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Theses

Développement de méthodes génériques de corrélation entre les mesures électriques & physiques des composants et les étapes élémentaires de fabrication

Abstract : For sub-90nm technologies, the complexity of the structures is so important that the control of the fabrication is became a essential activity for semiconductor fabs. In this context, two major challenges are proposed to the engineers : The first one is to characterise and to reduce the variability of the electrical properties of the structures. The second one consists in optimising the control of this variability in order to guaranty the circuit performances.
This PhD thesis aims at proposing a global analysis methodology based on the development of advanced statistical methods (multivariate and neuronal algorithms) to correlate the electrical and physical measurements of the components and the equipment parameters collected during the processes. The models obtained lead to the optimisation of each components of the process control (Statistical Process Control, Fault Detection and Classification and Run to Run).
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https://tel.archives-ouvertes.fr/tel-00122893
Contributor : Cyril Alegret <>
Submitted on : Monday, January 5, 2009 - 7:00:01 AM
Last modification on : Tuesday, February 16, 2021 - 3:33:52 AM
Long-term archiving on: : Tuesday, April 6, 2010 - 8:44:25 PM

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  • HAL Id : tel-00122893, version 1

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Cyril Alegret. Développement de méthodes génériques de corrélation entre les mesures électriques & physiques des composants et les étapes élémentaires de fabrication. Matière Condensée [cond-mat]. Université Joseph-Fourier - Grenoble I, 2006. Français. ⟨tel-00122893⟩

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