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Etude et caractérisation des films minces lors du procédé de lithographie par nanoimpression

Abstract : Whatever the scientific field, electronic, mechanic, optic, magnetism or biology, the device dimensions decrease regularly. The acceleration of this miniaturization challenges lithographers since lithography is a key step in the structuring of a material. This is nowadays achieved thanks to optical lithography tools working with deep ultraviolet illumination. Thus, it enables manufacturers to reach the goals fixed by the microelectronic industry in term of resolution enhancement and yield improvement. In this perspective, e-beam lithography tools are also widely used but are not suited to mass production since exposure times are extremely long, yet resolution is excellent. The consequence of such an accelerating race to resolution enhancement is an increase of lithography tools prices and it often prevents research labs that are not involved in microelectronic concerns to invest in new lithography tools. It becomes then essential to discover and develop for the future generations new lithographical solutions which could be implemented as a resolving and less time and money consuming technique. In this way the new technique of nanoimprint lithography has appeared and is now considered like a NGL (Next Generation Lithography).
The purpose of this PhD work is to study and develop the technique of nanoimprint lithography. This work is mainly focused on the study and characterization of thin polymeric films during the process of nanoimprint. At the outcome of this work, we have been interested in characterizing the thermal and physicochemical properties of the films coated on the substrate, looking at the residual thickness uniformity, the imprint mechanisms, the mold deformation and its consequences and finally the polymer film instabilities during the process.
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Contributor : Frederic Lazzarino <>
Submitted on : Friday, February 2, 2007 - 1:01:28 PM
Last modification on : Tuesday, February 16, 2021 - 3:33:32 AM
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  • HAL Id : tel-00128711, version 1



Frederic Lazzarino. Etude et caractérisation des films minces lors du procédé de lithographie par nanoimpression. Physique [physics]. Université Joseph-Fourier - Grenoble I, 2005. Français. ⟨tel-00128711⟩



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