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CONCEPTION, REALISATION ET TEST DE MICROCOMMUTATEURS
MICRO-ELECTROMECANIQUES ET
APPLICATION AUX CIRCUITS HYPERFREQUENCES
RECONFIGURABLES

Arnaud Pothier 1
1 MINACOM
XLIM - XLIM
Abstract : Since few years, the MEMS technology for microwave applications has grown up with the potential to
improve the circuit and device performances. Several components have been designed and demonstrate an
important reduction of loss and a higher linearity than their main counterparts: the semi-conductor components.
This work investigates the MEMS switches design and their integration in tunable microwave systems.
Thus, we first present a state of art of this MEMS technology and the MEMS microwave devices. The
micromachined switches operation is investigated. The main advantages, drawbacks and some applications
where these components could improve the performances are discussed.
The second part of this work is dedicated to the mechanical and electromagnetical design of a DC
contact switch. The main objective of this work was to realise a reliable component which present good
performances. The switch optimisation is presented and discussed with the corresponding mechanical and
electric measurements.
The last part of this memory addresses the development of new switchable microwave circuit topology
including DC contact micro relays. Three applications are discussed; some tunable filters are developed with a
high tuning in frequency (22% for the first one and 44% for the other). We also present how to preserve the
device losses to a low level, and keep high the quality factor of these systems.
Key words: MEMS, micromechanical devices, micro-relays, switches, electrostatic actuation, contact resistance,
biasing network, reconfigurable systems, tunable filters, quality factor.
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Submitted on : Friday, December 8, 2006 - 6:16:13 PM
Last modification on : Thursday, December 19, 2019 - 5:48:01 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 8:42:48 PM

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Arnaud Pothier. CONCEPTION, REALISATION ET TEST DE MICROCOMMUTATEURS
MICRO-ELECTROMECANIQUES ET
APPLICATION AUX CIRCUITS HYPERFREQUENCES
RECONFIGURABLES. Micro et nanotechnologies/Microélectronique. Université de Limoges, 2003. Français. ⟨tel-00119368⟩

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