S. N. Jasperson and S. E. Schnatterly, An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique, Review of Scientific Instruments, vol.40, issue.6, pp.761-767, 1969.
DOI : 10.1063/1.1684062

B. Drevillon, J. Perrin, R. Marbot, A. Violet, and J. L. Dalby, Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysis, Review of Scientific Instruments, vol.53, issue.7, p.969, 1982.
DOI : 10.1063/1.1137118

C. Deumié, Ellipsométrie sur champ diffus et analyse multi-échelle de la microstructure des multicouches optiques : diffusion lumineuse, microscope à force atomique, microscopie à effet tunnel », thèse de l'université d, 1997.

B. Drévillon, Phase modulated ellipsometry from the ultraviolet to the infrared: In situ application to the growth of semiconductors, Progress in Crystal Growth and Characterization of Materials, pp.1-87, 1993.
DOI : 10.1016/0960-8974(93)90021-U

E. Compain and B. Drevillon, High-frequency modulation of the four states of polarization of light with a single phase modulator, Review of Scientific Instruments, vol.69, issue.4, pp.1574-1580, 1998.
DOI : 10.1063/1.1148811

M. Bardon, « Etude théorique et expérimentale de la polarisation du rayonnement diffusé par une surface rugueuse. Application à la détection de rayures », Laboratoire d'énergétique moléculaire et macroscopique, 2003.

R. H. Müller, Definitions and conventions in ellipsometry, Definitions and Conventions in Ellipsometry, pp.14-33, 1969.
DOI : 10.1016/0039-6028(69)90003-X

B. Kaplan and B. Drévillon, Mueller matrix measurements of small spherical particles deposited on c-Si wafer, Surface Scattering and Diffraction for Advanced Metrology, pp.3911-3918, 2002.
DOI : 10.1117/12.446731

N. Destouches, « Mesure de la phase du champ diffracté dans le domaine optique ? Contribution à la résolution de problèmes inverses », thèse de l'université d, 2002.

C. Deumié, H. Giovannini, C. Amra, and . Angle, Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings, Applied Optics, vol.41, issue.16, pp.3362-3369, 2002.
DOI : 10.1364/AO.41.003362

M. Cathelinaud, F. Lemarquis, and C. Amra, Index determination of opaque and semitransparent metallic films: application to light absorbers, Applied Optics, vol.41, issue.13, pp.2546-2554, 2002.
DOI : 10.1364/AO.41.002546

URL : https://hal.archives-ouvertes.fr/hal-01324097

C. Deumié, O. Gilbert, and C. Amra, Etude de la diffusion lumineuse à haute résolution angulaire : application à la discrimination des rugosités et hétérogénéités, à la caractérisation du degré de perturbation des échantillons, Colloque Mesures Optiques pour l'Industrie, 2001.

C. Deumié, O. Gilbert, and C. Amra, « High-angle resolved scattering for detection and discrimination of bulks and surfaces, Optical Interference Coating, 2001.

H. Giovannini and C. Amra, Dielectric thin films for maximized absorption with standard quality black surfaces, Applied Optics, vol.37, issue.1, pp.103-105, 1998.
DOI : 10.1364/AO.37.000103

H. Giovannini, C. Deumié, H. Akhouayri, and C. Amra, Angle-resolved polarimetric phase measurement for the characterization of gratings, Optics Letters, vol.21, issue.20, pp.1619-1621, 1996.
DOI : 10.1364/OL.21.001619

URL : https://hal.archives-ouvertes.fr/hal-01324206

C. Deumié, H. Giovannini, and C. Amra, Ellipsometry of light scattering from multilayer coatings, Applied Optics, vol.35, issue.28, pp.5600-5608, 1996.
DOI : 10.1364/AO.35.005600

C. Deumié, R. Richier, P. Dumas, and C. Amra, Multiscale roughness in optical multilayers: atomic force microscopy and light scattering, Applied Optics, vol.35, issue.28, pp.5583-5594, 1996.
DOI : 10.1364/AO.35.005583

D. Torricini and C. Amra, Light scattering to characterize both faces of transparent substrates: radiative and embedded light, Optical Interference Coatings, pp.1117-1130, 1994.
DOI : 10.1117/12.192056

C. Amra, Light scattering from multilayer optics I Tools of investigation, Journal of the Optical Society of America A, vol.11, issue.1, pp.197-210, 1994.
DOI : 10.1364/JOSAA.11.000197

C. Amra, Light scattering from multilayer optics II Application to experiment, Journal of the Optical Society of America A, vol.11, issue.1, pp.211-226, 1994.
DOI : 10.1364/JOSAA.11.000211

C. Amra, From light scattering to the microstructure of thin-film multilayers, Applied Optics, vol.32, issue.28, pp.5481-5491, 1993.
DOI : 10.1364/AO.32.005481

URL : https://hal.archives-ouvertes.fr/hal-01326481

C. Amra, C. Grèzes-besset, and L. Bruel, Comparison of surface and bulk scattering in optical multilayers, Applied Optics, vol.32, issue.28, pp.5492-5502, 1993.
DOI : 10.1364/AO.32.005492

URL : https://hal.archives-ouvertes.fr/hal-01324243

C. Amra, D. Torricini, P. Roche, and . Multiwavelength, Multiwavelength (045???106 ??m) angle-resolved scatterometer or how to extend the optical window, Applied Optics, vol.32, issue.28, pp.5462-5472, 1993.
DOI : 10.1364/AO.32.005462

C. Amra, First-order vector theory of bulk scattering in optical multilayers, Journal of the Optical Society of America A, vol.10, issue.2, pp.365-374, 1993.
DOI : 10.1364/JOSAA.10.000365

C. Amra, C. Grèzes-besset, and L. Bruel, Comparison of surface and bulk scattering in optical multilayers, Applied Optics, vol.32, issue.28, pp.5492-5503, 1993.
DOI : 10.1364/AO.32.005492

URL : https://hal.archives-ouvertes.fr/hal-01324243

C. Amra, J. H. Apfel, and E. Pelletier, Role of interface correlation in light scattering by a multiplayer, Applied Optics, vol.31, issue.16, pp.3134-3151, 1992.
DOI : 10.1364/AO.31.003134

C. Amra and P. Bousquet, « Scattering from surfaces and multilayers coatings : recent advances for a better investigation of experiment », Conference presented at The International Congress on Optical Science and Engineering, pp.1-16, 1988.

J. M. Elson, J. P. Rahn, and J. M. Bennett, Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties, Applied Optics, vol.22, issue.20, pp.3207-3219, 1983.
DOI : 10.1364/AO.22.003207

J. M. Elson, J. P. Rahn, and J. M. Bennett, Light scattering from multilayer optics: comparison of theory and experiment, Applied Optics, vol.19, issue.5, pp.669-679, 1980.
DOI : 10.1364/AO.19.000669

O. Acher, E. Bigan, and B. Drévillon, Improvements of phase???modulated ellipsometry, Review of Scientific Instruments, vol.60, issue.1, pp.65-77, 1989.
DOI : 10.1063/1.1140580

L. Gallais, Endommagement laser dans les composants optiques : métrologie, analyse statistique et photo-induite des sites initiateurs », thèse de l'Université d, 2002.

J. C. Canit and J. Badoz, New design for a photoelastic modulator, Applied Optics, vol.22, issue.4, pp.592-594, 1983.
DOI : 10.1364/AO.22.000592

M. Abramowitz and I. A. Stegun, Handbook of Mathematical Functions, American Journal of Physics, vol.34, issue.2, 1974.
DOI : 10.1119/1.1972842

E. D. Palik, « Handbook of Optical Constants of Solids, 1985.

R. M. Azzam and T. F. Thonn, « Pseudo-Brewster and second-Brewster angles of an absorbing substrate coated dy a transparent thin film, Applied Optics, vol.22, p.24, 1983.

M. Cathelinaud, « Séquences métal-diélectrique pour le filtrage spectral large bande et les absorbeurs de lumière. Détermination d'indice des couches minces métalliques », thèse de l'université d, 2000.

J. C. Garnett, Colours in Metal Glasses and in Metallic Films, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.203, issue.359-371, pp.385-420, 1904.
DOI : 10.1098/rsta.1904.0024

L. Gallais and J. Y. Natoli, Optimized metrology for laser-damage measurement: application to multiparameter study, Applied Optics, vol.42, issue.6, pp.960-971, 2003.
DOI : 10.1364/AO.42.000960

URL : https://hal.archives-ouvertes.fr/hal-00081046

I. Norme, Determination of laser-damage threshold of optical surfaces. Part 1 : 1-on-1 test, 2000.

J. Y. Natoli, L. Gallais, H. Akhouayri, and C. Amra, Laser-induced damage of materials in bulk, thin-film, and liquid forms, Applied Optics, vol.41, issue.16, pp.3156-3166, 2002.
DOI : 10.1364/AO.41.003156

C. Amra, Développement et comparaison de deux théories vectorielles de la diffusion de la lumière par des surfaces peu rugueuses. Application à l'étude des surfaces et des empilements de couches diélectriques », thèse de l'université d, 1986.

P. Beckmann and A. Sppizzichino, « The scattering of electromagnetic waves from rough surfaces, 1987.

J. W. Goodman, « Statistical properties of laser speckle patterns, Laser speckle and related phenomena, 1984.