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Etude des non-linéarités de permittivité de diélectriques utilisés en microélectronique. Application aux capacités MIM.

Abstract : In order to fabricate ICs with more and more functions it is necessary to develop new
electronic devices. METAL-INSULATOR-METAL (MIM) capacitors integrated in the ICs
interconnections are some of these new devices. ICs down-scaling imposes to reduce MIM
capacitors dimensions and to increase surfacic capacitance. For that using dielectrics with
higher dielectric constant than SiO2 is necessary. Metallic oxides such as Al2O3, Ta2O5
and HfO2 are good candidates as dielectrics of MIM capacitors. Nevertheless with these
new dielectrics some new problems such as leakage currents, dielectric relaxation or voltage
non-linearity appear. For some specific applications, voltage non-linearity must be
controlled and limited. For that, a precise study of voltage non-linearity properties must
be performed.
After a general overview of the main physical properties of dielectrics, we present an
ab initio study of alpha-Al2O3 from which the dielectric tensor is extracted between 0 and
1E16 Hz. Then we present an exhaustive study of Al2O3 MIM capacitors (fabrication,
physical and electrical characterizations). We then expose two physical models to explain
both electric field and temperature effects on Al2O3 dielectric properties. The last part of
this PhD dissertation aims at comparing Al2O3 MIM capacitors electrical characteristics
with other MIM capacitors using Ta2O5, Si3N4 and SiO2 dielectrics. The end of this last
part concerns MIM capacitors with stacked dielectrics (Ta2O5/SiO2 and Al2O3/SiO2).
Thus this research provides a general overview of dielectric properties of dielectrics used
in microelectronics with both a theoretical and an experimental point of view.
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Contributor : Stéphane Bécu <>
Submitted on : Thursday, February 15, 2007 - 1:30:42 PM
Last modification on : Tuesday, October 20, 2020 - 3:10:29 AM
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  • HAL Id : tel-00131164, version 1



Stéphane Bécu. Etude des non-linéarités de permittivité de diélectriques utilisés en microélectronique. Application aux capacités MIM.. Micro et nanotechnologies/Microélectronique. Université de Provence - Aix-Marseille I, 2006. Français. ⟨tel-00131164⟩



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