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Etude théorique et expérimentale des techniques d'assemblage et de mise en boitier pour l'intégration de microsystèmes radio-fréquences

Abstract : Radio-Frequency Micro-Electro-Mechanical Systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. RF Mems switches are characterized by their high isolation, low insertion loss, large bandwith and by their unparalleled signal linearity. Despite these benefits, RF Mems switches are not yet seen in commercial products because of reliability issues, limits in signal power handling and question in packaging. In this context, we put in evidence, a near hermetic packaging based on a micro-machined cap in Foturan sealed onto a photopatternable polymer Benzo-Cyclo-Butene (BCB) as a solution adapted to micro-switches RF. To answer the stakes in conception, we identified needs in multiphysics modelling able to generate behavioural macro-models. Finally, a demonstrator was characterised in terms of return and insertion losses measurements, which assures insignificant impact of the package on the RF losses.
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https://tel.archives-ouvertes.fr/tel-00129546
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Submitted on : Thursday, February 8, 2007 - 10:22:51 AM
Last modification on : Friday, January 10, 2020 - 9:08:08 PM
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  • HAL Id : tel-00129546, version 1

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David Peyrou. Etude théorique et expérimentale des techniques d'assemblage et de mise en boitier pour l'intégration de microsystèmes radio-fréquences. Mécanique [physics.med-ph]. Université Paul Sabatier - Toulouse III, 2006. Français. ⟨tel-00129546⟩

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