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Study and realization of shear wave mode solidly mounted film bulk acoustic resonators (FBAR) made of c-axis inclined zinc oxide (ZnO) thin films: application as gravimetric sensors in liquid environments.

Abstract : Further progress of health-care requires miniaturized sensors for the improvement of medical diagnostics. In this context, the objective of this thesis was to simulate, realize and characterize shear mode solidly mounted film bulk acoustic resonators (SMR) vibrating at 800 MHz, and demonstrate their ability to function as gravimetric bio-chemical sensors in liquids.

Three sputter-deposition processes for ZnO films having an inclined c-axis with respect to the surface normal have been developed. Such films are required for the excitation of shear waves and thus essential for an operation in liquids. Inclinations of up to 16° have been obtained through oblique incidence of the particles using additional blinds. Homogeneous films have been deposited on up to 100 % of the 4" wafer surface. Simulation and characterization tools have permitted to optimize the SMRs, improving coupling coefficients from 0.012 to 0.149 (K2 of 2.2 %) and Q-factors from 3.5 to 230. Their application in water and glycerol solutions has shown that they are suitable as viscosity and gravimetric sensors. Measurements of antibody-antigen bindings in liquid have been successfully realized. Compared with 10 MHz quartz crystal microbalances, the obtained sensitivity of 738 Hz∙cm2/ng is 1000 times higher and the mass resolution of 3.5 ng/cm2 is 4 times better.

SMRs are highly sensitive, can be integrated with electronics, and allow quantitative time-dependent measurements with good mass resolutions. These piezoelectric film nanobalances are expected to form the core of portable and inexpensive systems to serve the medical diagnostic market.
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Submitted on : Saturday, October 28, 2006 - 11:30:15 AM
Last modification on : Friday, November 13, 2020 - 8:36:07 AM
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Mathias Link. Study and realization of shear wave mode solidly mounted film bulk acoustic resonators (FBAR) made of c-axis inclined zinc oxide (ZnO) thin films: application as gravimetric sensors in liquid environments.. Mechanics [physics.med-ph]. Université Henri Poincaré - Nancy I, 2006. English. ⟨tel-00110411⟩

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