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Habilitation à diriger des recherches

Approches de l'intégration photonique dans les microsystèmes

Abstract : Research work presented here started in 1992 in the group "Photonique" of LAAS-CNRS. It is part of a larger work done in the team driven by F. Lozes-Dupuy, Director of Research. After a detailed study of single mode surface emitting Distributed Bragg Reflector laser diodes, we looked towards control and optimisation of their performances by adding an hybridized extended external cavity. From there, our research domain got to the one of microsystems and their associated technologies. Our main goal was the realization of a stabilized frequency laser micro-source. This "microsystems" orientation was then supported through collaborative work on optical microsystems, and more precisely on the critical step of photonic integration in microsystems. At first, our work concentrated on developing new concepts of photonic integration on silicon benefiting from CMOS standard technology. Our case study was a displacement optical sensor and we showed that microelectronics, optoelectronics and integrated photonics could be associated on a silicon wafer to propose smart optical functions based on CMOS compatible technology. A second direction of integration, based on photonic crystals properties, explores new designs of laser diodes compatibles with dense planar photonic integration.
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Habilitation à diriger des recherches
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Contributor : Emilie Marchand <>
Submitted on : Wednesday, February 7, 2007 - 3:04:09 PM
Last modification on : Monday, October 19, 2020 - 11:11:28 AM
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  • HAL Id : tel-00129453, version 1


Philippe Arguel. Approches de l'intégration photonique dans les microsystèmes. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2005. ⟨tel-00129453⟩



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