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ETUDE ET OPTIMISATION D'UNE FILIERE
TECHNOLOGIQUE FLEXIBLE ADAPTEE AU MODE
D'INTEGRATION FONCTIONNELLE

Abstract : This work deals with the development of a flexible technological process used for the
realisation of new integrated power functions based on functional integration concept. Functionalities
and electricals characteristics depend not only on the surface topology and connections but also in the
intrinsic characteristics of the structures as well as the type and the physical parameters of the layers.
In this context, two devices with distincts functionalities differ on the technological process (anneal
temperature, implantation dose and energy...) and the layout design. Unlike the set processes being
not suitable, we have developed a technological process, allowing a "self-alignment" with respect to a
polysilicon gate, composed of optimised and compatible basic and specific technological steps. We
have optimised the different technological steps, and particularly the P-wells and preformed channels
with MOS structures (N and P, enhancement and depletion). Electrical characteristics of these devices
permit the validation of these optimisation steps. The whole specific steps have then been optimised
with the preservation of the technological compatibility. The last part has been devoted to the
validation of this process with the realisation of test-structures based on functional integration. The
different steps of conception, technological manufacturing and electrical characterisation are detailed
in order to show the interest of this new technological process.
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Submitted on : Friday, February 16, 2007 - 3:28:58 PM
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  • HAL Id : tel-00131494, version 1

Citation

Éric Imbernon. ETUDE ET OPTIMISATION D'UNE FILIERE
TECHNOLOGIQUE FLEXIBLE ADAPTEE AU MODE
D'INTEGRATION FONCTIONNELLE. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2002. Français. ⟨tel-00131494⟩

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