44 3.2.1 Absorption d'un faisceau laser en régime nanoseconde, p.44 ,
Enl??vement de particules par laser impulsionnel, Journal de Physique IV (Proceedings), vol.127, pp.145-149, 2005. ,
DOI : 10.1051/jp4:2005127022
Time-of-flight measurements of ejected particles during dry laser cleaning, Applied Physics B, vol.77, issue.3, pp.517-521, 2006. ,
DOI : 10.1007/s00340-006-2283-1
URL : https://hal.archives-ouvertes.fr/hal-00083796
Dynamics of particle ejection in dry laser cleaning, High-Power Laser Ablation VI, p.0, 2006. ,
DOI : 10.1117/12.674578
URL : https://hal.archives-ouvertes.fr/hal-00068065
120 7.2.1 Endommagement par contact thermique ,
Experimental analyses of ablation mechanisms involved in dry laser cleaning, Appl. Surf. Sci, p.130 ,
131 8.2.1 Propriétés physiques des polymères ,
Mécanismes d'éjection de particules par laser impulsionnel Theoretical description of dry laser cleaning, J. Phys. IV, soumis Appl. Surf. Sci, vol.15, issue.1 22, pp.208-209, 2003. ,
Ablative thresholds in laser cleaning of substrates from particulates, Applied Physics A, vol.79, issue.4-6, pp.729-734, 2004. ,
DOI : 10.1007/s00339-003-2480-2
Threedimensional effects in dry laser cleaning, Appl. Phys. A, vol.77, pp.209-215, 2003. ,
Particle on surface : 3d- effects in dry laser cleaning, Appl. Phys. A, vol.79, pp.747-751, 2004. ,
Dry laser cleaning of particles from solid substrates: Experiments and theory, Journal of Applied Physics, vol.90, issue.5, pp.2135-2142, 2001. ,
DOI : 10.1063/1.1389477
Caractérisation et nettoyage du silicium, 2003. ,
Batch wet process still dominates wafer-cleaning market ; but for how long ?, p.97, 2004. ,
Procédés de nettoyage ultime dans l'industrie de la microélectronique : méthodes actuelles et perspectives, Journées ECRIN : Du nettoyage à la stérilisation, 2004. ,
Cleaning after silicon oxide cmp, Microelectronic Engineering, vol.3738, p.285, 1997. ,
Plasma cleaning of metal surfaces, Journal of Vacuum Science and Technology, vol.11, issue.3, pp.567-569, 1974. ,
DOI : 10.1116/1.1318069
Cleaning options for copper/ultralow-k structures, Semiconductor International, 2005. ,
Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology, RCA Review, vol.31, p.187, 1970. ,
Examining the future of wafer cleaning Supercritical fluids : Nanotechnology and select emerging applications, Combustion Science & Technology, vol.2215, issue.178 1-3, pp.97-555, 2004. ,
Dry excimer laser cleaning applied to nuclear decontamination, Applied Surface Science, vol.208, issue.209, pp.208-209, 2003. ,
DOI : 10.1016/S0169-4332(02)01360-0
URL : https://hal.archives-ouvertes.fr/hal-00316905
Chemical free cleaning using excimer lasers, Proc. SPIE, pp.279-287, 1996. ,
DOI : 10.1117/12.237737
Excimer laser cleaning for microelectonics : Modeling, applications and challenges, Proc. SPIE, pp.290-301, 1999. ,
Excimer Laser Induced Removal of Particles from Hydrophilic Silicon Surfaces, The Journal of Adhesion, vol.75, issue.1-2, pp.167-178, 1999. ,
DOI : 10.1016/0021-9797(70)90212-2
The effects of hydrogen bonds on the adhesion of inorganic oxide particles on hydrophilic silicon surfaces, Journal of Applied Physics, vol.86, issue.3, pp.1744-1748, 1999. ,
DOI : 10.1063/1.370956
A thermal detachment mechanism for particle removal from surfaces by pulsed laser irradiation, Microelectronic Engineering, vol.20, issue.1-2, pp.159-170, 1993. ,
DOI : 10.1016/0167-9317(93)90213-O
An energy approach to the modelling of particle removal by pulsed laser irradiation, Applied Physics A: Materials Science & Processing, vol.68, issue.5, 1999. ,
DOI : 10.1007/s003390050942
Laser induced removal of spherical particles from silicon wafers, Journal of Applied Physics, vol.87, issue.3, 2000. ,
DOI : 10.1063/1.372045
Influence of laser pulse shape on dry laser cleaning, Applied Surface Science, vol.252, issue.13, pp.4786-4791, 2006. ,
DOI : 10.1016/j.apsusc.2005.07.125
URL : https://hal.archives-ouvertes.fr/hal-00123703
Optical field enhancement effects in laser-assisted particle removal, Applied Physics A Materials Science & Processing, vol.72, issue.1, pp.41-44, 2001. ,
DOI : 10.1007/s003390000715
Laser-assisted removal of particles on silicon wafers, Journal of Applied Physics, vol.85, issue.7, p.3837, 1999. ,
DOI : 10.1063/1.369754
Laser cleaning of silicon wafers: mechanisms and efficiencies, Second International Symposium on Laser Precision Microfabrication, 2002. ,
DOI : 10.1117/12.456821
<title>Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition</title>, Lasers in Microelectronic Manufacturing, pp.13-18, 1991. ,
DOI : 10.1117/12.51021
Efficient pulsed laser removal of 0.2 ??m sized particles from a solid surface, Applied Physics Letters, vol.58, issue.20, pp.2217-2219, 1991. ,
DOI : 10.1063/1.104931
Bubble nucleation and pressure generation during laser cleaning of surfaces, Applied Physics A: Materials Science & Processing, vol.64, issue.4, pp.331-339, 1997. ,
DOI : 10.1007/s003390050487
Liquid-assisted pulsed laser cleaning using near-infrared and ultraviolet radiation, Journal of Applied Physics, vol.86, issue.11, pp.6519-6524, 1999. ,
DOI : 10.1063/1.371617
Universal threshold for the steam laser cleaning of submicron spherical particles from silicon, Appl. Phys. A, vol.70, pp.669-672, 2000. ,
Near field induced defects and influence of the liquid layer thickness in Steam Laser Cleaning of silicon wafers, Applied Physics A: Materials Science & Processing, vol.77, issue.1, pp.117-123, 2003. ,
DOI : 10.1007/s00339-003-2101-0
Removal of small particles on silicon wafer by laser-induced airborne plasma shock waves, Journal of Applied Physics, vol.89, issue.11, pp.6496-6500, 2001. ,
DOI : 10.1063/1.1353562
Nanoparticle removal from substrates with pulsed-laser induced plasma and shock waves, Journal of Adhesion Science and Technology, vol.324, issue.9, 2002. ,
DOI : 10.1163/156856102320256846
Si wafer surface cleaning using laserinduced shock wave : a new dry cleaning methodology, Surf. Coat. Tech, pp.169-170, 2003. ,
Nanoparticle removal from trenches and pinholes with pulsed-laser induced plasma and shock waves, Journal of Adhesion Science and Technology, vol.17, issue.1, 2003. ,
DOI : 10.1163/15685610360472484
Optical diagnostics for particle-cleaning process utilizing laser-induced shockwave, Applied Physics A, vol.63, issue.4-6, pp.965-968, 2004. ,
DOI : 10.1007/BF01833801
???Verso??? laser cleaning of mechanically thin films, Applied Surface Science, vol.208, issue.209, pp.208-209, 2003. ,
DOI : 10.1016/S0169-4332(02)01435-6
Laser cleaning process for semiconductor material and the like, 2001. ,
A portable laser cleaning device for semiconductor packaging machines, 1999. ,
Enviromental technology iniiative : chemical-free cleaning of semiconductos by radiance process, Tech. Rep. EPA, vol.600153, 1998. ,
Motorola testing novel cleaning tool, 1997. ,
Contact, adhesion and rupture of elastic solids, 1999. ,
DOI : 10.1007/978-3-662-04125-3
Force-distance curves by atomic force microscopy, Surface Science Reports, vol.34, issue.1-3, pp.1-104, 1993. ,
DOI : 10.1016/S0167-5729(99)00003-5
Ultraviolet laser removal of small metallic particles from silicon wafers, Optics and Lasers in Engineering, vol.38, issue.6, pp.405-415, 2002. ,
DOI : 10.1016/S0143-8166(02)00022-2
Laser???cleaning techniques for removal of surface particulates, Journal of Applied Physics, vol.71, issue.7, pp.3515-3523, 1992. ,
DOI : 10.1063/1.350906
The adhesion of dry particles in the nanometer to micrometer-size range, Colloids and Surfaces A: Physicochemical and Engineering Aspects, vol.165, issue.1-3, pp.3-10, 2000. ,
DOI : 10.1016/S0927-7757(99)00439-2
The contact of elastic solids, J. Reine Angew. Math, vol.92, pp.156-171 ,
Effect of contact deformations on the adhesion of particles, Journal of Colloid and Interface Science, vol.53, issue.2, p.314, 1975. ,
DOI : 10.1016/0021-9797(75)90018-1
Surface Energy and the Contact of Elastic Solids, Proc. R. Soc. London A, p.301, 1971. ,
DOI : 10.1098/rspa.1971.0141
Adhesion of spheres: The JKR-DMT transition using a dugdale model, Journal of Colloid and Interface Science, vol.150, issue.1, pp.243-269, 1992. ,
DOI : 10.1016/0021-9797(92)90285-T
The role of van der Waals forces in adhesion of micromachined surfaces, Nature Materials, vol.10, issue.8, pp.629-634, 2005. ,
DOI : 10.1063/1.1331298
Towards an accurate description of the capillary force in nanoparticle-surface interactions, Modelling and Simulation in Materials Science and Engineering, vol.13, issue.7, pp.1175-1186, 2005. ,
DOI : 10.1088/0965-0393/13/7/012
Wavelength Effects in the Laser Cleaning Process, Japanese Journal of Applied Physics, vol.37, issue.Part 1, No. 3A, 1998. ,
DOI : 10.1143/JJAP.37.840
Theoretical model and experimental study for dry and steam laser cleaning, Laser Processing of Materials and Industrial Applications II, pp.7-18, 1998. ,
DOI : 10.1117/12.317931
Capillary forces in tapping mode atomic force microscopy, Physical Review B, vol.66, issue.15, p.155436, 2002. ,
DOI : 10.1103/PhysRevB.66.155436
Influence of storage time on laser cleaning of SiO 2 on Si, Applied Physics A: Materials Science & Processing, vol.76, issue.5, pp.847-849, 2003. ,
DOI : 10.1007/s00339-002-1761-5
Local field enhancement effects for nanostructuring of surfaces, Journal of Microscopy, vol.202, issue.1, p.129, 2001. ,
DOI : 10.1046/j.1365-2818.2001.00876.x
Beiträge zur optik trüber medien, speziell kolloidaler metallösungen, Ann. d. Physik, vol.25, issue.4, p.377, 1908. ,
Contributions of the optics of turbid media, particularly colloidal metal solutions Translation -Sandia Laboratories -New Mexico, 1978. ,
Principle of optics 7th (expanded) edition. Cambridge, 1999. ,
Energy flow around a small particle investigate by classical mie theory, Phys. Rev. B, vol.70, issue.035418, 2004. ,
Light scattering by a sphere on a substrate, Physica A: Statistical Mechanics and its Applications, vol.137, issue.1-2, p.209, 1986. ,
DOI : 10.1016/0378-4371(86)90072-5
Laser cleaning of solid surface : optical resonance and near-field effects, Proc. SPIE, p.576, 2000. ,
Calculation of light scatter from structures on silicon surfaces, Proc. SPIE, 1987. ,
Optical near-field effects in surface nanostructuring and laser cleaning, Second International Symposium on Laser Precision Microfabrication, pp.180-183, 2002. ,
DOI : 10.1117/12.456827
Real-time monitoring of laser cleaning by an airborne particle counter, Applied Surface Science, vol.208, issue.209, pp.208-209, 2003. ,
DOI : 10.1016/S0169-4332(02)01377-6
Time-of-flight measurements of ejected particles during dry laser cleaning, Applied Physics B, vol.77, issue.3, pp.517-521, 2006. ,
DOI : 10.1007/s00340-006-2283-1
URL : https://hal.archives-ouvertes.fr/hal-00083796
Nanoparticle sizing with a resolution beyond the diffraction limit using UV light scattering spectroscopy, Optics Communications, vol.228, issue.1-3, pp.1-7, 2003. ,
DOI : 10.1016/j.optcom.2003.09.075
Influence of beam incidence angle on dry laser cleaning of surface particles, Applied Surface Science, vol.157, issue.1-2, pp.67-73, 2000. ,
DOI : 10.1016/S0169-4332(99)00521-8
Theory of Elasticity, 1998. ,
Basic physical problems related to dry laser cleaning, RIKEN Review, vol.43, pp.28-34, 2002. ,
Modeling of laser cleaning of metallic particulate contaminants from silicon surfaces, Journal of Applied Physics, vol.92, issue.12, pp.6973-6982, 2002. ,
DOI : 10.1063/1.1513190
Ecole sur l'ablation laser : Interaction laser-matière : les polymères Electronic transport ans consequences for material removal in ultrafast pulsed laser ablation of materials, CNRS Phys. Rev. B, vol.62, pp.342-389, 1996. ,
The interaction of ultrashort, powerful laser pulses with a solid target: Ion expansion and acceleration with time???dependent ambipolar field, Physics of Fluids B: Plasma Physics, vol.5, issue.3, pp.944-949, 1993. ,
DOI : 10.1063/1.860943
Dynamics of the plume formation and parameters of the ejected clusters in short-pulse laser ablation, Applied Physics A: Materials Science & Processing, vol.76, issue.3, 2003. ,
DOI : 10.1007/s00339-002-1818-5
Micro-usinage nanoseconde UV ou femtoseconde??: ??tat de l'art et comparaison, Journal de Physique IV (Proceedings), vol.108, p.13, 2003. ,
DOI : 10.1051/jp4:20030586
A comparative study of the photon pressure force, the photophoretic force, and the adhesion van der Waals force, Optics Communications, vol.245, issue.1-6, pp.27-35, 2005. ,
DOI : 10.1016/j.optcom.2004.10.047
Handbook of Chemistry and Physics, 2003. ,
Laser cleaning of polymer surfaces, Applied Physics A Materials Science & Processing, vol.72, issue.1, pp.1-6, 2001. ,
DOI : 10.1007/s003390000683
KrF excimer laser dry and steam cleaning of silicon surfaces with metallic particulate contaminants, Applied Physics A: Materials Science & Processing, vol.74, issue.2, pp.191-199, 2002. ,
DOI : 10.1007/s003390100868
Laser surface cleaning of electronics materials, Proc. SPIE, pp.278-289, 1999. ,
A quantitative analysis of single pulse ultraviolet dry laser cleaning, Journal of Applied Physics, vol.86, issue.12, pp.6641-6646, 1999. ,
DOI : 10.1063/1.371737
Surface acceleration during dry laser cleaning of silicon, Applied Physics A: Materials Science & Processing, vol.69, issue.7, pp.335-337, 1999. ,
DOI : 10.1007/s003390051412
Resonance and steep fronts effects in nanosecond dry laser cleaning, Applied Surface Science, vol.197, issue.198, pp.904-910, 2002. ,
DOI : 10.1016/S0169-4332(02)00453-1
Angular effect in laser removal of spherical silica particles from silicon wafers, Journal of Applied Physics, vol.90, issue.1, pp.59-63, 2001. ,
DOI : 10.1063/1.1359154
Angular laser cleaning for effective removal of particles. from a solid surface, Applied Physics A Materials Science & Processing, vol.71, issue.6, pp.671-674, 2000. ,
DOI : 10.1007/s003390000583
Shock-wave generation during dry laser cleaning of particles, Applied Physics A, vol.77, issue.5, pp.633-639, 2002. ,
DOI : 10.1007/s00339-002-1593-3
Direct femtosecond laser nanopaterning of glass substrate by particle-assisted near-field enhancement, Appl. Phys. Let, vol.88, 2006. ,
Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon, Applied Physics Letters, vol.86, issue.16, 2005. ,
DOI : 10.1063/1.1886896
Experimental analyses of ablation mechanisms involved in dry laser cleaning, Appl. Surf. Sci, 2007. ,
Formation of Silicon-Gold Eutectic Bond Using Localized Heating Method, Japanese Journal of Applied Physics, vol.37, issue.Part 2, No. 11B, pp.1412-1414, 1998. ,
DOI : 10.1143/JJAP.37.L1412
Nanoprocessing of silicon substrate using surface plasmon polaritons of gold particle and polystyrene particle excited by femtosecond laser, High-Power Laser Ablation VI, 2006. ,
DOI : 10.1117/12.674501
Femtosecond laser nearfield abaltion from gold nanoparticles, Nature, vol.2, pp.44-47, 2006. ,
The influence of the surface migration of gold on the growth of silicon nanowires, Nature, vol.151, issue.7080, pp.69-71, 2006. ,
DOI : 10.1038/nature04574
Molecular dynamics simulations of laser disintegration of amorphous aerosol particles with spatially nonuniform absorption, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol.180, issue.1-4, pp.245-250, 2001. ,
DOI : 10.1016/S0168-583X(01)00424-4
Limit of overheating and the threshold behavior in laser ablation, Physical Review E, vol.68, issue.4, p.41501, 2003. ,
DOI : 10.1103/PhysRevE.68.041501
URL : https://hal.archives-ouvertes.fr/ujm-00377627
Pulsed-laser-induced nanoscale island formation in thin metal-on-oxide films, Physical Review B, vol.72, issue.19, 2005. ,
DOI : 10.1103/PhysRevB.72.195408
Jumping Nanodroplets, Science, vol.309, issue.5743, pp.2043-2045, 2005. ,
DOI : 10.1126/science.1116505
Angle effect in laser nanopatterning with particle-mask, Journal of Applied Physics, vol.96, issue.11, pp.6845-6850, 2004. ,
DOI : 10.1063/1.1786652
Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy, Applied Physics Letters, vol.82, issue.8, 2003. ,
DOI : 10.1063/1.1555693
Surface nanostructuring by nano-/femtosecond laser assisted scanning force microscopy Nanosphere lithography : a materials general fabrication process for periodic particule array surfaces, J. Appl. Phys. J. Vac. Sci. Technol. A, vol.97, issue.13 3, pp.104319-1553, 1995. ,
Nanostructure array fabrication with temperature-controlled self-assembly techniques, Nanotechnology, vol.13, issue.5, pp.554-558, 2002. ,
DOI : 10.1088/0957-4484/13/5/302
Fabrication of large-area ordered arrays of nanoparticles on patterned substrates, Nanotechnology, vol.16, issue.8, pp.1311-1316, 2005. ,
DOI : 10.1088/0957-4484/16/8/055
Nanomaterials: A Membrane-Based Synthetic Approach, Science, vol.266, issue.5193, pp.1961-1966, 1994. ,
DOI : 10.1126/science.266.5193.1961
Highly ordered two-dimensional carbon nanotube arrays, Applied Physics Letters, vol.75, issue.14, pp.2047-2049, 1999. ,
DOI : 10.1063/1.124911
Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate, Applied Physics Letters, vol.79, issue.19, pp.3083-3085, 2001. ,
DOI : 10.1063/1.1415406
Fabrication of Ordered Arrays of Multiple Nanodots Using Anodic Porous Alumina as an Evaporation Mask, Advanced Materials, vol.12, issue.14, pp.1031-1033, 2000. ,
DOI : 10.1002/1521-4095(200007)12:14<1031::AID-ADMA1031>3.0.CO;2-R
Self-organized titanium oxide nanodot arrays by electrochemical anodization, Applied Physics Letters, vol.82, issue.17, pp.2796-2798, 2003. ,
DOI : 10.1063/1.1571661
Single-step fabrication of silicon-cone arrays, Applied Physics Letters, vol.82, issue.5, pp.692-693, 2003. ,
DOI : 10.1063/1.1538347
Patterning of silica microsphere monolayers with focused femtoseond laser pulses, Appl. Phys. Let, vol.88, issue.111112, 2006. ,
Versatile aproach for the fabrication of metallic nanodot arrays : template-based photonic method, pp.2-58, 2006. ,
Novel Laser Ablation Resists for Excimer Laser Ablation Lithography. Influence of Photochemical Properties on Ablation, The Journal of Physical Chemistry B, vol.105, issue.6, pp.1267-1275, 2001. ,
DOI : 10.1021/jp003325a
Polymers designed for laser microstructuring, Applied Surface Science, vol.168, issue.1-4, pp.270-272, 2000. ,
DOI : 10.1016/S0169-4332(00)00621-8
Characterisation of combined positive-negative photoresists by excimer laser ablation, Applied Physics A: Materials Science & Processing, vol.69, issue.7, pp.849-853, 1999. ,
DOI : 10.1007/s003390051545
Ablation laser pour la micro??lectronique plastique, Journal de Physique IV (Proceedings), vol.138, issue.1, 2006. ,
DOI : 10.1051/jp4:2006138024
Laser surface cleaning of organic contaminants, Applied Surface Science, vol.150, issue.1-4, pp.131-136, 1999. ,
DOI : 10.1016/S0169-4332(99)00237-8
Cleaning of submicrometer structures on Si-masters with pulsed excimer laser and reactive ion etching, Applied Physics A: Materials Science & Processing, vol.69, issue.7, pp.339-342, 1999. ,
DOI : 10.1007/s003390051413
Removal of the photoresist (PR) and metallic-polymer in the concave-typed storage node using the excimer laser, Applied Surface Science, vol.228, issue.1-4, pp.100-109, 2004. ,
DOI : 10.1016/j.apsusc.2003.12.029
Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes, Japanese Journal of Applied Physics, vol.37, issue.Part 1, No. 5A, 1998. ,
DOI : 10.1143/JJAP.37.2524
Application of Laser-Cleaning Technique for Efficient Removal of Via-Etch-Induced Polymers, Journal of The Electrochemical Society, vol.145, issue.11, pp.3966-3973, 1998. ,
DOI : 10.1149/1.1838900
Laser cleaning of etch-induced polymers from via holes, Journal of Applied Physics, vol.83, issue.3, pp.1677-1684, 1998. ,
DOI : 10.1063/1.366884
Polymer physics, 1995. ,
DOI : 10.1007/978-94-011-0543-9
Excimer laser polymer abalation : twenty years on, Appl. Phys. A, vol.77, pp.167-173, 2003. ,
Ablative photodecomposition: action of far-ultraviolet (193 nm) laser radiation on poly(ethylene terephthalate) films, Journal of the American Chemical Society, vol.104, issue.24, pp.6784-6785, 1982. ,
DOI : 10.1021/ja00388a052
Laser-induced three-dimensional photopolymerizartion using visible initiators and uv cross-linking by photosensitive comonomers, Macromolecules, vol.24, 1991. ,
Cross-links induced by swift heavy ion irradiation in polystyrene, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol.131, issue.1-4, 1997. ,
DOI : 10.1016/S0168-583X(97)00383-2
Excimer laser darkening of ETFE polymer films, Journal of Applied Polymer Science, vol.45, issue.1, pp.111-117, 2003. ,
DOI : 10.1002/app.1992.070450113
Etude de la pulvérisation laser douce des semi-conducteurs III-V GaAs et Ga1-x Alx As et de leurs heterostructures, 1996. ,
Finite Element Analysis of Pulsed Laser Bending: The Effect of Melting and Solidification, Journal of Applied Mechanics, vol.71, issue.3, p.321, 2004. ,
DOI : 10.1115/1.1753268
Numerical Simulation of Pulsed Laser Bending, Journal of Applied Mechanics, vol.69, issue.3, pp.254-260, 2004. ,
DOI : 10.1115/1.1459070
Numerical Partial Differential Equations : Finite Difference Methods, 1995. ,
DOI : 10.1007/978-1-4899-7278-1