C. Pennarun, D. Rossi, D. Estève, and . Lagrange, CANEUS2006 Conference : micro and nano technology for aerospace applications, 2006.

J. Pennarun and . Geet, Journées Annuelle de l'Ecole Doctorale Génie Electrique, Electronique, Télécommunication), pp.157-159, 2006.

C. Rossi, D. Estève, and C. Mingués, Pyrotechnic actuator: a new generation of Si integrated actuator , Sensors and Actuators A: Physical, pp.211-215, 1999.

A. Berthold and C. Rossi, Générateur thermoélectrique basé sur la combustion d'un propergol solide, Journées Nationales du réseau de Recherche en Micro et Nano Technologies, pp.3-4, 2003.

C. Rossi, D. Estève, N. Fabre, T. Do-conto, V. Conédéra et al., A new MEMS based microthrusters for microspacecraft applications, Proceedings of the

C. Rossi, D. Lagrange, B. Larangot, and A. , Final characterizations of MEMS-based pyrotechnical microthrusters, Sensors and Actuators A: Physical, vol.121, issue.2, pp.508-514, 2005.
DOI : 10.1016/j.sna.2005.03.017

G. A. Ardila-rodríguez, C. Rossi, D. Estève, V. Conedera, and H. Granier, Développement d'une micro-source de pression pour des applications microfluidiques, p.9

H. H. Dibiaso, B. A. English, and M. G. Allen, Solid-phase conductive fuels for chemical microactuators, Sensors and Actuators A: Physical, pp.260-266, 2004.

A. Tappan, Patterning of regular porosity in PETN microenergetic material thin film, th International Conference of the ICT, 2005.

K. L. Zhang, S. K. Chou, and S. S. Ang, Development of a solid propellant microthruster with chamber and nozzle etched on a wafer surface, Journal of Micromechanics and Microengineering, vol.14, issue.6, pp.785-792, 2004.
DOI : 10.1088/0960-1317/14/6/004

M. Esashi, Based Solid Propellant Rocket Array Thruster with Electrical Feedthroughs, Transactions of The Japan Society For Aeronautical and Space Sciences, vol.46, pp.47-51, 2003.

P. Q. Pham, D. Briand, C. Rossi, and N. F. De-rooij, Downscaling of solid propellant pyrotechnical, 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'2003), pp.8-121423, 2003.

D. Combes and D. King, Electronic safety and arming unit, 2004.

C. Rossi, La micropyrotechnie sur silicium et l'intégration microsystèmes, mémoire Habilitation à Diriger les Recherches, 2006.

C. Rossi, D. Estève, and C. Mingués, Pyrotechnic actuator: a new generation of Si integrated actuator , Sensors and Actuators A: Physical, pp.211-215, 1999.

P. Puig-vidal, E. Miribel, E. Montané, J. López, and . Samitier, Solid propellant micro-rockets ? towards a new Type of power MEMS, Proceedings of the AIAA Nanotech 02 conference, 2002.

B. S. Tanaka, R. Hosokawa, S. Tokudome, K. Hori, H. Saito et al., MEMS-Based Solid Propellant Rocket Array Thruster with Electrical Feedthroughs., TRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES, vol.46, issue.151, pp.47-51, 2003.
DOI : 10.2322/tjsass.46.47

G. A. Ardila-rodríguez, C. Rossi, D. Estève, V. Conedera, and H. Granier, Développement d'une micro-source de pression pour des applications microfluidiques, p.9

C. Rossi and A. Berthold, Générateur thermoélectrique basé sur la combustion d'un propergol solide, Journées Nationales du Réseau de Recherche en Micro et Nano Technologies, pp.3-4, 2003.

A. Carlos and F. Pello, MicroPower Generation Using Combustion: Issues and Approaches, Topical Review at the 29 th International Symposium on Combustion, 2002.

B. A. English, Microcombustors Based on Controllable Solid Fuel Elements, Microelectromechanical Systems, 2003.
DOI : 10.1115/IMECE2003-42823

G. A. Ardila-rodríguez, C. Rossi, and D. , Esteve, Design, Fabrication and Operation of a Wireless and Miniature Ignition System, Sensors and actuators, 2005.

C. Rossi, G. A. Ardila-rodríguez, and D. Esteve, Conception d'une "amorce intelligente" par couplage magnétique HF et compatible douille 9 mm. Réalisation d'une maquette de validation de concept, 2003.

R. W. Bickes and A. C. Schwarz, Fuzing systems-safety design requirement, STANAG (standardization agreement Semi-conductor bridge (SCB) igniter

D. A. Benson, M. E. Larsen, A. M. Renlund, W. M. Trott, and R. W. , Bickes, semiconductor bridge : a plasma generator for the ignition of explosives, J. Appl. Phys, vol.62, issue.5, pp.1-1987

J. R. Stroud, A new kind of detonator : the slapper

D. A. Benson, M. E. Larsen, A. M. Renlund, W. M. Trott, and R. W. Bickes-jr, Semiconductor bridge: A plasma generator for the ignition of explosives, Journal of Applied Physics, vol.62, issue.5, pp.1-1987
DOI : 10.1063/1.339586

J. M. Power, Electrically Detonated Explosive Device

C. A. Bolle, Armament fuse arrangement

J. Baricos and P. Thebault, Dispositif de sécurité pour organe sensible, notamment pour inflammateur à action pyrotechnique

J. Duguet and J. Vedel, Electropyrotechnic initiation system protected against electrostatic discharge

J. , K. Hartman, and C. B. Mccampbell, Zener diode for protection of integrated circuit explosive bridge

D. Combes and D. King, Electronic safety and arming unit patent number WO, pp.79290-79291, 2004.

C. Kaiser, F. Bourrière, D. Estève, C. Rossi, and P. Pennnarun, Système embarqué hautement sécurisé pour la mise à feu d'explosifs

C. Rossi, La micropyrotechnie sur silicium et l'intégration microsystèmes, mémoire Habilitation à Diriger les Recherches, 2006.

C. Rossi, P. T. Boyer, and D. Estève, Realization and performance of thin SiO2/SiNx membrane for microheater applications, Sensors and Actuators A: Physical, vol.64, issue.3, pp.241-245, 1998.
DOI : 10.1016/S0924-4247(97)01627-0

P. Pennarun, Modélisation de micro-initiateurs pyrotechniques, comparaison de plusieurs technologies, 2003.

A. Tappan, Patterning of regular porosity in PETN microenergetic material thin film, th International Conference of the ICT, 2005.

D. S. Stewart, Miniaturization of explosive technology and microdetonics, XXI ICTAM, 15-21, 2004.

N. E. Mcgruer, G. G. Adams, L. Chen, Z. J. Guo, and Y. , Du, Mechanical, thermal, and material influences on ohmic-contact-type MEMS switch operation, Proceedings of MEMS 2006, pp.22-26, 2006.

L. L. Mercado, S. Kuo, T. Lee, and L. Liu, Mechanics-Based Solutions to RF MEMS Switch Stiction Problem, IEEE Transactions on Components and Packaging Technologies, vol.27, issue.3, pp.560-567, 2004.
DOI : 10.1109/TCAPT.2004.831813

S. Majumber, J. Lampen, R. Morrison, and J. Maciel, MEMS switches, IEEE Instrumentation & Measurement Magazine, vol.6, issue.1, pp.12-15, 2003.
DOI : 10.1109/MIM.2003.1184267

M. Gretillat, F. Gretillat, and N. F. De-rooij, Micromechanical relay with electrostatic actuation and metallic contacts, Journal of Micromechanics and Microengineering, vol.9, issue.4, pp.324-331, 1999.
DOI : 10.1088/0960-1317/9/4/307

J. Oberhammer and G. Stemme, Design and Fabrication Aspects of an S-Shaped Film Actuator Based DC to RF MEMS Switch, Journal of Microelectromechanical Systems, vol.13, issue.3, pp.421-427, 2004.
DOI : 10.1109/JMEMS.2004.828723

I. Almeida, R. Ramadoss, R. Jackson, K. Ishikawa, and Q. Yu, Study of electrical contact resistance of multi-contact MEMS relay fabricated using the metal MUMPS process, J

. Sugiyama, Development of a large-force low-loss metal-contact RF MEMS switch, Sensors and Actuators A, 2006.

D. Girbau, A. Lazaro, and L. , RF MEMS Switches Based on the Buckle-beam Thermal Actuator, 33rd European Microwave Conference, 2003, pp.651-654, 2003.
DOI : 10.1109/EUMA.2003.341037

Y. Wang, Z. Li, D. T. Mccormick, and N. C. Tien, A micromachined RF microrelay with electrothermal actuation, Sensors and Actuators A: Physical, vol.103, issue.1-2, pp.231-236, 2003.
DOI : 10.1016/S0924-4247(02)00337-0

J. Qiu, J. H. Lang, A. H. Slocum, and A. C. Weber, A bulk-micromachined bistable relay with U-shaped thermal actuators, Journal of MEMS, vol.14, issue.5, pp.1099-1109, 2005.

L. Que, K. Udeshi, J. Park, and Y. B. Gianchandani, A bi-stable electrothermal RF switch for high power applications, pp.797-800

I. Cho, T. Song, S. Baek, and E. Yoon, A low voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold, 18th IEEE International Conference on MEMS 2005, pp.32-35, 2005.

Y. Zhang, G. Ding, X. Shun, X. Li, and B. Cai, Design and analysis of the micromechanical structure for an electromagnetic bistable RF MEMS switch, Microwave Conference Proceedings, 2005. APMC 2005. Asia-pacific Conference Proceedings, pp.4-7, 2005.

J. D. Williams, R. Yang, and W. Wang, Numerical simulation and test of a UV-LIGA-fabricated electromagnetic micro-relay for power applications, Sensors and Actuators A: Physical, vol.120, issue.1, pp.154-162, 2005.
DOI : 10.1016/j.sna.2004.10.034

H. Lee, J. Park, and J. Bu, Piezo electrically actuated RF MEMS dc contact switches with low voltage operation, IEEE Microwave and Wireless Components Letters, vol.15, issue.4, pp.202-204, 2005.

D. S. Lee, S. Jung, N. Cho, W. Kim, W. Seong et al., PZT Actuated Seesaw SPDT RF MEMS Switch, Journal of Physics: Conference Series, vol.34, pp.304-309, 2006.
DOI : 10.1088/1742-6596/34/1/050

J. Simon, S. Saffer, and C. Kim, A liquid-filled microrelay with a moving mercury microdrop, Journal of Microelectromechanical Systems, vol.6, issue.3, pp.208-216, 1997.
DOI : 10.1109/84.623109

Y. Kondoh, T. Takenaka, T. Hidaka, G. Tejima, Y. Kaneko et al., High-reliability, high-performance RF micromachined switch using liquid metal, Journal of Microelectromechanical Systems, vol.14, issue.2, pp.214-220, 2005.
DOI : 10.1109/JMEMS.2004.839604

L. Latorre, J. Kim, J. Lee, P. De-guzman, H. J. Lee et al., Electrostatic actuation of microscale liquid-metal droplets, Journal of Microelectromechanical Systems, vol.11, issue.4, pp.302-306, 2002.
DOI : 10.1109/JMEMS.2002.800934
URL : https://hal.archives-ouvertes.fr/lirmm-00268544

C. Chen and D. , Peroulis, Liquid metal droplets dor RF MEMS switches, Silicon Monolithic Integrated Circuits in RF Systems Digest of Papers, Topical Meeting on, pp.28-31, 2006.

C. Rossi and D. Estève, Micropyrotechnics, a new technology for making energetic microsystems: review and prospective, Sensors and Actuators A: Physical, vol.120, issue.2, pp.297-310, 2005.
DOI : 10.1016/j.sna.2005.01.025
URL : https://hal.archives-ouvertes.fr/hal-00150261

M. Scaefer, R. A. Fournelle, and J. Liang, Theory for intermetallic phase growth between cu and liquid Sn-Pb solder based on grain boundary diffusion control, Journal of Electronic Materials, vol.11, issue.23, pp.1167-1176, 1998.
DOI : 10.1007/s11664-998-0066-7

K. N. Tu and K. Zeng, Tin-Lead (SnPb) solder reaction in flip chip technology, Materials science and engineering, pp.1-58, 2001.
DOI : 10.1016/s0927-796x(01)00029-8

B. Larangot, Conception, fabrication et caractérisation de matrices de micropropulseurs pyrotechniques sur silicium, 2004.

I. Simon, N. Bârsan, M. Bauer, and . Weimar, Micromachined metal oxide gas sensors: opportunities to improve sensor performance, Sensors and Actuators B: Chemical, vol.73, issue.1, pp.1-26, 2000.
DOI : 10.1016/S0925-4005(00)00639-0

J. R. Lloyd, Electromigration for Designers: An Introduction for the Non-Specialist, 20421.

P. Pennarun, Modélisation de micro-initiateurs pyrotechniques, comparaison de plusieurs technologies, 2003.

F. Bourrières and C. Kaiser, Technique de remplissage de zones ouvertes situées en creux par rapport à une surface, p.2845858

B. Larangot, Rapport stage D.E.A, Fabrication technologique d'initiateurs pour micropropulseurs et test de résistance à l'arrachement d'une résine epoxy, 2000.

J. Y. Estève, H. Fourniols, and . Camon, Application of MEMS behavorial simulation to physics of failure (PoF) modeling, 14th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESPREF'2003), pp.6-10, 2003.

A. Tappan, Patterning of regular porosity in PETN microenergetic material thin film, th International Conference of the ICT, pp.28-29, 2005.

A. Tappan, Micro energetic materials ? microscale energetic material processing and testing, 41 st AIAA Aerospace Sciences Meeting and Exhibit, Janv, pp.6-9, 2003.
DOI : 10.2514/6.2003-242

A. J. Gavens, Effect of intermixing on self-propagating exothermic reactions in

D. S. Stewart, Miniaturization of explosive technology and microdetonics, XXI ICTAM, 15-21 Août, 2004.

M. Tillotson, A. E. Gash, R. L. Simpson, L. W. Hrubesh, J. H. Satcher-jr et al., Nanostructured energetic materials using sol???gel methodologies, Journal of Non-Crystalline Solids, vol.285, issue.1-3, pp.338-345, 2001.
DOI : 10.1016/S0022-3093(01)00477-X

C. Rossi, S. Orieux, B. Larangot, T. Do-conto, and D. , Estève, Design, Fabrication and modeling of solid propellant microrocket-application to micropropulsion, Sensors and Actuators A99, pp.125-133, 2002.

J. R. Lloyd, Electromigration for Designers: An Introduction for the Non-Specialist, 20421.

C. N. Liao and C. T. Wei, Effect of intermetallic compound formation on electrical properties of Cu/Sn interface during thermal treatment, Journal of Electronic Materials, vol.67, issue.10, pp.1137-1143, 2004.
DOI : 10.1007/s11664-004-0115-9