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Contribution à l'introduction de concepts mécaniques dans les Micro et Nano Systèmes

Abstract : The report presents the research of the "Silicon Microsystems" Group. First chapter deals with conceptual studies using the potential of various actuating principles: electrostatic; thermal and phase transition. For some of them, test vehicles have been realized at the device level. Electrostatic actuation has also served as a support for the remote power supply experiment during the Ph.D. of Philippe Basset. Resonators studied within the frame of the Ph.D. of Emmanuel Quévy are presented in the chapter dedicated to "RF MEMS". Microactuators which have been used as in situ test benches by Olivier Millet are presented in the chapter entitled "Etude des mécanismes de défaillance des micro-actionneurs." Microswitches and RF MEMS are explained and shown in the next chapter. Research focusing on microactuator is the core research activity of the "Silicon Microsystems" Group.
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Contributor : Lionel Buchaillot <>
Submitted on : Tuesday, July 25, 2006 - 5:32:05 PM
Last modification on : Wednesday, April 7, 2021 - 10:32:08 AM
Long-term archiving on: : Tuesday, April 6, 2010 - 12:21:46 AM


  • HAL Id : tel-00087273, version 1


Lionel Buchaillot. Contribution à l'introduction de concepts mécaniques dans les Micro et Nano Systèmes. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2004. ⟨tel-00087273⟩



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