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Nanométrologie dimensionnelle dédiée aux déplacements de platines macroscopiques

Abstract : This work concerns the field of the dimensional nanometrology, more particularly dedicated to positioning and displacements of mechanical stage on millimetre ranges. One will find details concerning the original methods developed at the laboratory, associating mechanical precision, optical sensors and high-frequency electronics which enabled to obtain many experimental results in this field. We are pointing out two spheres of activities more particularly. The first relates to the displacement of a carry-sample stage for applications in partnership with near-field microscopy and lithography where it is necessary to carry out millimetre-length displacements in a plan with repeatabilities of about one nanometer. The second relates to the balance of watt of the Laboratoire National d'Essai where it is necessary to move a mass along an axis at uniform 2 mm.s-1 with an accuracy of 10-9 in relative value.
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Habilitation à diriger des recherches
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https://tel.archives-ouvertes.fr/tel-00120736
Contributor : Luc Chassagne <>
Submitted on : Monday, December 18, 2006 - 8:23:08 AM
Last modification on : Friday, March 6, 2020 - 11:46:10 AM
Long-term archiving on: : Wednesday, April 7, 2010 - 12:53:54 AM

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Luc Chassagne. Nanométrologie dimensionnelle dédiée aux déplacements de platines macroscopiques. Autre. Université de Versailles-Saint Quentin en Yvelines, 2006. ⟨tel-00120736⟩

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