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ETUDE DES PROPRIETES ELECTRIQUES D'UN MATERIAU POLYIMIDE A HAUTE TEMPERATURE : APPLICATION A LA PASSIVATION DES COMPOSANTS DE PUISSANCE EN CARBURE DE SILICIUM

Abstract : The aim of this work is to evaluate the polyimide potentialities as a passivation layer for silicon carbide power devices, under temperatures and electric fields definitely higher than those achieved in silicon based power device environment (until 350°C and 3 MV/cm respectively).
In order to quantify the polyimide inherent properties, electrical characterizations were carried out in a range of temperature extended up to 260°C, on MIM structures (Metal Insulator Metal) using polyimide films cured in a standard process. The results show good electrical properties at ambient temperature and up to 180°C. However, high dielectric losses and permittivity are achieved beyond 180°C. An improvement of the dielectric and the insulation properties was however observed after an additional thermal treatment, in which the samples are slowly exposed at elevated temperatures, indicating that the material is unstable after the standard imidization cure of polyimide film.
The electrical and physical-chemical characterization analysis shows that this instability is related to the evolution of the imidization extent of the polyamic acid, and on the concentration of residual impurities (water, solvent) which depend on the final cure parameters (time, temperature). This study highlights the need for optimizing the imidisation cure in the polyimide film development process in order to obtain electrical properties adapted to the concerned application, in a range of temperature extended up to 350 °C.
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https://tel.archives-ouvertes.fr/tel-00104626
Contributor : Samir Zelmat <>
Submitted on : Sunday, October 8, 2006 - 4:17:11 PM
Last modification on : Friday, January 10, 2020 - 9:08:17 PM
Long-term archiving on: : Tuesday, April 6, 2010 - 5:33:53 PM

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  • HAL Id : tel-00104626, version 1

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Samir Zelmat. ETUDE DES PROPRIETES ELECTRIQUES D'UN MATERIAU POLYIMIDE A HAUTE TEMPERATURE : APPLICATION A LA PASSIVATION DES COMPOSANTS DE PUISSANCE EN CARBURE DE SILICIUM. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2006. Français. ⟨tel-00104626⟩

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