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Technologies microsystèmes avancées pour le fonctionnement de dispositifs en milieu liquide et les applications nanométriques

Abstract : To handle cells requires the use of adapted tools. These tools have to establish the link between the microscopic and macroscopic world. The tools naturally adapted to this task are MEMS, they are micromechanical systems having a mobile part making it possible to put them in motion or to deform them. They are ideal tools to seize objects, to probe their surface and to analyze them. MEMS are already used in Atomic Force Microscopy (AFM) for vacuum or air application. This thesis will make it possible to highlight the problems which is the use of this microsystem probes in liquid environment. Can one use the same principles of actuation in liquid medium as vacuum or as air? Which will be their performances and how to improve them? We will try to answer these questions by studying a simple device: the cantilever beam.
Firstly, we will interest in the most often use principle of actuation in microsystems: the electrostatic actuation. The use of this actuation will enable us to control the whole displacement of the mobile part and thus to consider the fabrication of devices allowing to seize micrometric objects in their physiological medium.
This study then will be devoted to the dynamic operation of cantilever with an integrated piezoelectric actuation in liquid environment in AFM. To reach a nanometric lateral resolution, a carbon nanotube will be integrated at the apex of the tip located at the end of the lever.
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https://tel.archives-ouvertes.fr/tel-00128689
Contributor : Anne-Sophie Rollier <>
Submitted on : Monday, February 5, 2007 - 8:48:46 AM
Last modification on : Wednesday, April 7, 2021 - 10:32:03 AM
Long-term archiving on: : Tuesday, September 21, 2010 - 12:34:44 PM

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  • HAL Id : tel-00128689, version 2

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Anne-Sophie Rollier. Technologies microsystèmes avancées pour le fonctionnement de dispositifs en milieu liquide et les applications nanométriques. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2006. Français. ⟨tel-00128689v2⟩

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