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Conception de microsystèmes à base d'actionneurs en SU8 pour la manipulation de micro-objets en milieu liquide et transfert vers milieu quasi-sec

Abstract : The development of microsystems technologies has enabled the emergence of devices able to manipulate and make measurements on microobjects using different techniques. This study proposes a contribution to microobject manipulation tools, built using SU8 photoresist made actuators and microchannels etched in silicon.
The first proposed system is a polycrystal silicon and SU8 photoresist based microprobe, equipped with a tip, that is designed to enter into a microchannel and perform electrical measurements on microobjects. After an inital design stage, the fabrication process and testing of the device are proposed.
This first step allows to go on on a microobject extraction system, from wet to dry environment. This sysem includes a dielectrophoretic conveying system and a SU8 resist and gold based actuator. The design, fabrication and testing shows a high potential in terms of automatizaton for this kind of microsystem.
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https://tel.archives-ouvertes.fr/tel-00084755
Contributor : Matthieu Lagouge <>
Submitted on : Monday, July 10, 2006 - 3:05:33 PM
Last modification on : Wednesday, February 17, 2021 - 10:58:10 AM
Long-term archiving on: : Tuesday, September 18, 2012 - 4:05:35 PM

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  • HAL Id : tel-00084755, version 1

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Matthieu Lagouge. Conception de microsystèmes à base d'actionneurs en SU8 pour la manipulation de micro-objets en milieu liquide et transfert vers milieu quasi-sec. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2006. Français. ⟨tel-00084755⟩

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