber-Optic Communications Systems, Proceedings of SPIE International Conference on Optical Fabrication and Testing, pp.383-394, 1995. ,
DOI : 10.1117/12.215618
Compact latching-type single-mode-fiber switches fabricated by a fiber-micromachining technique and their practical applications, IEEE Journal of Selected Topics in Quantum Electronics, vol.5, issue.1, pp.135-181, 1999. ,
DOI : 10.1109/2944.748103
Micromachined 1x2 Optical Fiber Switch, Proceedings of the International Solid-State Sensors and Actuators Conference, TRANSDUCERS '95, pp.311-315, 1996. ,
DOI : 10.1109/SENSOR.1995.717189
All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining, IEEE Journal of Selected Topics in Quantum Electronics, vol.5, issue.1, pp.46-51, 1999. ,
DOI : 10.1109/2944.748104
Optical fibre switches based on full wafer silicon micromachining, Journal of Micromechanics and Microengineering, vol.9, issue.2, pp.151-155, 1999. ,
DOI : 10.1088/0960-1317/9/2/311
Coupled U-shaped cantilever actuators for 1??4 and 2??2 optical fibre switches, Journal of Micromechanics and Microengineering, vol.10, issue.2, pp.260-264, 2000. ,
DOI : 10.1088/0960-1317/10/2/326
Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches, Journal of Micromechanics and Microengineering, vol.11, issue.4, pp.323-328, 2001. ,
DOI : 10.1088/0960-1317/11/4/306
Bulk silicon micromachining for MEMS in optical communication systems, Journal of Micromechanics and Microengineering, vol.12, issue.4, pp.349-360, 2002. ,
DOI : 10.1088/0960-1317/12/4/301
Si Micromechanical Fiber-Optic Switch with shape memory alloy actuator, p.99, 1999. ,
A silicon-based moving-mirror optical switch, Journal of Lightwave Technology, vol.10, issue.8, pp.1078-1085, 1992. ,
DOI : 10.1109/50.156848
Silicon micro optical switching device with an electromagnetically operated cantilever, 10 th International Conference on Solid State Sensors and Actuators, Transducers '99, 1999. ,
DOI : 10.1016/S0924-4247(99)00387-8
Surface-micromachined free-space fibre-optic switches, Electronics Letters, vol.31, issue.17, pp.1481-1482, 1995. ,
DOI : 10.1049/el:19950987
Free-Space Fiber-optic Switches based on MEMS Vertical Torsion Mirrors, IEEE Journal of Ligthwave Technology, vol.17, issue.1, pp.7-13, 1999. ,
Current-controlled bi-directional electrothermally actuated vibromotor, p.99, 1999. ,
Polysilicon Actuated Micromirror for Large Matrix Optical Cross-Connects, MOEMS 99, pp.30-33, 1999. ,
Low voltage electrothermal vibromotor for silicon optical bench applications, Sensors and Actuators A: Physical, vol.83, issue.1-3, pp.1-3, 2000. ,
DOI : 10.1016/S0924-4247(99)00390-8
Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications, Journal of Microelectromechanical Systems, vol.6, issue.3, pp.3-277, 1997. ,
DOI : 10.1109/84.623118
MEMS for applications in fiber optic communication, Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243), pp.26-27, 1998. ,
DOI : 10.1109/LEOS.1998.737715
Micro-opto-mechanical 2??2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation, Journal of Lightwave Technology, vol.17, issue.1, pp.2-6, 1999. ,
DOI : 10.1109/50.737413
Reflective duplexer based on silicon micromechanics for fiber-optic communication, Journal of Lightwave Technology, vol.17, issue.1, pp.115-122, 1999. ,
DOI : 10.1109/50.737430
Applications of SOI based Optical MEMS, IEEE Journal on Selected Topics in quantum Electronics, vol.8, issue.1, pp.148-154, 2002. ,
A rotary electrostatic micromotor 1x8 optical switch, IEEE Journal of Selected Topics in Quantum Electronics, vol.5, issue.26, 1999. ,
DOI : 10.1109/memsys.1998.659739
A rotary electrostatic micromotor 1/spl times/8 optical switch, Proceedings of the Eleventh Annual Workshop on International Micro Electro Mechanical Systems, pp.116-120, 1998. ,
DOI : 10.1109/memsys.1998.659739
Fault-tolerant insensitive photonic delay architectures using twodimensional digital micromirror devices, Optics Communications, vol.160, pp.4-6, 1999. ,
DOI : 10.1016/s0030-4018(98)00639-7
3D micro-inspection goes DMD, Optics and Lasers in Engineering, vol.36, issue.2, pp.155-167, 2001. ,
DOI : 10.1016/S0143-8166(01)00037-9
Dynamic optical filtering in DWDM systems using the DMD, Solid-State Electronics, vol.46, issue.10, pp.1583-1585, 2002. ,
DOI : 10.1016/S0038-1101(02)00109-0
<title>Integration of deformable mirror devices with optical fibers and waveguides</title>, Integrated Optics and Microstructures, pp.34-39, 1992. ,
DOI : 10.1117/12.141225
Electrostatic micro torsion mirrors for an optical switch matrix, Journal of Microelectromechanical Systems, vol.5, issue.4, pp.231-237, 1996. ,
DOI : 10.1109/84.546402
Electromagnetic torsion mirrors for self-aligned fiber-optic crossconnectors by silicon micromachining, IEEE Journal of Selected Topics in Quantum Electronics, vol.5, issue.1, pp.10-17, 1999. ,
DOI : 10.1109/2944.748099
Low Voltage MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators, Solid-State Sensor, Actuator and Microsystems Workshop, 2002. ,
DOI : 10.1109/jmems.2004.825314
Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS, Journal of Microelectromechanical Systems, vol.6, issue.1, pp.10-17, 1997. ,
DOI : 10.1109/84.557525
Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects, IEEE Photonics Technology Letters, vol.10, issue.4, pp.525-527, 1998. ,
DOI : 10.1109/68.662582
Micromachined free-space matrix switches with submillisecond switching time for largescale optical cross-connect, p.98, 1998. ,
DOI : 10.1109/ofc.1998.657283
Free-space Micromachined Optocal Switches for Optical Networking, IEEE Journal of Selected Topics in Quantum Electronics, vol.5, issue.4, 1999. ,
DOI : 10.1109/2944.748098
Automated Optical Main Distributing Frame System, OFC/IOOC Technical Digest, 4TuO5, pp.74-75, 1993. ,
DOI : 10.1364/ofc.1993.tuo5
Bistable optical switching using electrochemically generated bubbles, Optics Letters, vol.15, issue.24, pp.1470-1472, 1990. ,
DOI : 10.1364/OL.15.001470
Electrocapillarity optical switch, IEICE Trans. Commun, issue.2, pp.197-203, 1994. ,
Micromechanical optical switches based on thermocapillary integrated in waveguide substrate, Journal of Lightwave Technology, vol.17, issue.1, p.14, 1999. ,
DOI : 10.1109/50.737415
Integrated optics combined with micromechanics on silicon, Sensors and Actuators A: Physical, vol.29, issue.3, pp.212-223, 1991. ,
DOI : 10.1016/0924-4247(91)80018-K
Micromechanical cantilever resonators with integrated optical interrogation, Sensors and Actuators A: Physical, vol.44, issue.1, pp.71-75, 1994. ,
DOI : 10.1016/0924-4247(94)00776-4
Micromechanical optical switching with voltage control using SOI movable integrated optical waveguides, IEEE Photonics Technology Letters, vol.7, issue.11, pp.1297-1299, 1995. ,
DOI : 10.1109/68.473477
Micro-opto mechanical switch integrated on silicon, Electronics Letters, vol.31, issue.23, 1995. ,
DOI : 10.1049/el:19951354
Micro-opto mechanical switch integrated on silicon, Digest IEEE/LEOS 1996 Summer Tropical Meetings, pp.71-72, 1996. ,
DOI : 10.1049/el:19951354
Optical MEMS devices based on moving waveguides, IEEE Journal of Selected Topics in Quantum Electronics, vol.8, issue.1, pp.1-155, 2002. ,
DOI : 10.1109/2944.991411
Magnetically Driven Micromechanical Optical Switch, Proceedings of CLEO'97, p.267, 1997. ,
Mechanical Optical Switch Of A Plane Type With Electromagnetic Actuators, Technical Digest CLEO/Pacific Rim '97 Pacific Rim Conference on Lasers and Electro-Optics, p.201, 1997. ,
DOI : 10.1109/CLEOPR.1997.614528
« Micro-miroir rotatif à actionnement électrostatique réalisé en technologie silicium : de la conception à la caractérisation », thèse soutenue le 10 Novembre, 2000. ,
MEMS Design, Realisation and Characterisation in an Educational Context, IEE Engineering and Education Science, vol.11, issue.6, 2001. ,
CAD for Integrated MEMS Design, Proceedings of SPIE 2000, pp.3-14, 2000. ,
DOI : 10.1117/12.382270
An environment for Design and Modeling of Electromechanical Micro-Systems, Journal of Modeling and Simulation of microsystems, vol.1, issue.1, pp.65-76, 1999. ,
Simulation and design of microsystems: a 10-year perspective, Sensors and Actuators A: Physical, vol.67, issue.1-3, pp.1-7, 1998. ,
DOI : 10.1016/S0924-4247(97)01754-8
Integrated CAD tools for top-down design of MEMS/MOEMS systems, Design, Test, and Microfabrication of MEMS and MOEMS, pp.171-178, 1999. ,
DOI : 10.1117/12.341200
3D coupled electro-mechanics for MEMS: applications of CoSolve-EM, Proceedings IEEE Micro Electro Mechanical Systems. 1995, pp.122-127, 1995. ,
DOI : 10.1109/MEMSYS.1995.472542
Automatic Reduced-Order Modeling in MEMCAD using Modal Basis Functions, Proceedings of Transducers'01, 2001. ,
DOI : 10.1007/978-3-642-59497-7_62
Roark's Formulas for Stress and Strains, 1989. ,
Reliability Assurance Requirements for Passive Optical Components », Generic requirements, GR-1221-CORE, 1999. ,
Silicon on insulator material technology, Silicon on Insulator material technology, pp.1201-1202, 1995. ,
DOI : 10.1049/el:19950805
Delapierre, « SOI Simox from bulk to surface micromachining, a new age for silicon sensor and actuators, Sensors and Actuators, pp.46-47, 1995. ,
Industrial MEMS on SOI, SPIE Proceedings in MOEMS and Miniaturized Systems, pp.245-249, 2000. ,
DOI : 10.1088/0960-1317/10/2/323
Electronique de puissance basse tension, haut rendement pour les applications portables, Proceedings of Journées du Club EEA, pp.97-106, 2002. ,
The Miniaturization Technologies : Past, Present and Future, IEEE Transactions on Industrial Electronics, vol.42, issue.5, p.423430, 1995. ,
Micro-sources d'énergie », Etats-Unis Microélectronique, pp.6-14, 2002. ,
Nonlinear capacitors integration, 2000 International Semiconductor Conference. 23rd Edition. CAS 2000 Proceedings (Cat. No.00TH8486), pp.303-306, 2000. ,
DOI : 10.1109/SMICND.2000.890240
« Alimentations à découpage, convertisseurs à résonance : principe, composants et modélisation, Masson, 2 ème édition, 1994. ,
Planar magnetic component technology-a review, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol.15, issue.5, pp.884-892, 1992. ,
DOI : 10.1109/33.180055
Optimising the performance of planar transformers, Proceedings of IEEE Applied Power Electronics Conference, pp.415-421, 1996. ,
low Temperature fabrication and Characterisation of integrated packaging compatible, ferrite-core magnetic devices, Proceedings of IEEE Applied Power Electronics Conference, pp.361-367, 1996. ,
Transformer Rectifier, Brevet américain numéro, vol.4, pp.635-179, 1987. ,
Design of high frequency hybrid power transformer, Proceedings of IEEE International Workshop on Power Packaging (IWIPP), pp.39-43, 1998. ,
Design of high-frequency hybrid power transformer, APEC '88 Third Annual IEEE Applied Power Electronics Conference and Exposition, pp.319-326, 1988. ,
DOI : 10.1109/APEC.1988.10579
Low profile and low output voltage DC/DC converters for on-board power distribution using planar magnetics, IAS '97. Conference Record of the 1997 IEEE Industry Applications Conference Thirty-Second IAS Annual Meeting, pp.1153-1158, 1997. ,
DOI : 10.1109/IAS.1997.629006
Low profile, high frequency power supplies using thick film planar transformers, Proceedings of the 9 th Eur. Hybrid Microelectronics Conference, pp.93-97, 1996. ,
Development of screen-printed polymer thick film planner transformer using Mn???Zn ferrite as core material, Microelectronics Journal, vol.32, issue.2, pp.113-116, 2001. ,
DOI : 10.1016/S0026-2692(00)00122-1
Magnetic micro-actuator, [1991] Proceedings. IEEE Micro Electro Mechanical Systems, pp.120-124, 1991. ,
DOI : 10.1109/MEMSYS.1991.114781
the case for magnetically driven micro-actuators, Sensors and Actuators, issue.33, pp.207-220, 1992. ,
DOI : 10.1016/0924-4247(92)80168-3
« surface micro-machined magnetic actuators, Proceedings of the IEEE Microelectromechanical Systems Workshop, pp.57-62, 1994. ,
A miniature opto-electric transformer, [1991] Proceedings. IEEE Micro Electro Mechanical Systems, pp.227-232, 1991. ,
DOI : 10.1109/MEMSYS.1991.114801
A new planar microtransformer for use in micro-switching converters, IEEE Transactions on Magnetics, vol.28, issue.4, pp.1969-1973, 1992. ,
DOI : 10.1109/20.144755
A fully integrated micro-machined toroidal inductor with a nickel-iron magnetic core (switched DC/DC converter application), Proceedings of 6 th International conference on Solid State Sensors and Actuators, pp.70-73, 1993. ,
Magnetic Thin-Film Inductor for rf Integrated Circuits, Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials, pp.215-216, 2000. ,
DOI : 10.7567/SSDM.1999.E-14-3
Fabrication method for out-of-plane, micro-coil by surface micromachining, Sensors and Actuators A: Physical, vol.97, issue.98, pp.1-7, 2002. ,
DOI : 10.1016/S0924-4247(02)00007-9
Fabrication, RF characteristics and mechanical stability of self-assembled 3D microwave inductors, Sensors and Actuators A: Physical, vol.97, issue.98, pp.97-98, 2002. ,
DOI : 10.1016/S0924-4247(01)00851-2
Status and trends of silicon RF technology, Microelectronics Reliability, vol.41, issue.1, pp.13-19, 2001. ,
DOI : 10.1016/S0026-2714(00)00198-0
Batch-fabricated thin-film magnetic recording heads, IEEE Transactions on Magnetics, vol.6, issue.3, pp.579-599, 1970. ,
DOI : 10.1109/TMAG.1970.1066881
Fabrication of multi-turn thin film head, IEEE Transactions on Magnetics, vol.16, issue.5, pp.779-881, 1980. ,
DOI : 10.1109/TMAG.1980.1060762
Fabrication of a multitrack, thin???film head, Journal of Applied Physics, vol.53, issue.3, pp.2611-2613, 1982. ,
DOI : 10.1063/1.330914
Magnetic thin film inductors for integrated circuit applications, IEEE Transactions on Magnetics, vol.15, issue.6, pp.1803-1805, 1979. ,
DOI : 10.1109/TMAG.1979.1060499
Micromachined solenoids for highly sensitive magnetic sensors, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, pp.1077-1080, 1991. ,
DOI : 10.1109/SENSOR.1991.149084
Micromachined planar inductors on silicon wafers for MEMS applications, IEEE Transactions on Industrial Electronics, vol.45, issue.6, pp.866-876, 1998. ,
DOI : 10.1109/41.735330
Micro-transformer devices using thinfilm electroplated deposition, Proceedings of Power Electronics Specialists Conference 98, pp.1511-1515, 1998. ,
DOI : 10.1109/pesc.1998.703269
Modeling of Two-Dimensional Spiral Inductors, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol.3, issue.4, pp.535-541, 1980. ,
DOI : 10.1109/TCHMT.1980.1135651
Planar inductors on magnetic substrates, IEEE Transactions on Magnetics, vol.24, issue.6, pp.3213-3216, 1988. ,
DOI : 10.1109/20.92379
A novel miniature planar inductor, IEEE Transactions on Magnetics, vol.23, issue.5, pp.3759-3761, 1987. ,
DOI : 10.1109/TMAG.1987.1065746
Simple Accurate Expressions for Planar Spiral Inductances, IEEE Journal of Solid-State Circuits, vol.34, issue.10, pp.1419-1424, 1999. ,
Physical modeling of spiral inductors on silicon, IEEE Transactions on Electron Devices, vol.47, issue.3, pp.560-567, 2000. ,
DOI : 10.1109/16.824729
A macro model of silicon inductor, Solid-State Electronics, vol.46, pp.759-767, 2002. ,
Tools and Techniques for modelling Spiral Inductors on Silicon, Microwave Engineering, pp.25-32, 2002. ,
Simple Inductance Formulas for Radio Coils, Proceedings of IRE, pp.1398-1400, 1928. ,
DOI : 10.1109/JRPROC.1928.221309
Inductance Calculations, 1946. ,
Perret, « Validation d'outils de simulation d'éléments inductifs pour convertisseurs intégrés ,
Theoretical and Experimental Broadband Characterisation of Multiturn Square Spiral Inductors in Sandwich Type GaAs MMICs, 15th European Microwave Conference, 1985, pp.946-951, 1985. ,
DOI : 10.1109/EUMA.1985.333600
Determination of coupling capacitance of underpasses, air bridges and crossings in MICs and MMICs, Electronics Letters, vol.23, issue.7, pp.344-346, 1987. ,
DOI : 10.1049/el:19870254
Properties of Microstrip Line on Si-SiO/sub 2/ System, MTT-19, pp.344-346, 1987. ,
DOI : 10.1109/TMTT.1971.1127658
Microwave properties of non-linear MIS and Schottky-barrier microstrip, IEEE Transactions on Electron devices, pp.22-945, 1975. ,
DOI : 10.1109/t-ed.1975.18246
A novel lossy and dispersive interconnect model for integrated circuit simulation, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol.13, issue.2, pp.275-280, 1990. ,
DOI : 10.1109/33.56157
Formulas for the Skin Effect, Proceedings of IRE, pp.412-424, 1942. ,
DOI : 10.1109/JRPROC.1942.232015
Case Impedance Determination for Power electronic Components, IEEE ICEAA'95, 1995. ,
Modelling of a low inductive connection : the planar busbar structure, IEEE IAS'94, pp.1246-1250, 1994. ,
Exact inductance equations for rectangular conductors with applications to more complicated geometries, Journal of Research of the National Bureau of Standards, Section C: Engineering and Instrumentation, vol.69, issue.2, pp.2-127, 1965. ,
DOI : 10.6028/jres.069C.016
« Inductance Calculations in a complex integrated circuit environment, IBM Journal of Research and Development, pp.470-481, 1972. ,
« Design of Power Converters for New Low Power Applications, 10 th International Power Electronics and Motion Control Conference, p.4 ,
Les piles ?? combustibles : une technologie propre, Revue de l'Electricit?? et de l'Electronique, vol.-, issue.11, pp.84-88, 1999. ,
DOI : 10.3845/ree.1999.123
Catalytic Combustion in Microchannel for MEMS Power Generation, Proceedings of 3 rd Asia-Pacific Conference on Combustion, pp.24-27, 2001. ,
« Les batteries pour le prochain millénaire, pp.55-56, 1999. ,
Les batteries lithium-ion pour ??quipements ??lectroniques portables, Revue de l'Electricit?? et de l'Electronique, vol.-, issue.08, pp.64-70, 1999. ,
DOI : 10.3845/ree.1999.090
Conception et réalisation d'un micro-moteur planaire à aimant permanent, 2001. ,