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Conception et intégration d'un micro-initiateur sécurisé sur silicium à base de micro-interrupteurs pyrotechniques

Abstract : The works of this PhD thesis concerns the conception and the fabrication of a safe micro-igniter on silicon. The system can achieve ignition function and several safety functions: arming, disarming, sterilization. Initially, in safe and unarmed mode, the igniter's pads are connected to the ground. The igniter consists of a resistive element on a dielectric membrane that converts electrical energy into heat to initiate the pyrotechnic material with 150mW. The safety functions are achieved by two types of one-shot pyrotechnical micro-switches, we have developped: - The ON-OFF microswitch concept consists of breaking an electrical connection thanks to a pyrotechnical micro-actuator. 150mW is requiered to realize commutation and a minimum commutation time of 25ms is achieved with 500mW. - The OFF-ON microswitch concept consists in locally making a micro-soldering between two insulated electrical connections. Commutation is achieved with a minimum power of 200mW and minimum commutation time is of 320ms with 400mW. These switches are bistable, have excellent isolation in the OFF-state an a good conductivity in the ON-state. Being one-shot, they suit safety applications. One demonstrator of the system, called Pyrosecure, has been fabricated. Fabrication is done using classical microtechnology techniques and needs only 4 masks levels. Therefore, the system is cheap, easily fabricated and IC compatible.
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Submitted on : Wednesday, January 24, 2007 - 4:14:55 PM
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  • HAL Id : tel-00126318, version 1

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Pierre Pennarun. Conception et intégration d'un micro-initiateur sécurisé sur silicium à base de micro-interrupteurs pyrotechniques. Micro et nanotechnologies/Microélectronique. INSA de Toulouse, 2006. Français. ⟨tel-00126318⟩

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