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Etude du comportement anticorrosion de revetements amorphes base Si élaborés par dépot chimique en phase vapeur

Abstract : The aim of this work is to analyse the corrosion protective properties of amorphous Si based coatings deposited by plasma assisted chemical vapour deposition (PACVD).
The corrosion protective ability of SiOx and SiOxNy coatings is mainly explained by a very low open porosity and a high insulating nature of the films.
The electrochemical behaviour of SiCx and SiCxNy, typically used as under layers to promote DLC (Diamond Like Carbon) adhesion, have also been studied. The nitrogen content within the coatings was varied by changing the synthesis conditions. The semiconductive properties of SiCxNy coatings have been related to their chemical nature. An adapted incorporation of nitrogen leads to an adequate balance between positive and negative free charge carriers that help to reduce the corrosion rate.
We have finally studied the corrosion resistance and the wear-corrosion synergism provided by SiCxNy / DLC duplex coatings for multifunctional purposes
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https://tel.archives-ouvertes.fr/tel-00120312
Contributor : David Pech <>
Submitted on : Thursday, December 14, 2006 - 11:04:20 AM
Last modification on : Wednesday, July 8, 2020 - 12:42:37 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 8:06:21 PM

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  • HAL Id : tel-00120312, version 1

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David Pech. Etude du comportement anticorrosion de revetements amorphes base Si élaborés par dépot chimique en phase vapeur. Matériaux. INSA de Lyon, 2006. Français. ⟨tel-00120312⟩

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